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1. 发明申请

WO2004041998A2 AN APPARATUS AND METHOD FOR TWO-DIMENSIONAL ELECTRON GAS ACTUATION AND TRANSDUCTION FOR GAAS NEMS 审中-公开
标题翻译：用于二维电子气体激励和传递用于脑神经元的装置和方法
公开(公告)号：WO2004041998A2
公开(公告)日：2004-05-21
申请号：PCT/US2003/014566
申请日：2003-05-07
申请人： CALIFORNIA INSTITUTE OF TECHNOLOGY , ROUKES, Michael, L. , EKINCI, Kamil, L. , YANG, Y., T. , HUANG, X., M., H. , TANG, H., X. , HARRINGTON, Darrell, A. , CASEY, Jean , ARLETT, Jessica, L.
发明人： ROUKES, Michael, L. , EKINCI, Kamil, L. , YANG, Y., T. , HUANG, X., M., H. , TANG, H., X. , HARRINGTON, Darrell, A. , CASEY, Jean , ARLETT, Jessica, L.
IPC分类号： C12N
CPC分类号： B81B3/0035 , G01P15/08 , G01P15/097 , H03H9/02244 , H03H9/2457 , H03H9/2463 , H03H2009/02496 , H03H2009/02511 , H03H2009/02519 , H03H2009/02527
摘要： A doubly clamped beam has an asymmetric piezoelectric layer within the beam with a gate proximate to the beam within a submicron distance with a gate and beam dipole. A suspended beam is formed using a Cl 2 /He plasma etch supplied at a flow rate ratio of 1:9 respectively into a plasma chamber. A parametric amplifier comprises a NEMS signal beam driven at resonance and a pair of pump beams driven at twice resonance to generate a modulated Lorentz force on the pump beams to perturb the spring constant of the signal beam. A bridge circuit provides two out-of-phase components of an excitation signal to a first and second NEMS beam in a first and second arm. A DC current is supplied to an AC driven NEMS device to tune the resonant frequency. An analyzer comprises a plurality of piezoresistive NEMS cantilevers with different resonant frequencies and a plurality of drive/sense elements, or an interacting plurality of beams to form an optical diffraction grating, or a plurality of strain-sensing NEMS cantilevers, each responsive to a different analyte, or a plurality of piezoresistive NEMS cantilevers with different IR absorbers.
摘要翻译：双夹紧光束在光束内具有非对称压电层，栅极和栅极和光束偶极子之间的亚微米距离内的栅极靠近光束。使用以1：9的流量比提供的Cl 2 / He等离子体蚀刻分别形成悬臂，形成等离子体室。参数放大器包括以共振驱动的NEMS信号光束和以两次谐振驱动的一对泵浦光束，以在泵浦光束上产生调制的洛伦兹力，以扰乱信号光束的弹簧常数。桥接电路在第一和第二臂中向第一和第二NEMS波束提供激励信号的两个异相分量。直流电流被提供给AC驱动NEMS器件以调谐谐振频率。分析器包括具有不同谐振频率的多个压阻NEMS悬臂和多个驱动/感测元件或相互作用的多个光束以形成光学衍射光栅，或多个应变感测NEMS悬臂，每个响应于不同的分析物或具有不同IR吸收剂的多个压阻NEMS悬臂。

2. 发明申请

WO2014081971A1 HIGHLY MULTIPLEXED OPTOGENETIC NEURAL STIMULATION USING INTEGRATED OPTICAL TECHNOLOGIES 审中-公开
标题翻译：使用综合光学技术的高度多光学眼球神经刺激
公开(公告)号：WO2014081971A1
公开(公告)日：2014-05-30
申请号：PCT/US2013/071321
申请日：2013-11-21
申请人： ROUKES, Michael, L. , FOWLER, Trevor , ARLETT, Jessica, L.
发明人： ROUKES, Michael, L. , FOWLER, Trevor , ARLETT, Jessica, L.
IPC分类号： A61N5/06
CPC分类号： A61N5/0622 , A61N2005/0665
摘要： A neural probe is provided. The probe includes: a base that includes an optical demultiplexer, and one or more shanks extending from the base, with each shank including one or more waveguides. In the neural probe, the optical demultiplexer is optically connected to the one or more waveguides of each shank. A system including the neural probe and an optical multiplexer optically connected to the demultiplexer of the neural probe is also provided. Further, a method of emitting light from a neural probe is provided. The method includes receiving and demultiplexing multiplexed optical signals at a base of a neural probe, and emitting the demultiplexed optical signals from one or more shanks of the neural probe.
摘要翻译：提供神经探针。探针包括：包括光解复用器的基座和从基座延伸的一个或多个柄，每个柄包括一个或多个波导。在神经探针中，光学解复用器光学地连接到每个柄的一个或多个波导。还提供了包括神经探针和光学连接到神经探针的解复用器的光学多路复用器的系统。此外，提供了从神经探针发射光的方法。该方法包括在神经探针的基底处接收和解复用复用光信号，以及从神经探针的一个或多个柄发射解复用的光信号。

3. 发明申请

WO2009038579A3 THERMOELASTIC SELF-ACTUATION IN PIEZORESISTIVE RESONATORS 审中-公开
标题翻译：压电谐振器中的热弹性自激励
公开(公告)号：WO2009038579A3
公开(公告)日：2009-08-27
申请号：PCT/US2007078886
申请日：2007-09-19
申请人： CALIFORNIA INST OF TECHN , BARGATIN IGOR , KOZINSKY INNA , ROUKES MICHAEL L , ALDRIDGE JOHN SEQUOYAH , ARLETT JESSICA L , MYERS EDWARD B
发明人： BARGATIN IGOR , KOZINSKY INNA , ROUKES MICHAEL L , ALDRIDGE JOHN SEQUOYAH , ARLETT JESSICA L , MYERS EDWARD B
IPC分类号： G01R19/00 , H01L21/00
CPC分类号： G01H11/08
摘要： Systems and methods for thermally actuating piezoresistive cantilevers are described. One embodiment includes a nanoelectromechanical resonator connected in at least one location to a substrate, an electrically conductive path formed on the resonator and a signal source connected to the electrically conductive path and configured to provide an oscillating actuation signal capable of exciting a resonant mode in the resonator.
摘要翻译：描述了用于热致动压阻悬臂的系统和方法。一个实施例包括纳米机电谐振器，其在至少一个位置处连接到衬底，形成在谐振器上的导电路径以及连接到导电路径并且被配置为提供振荡致动信号，该振荡致动信号能够激励谐振器。

4. 发明申请

WO2004041998A3 NANOMECHANICHAL ENERGY, FORCE, AND MASS SENSORS 审中-公开
标题翻译： NANOMECHANICHAL ENERGY，FORCE和MASS SENSORS
公开(公告)号：WO2004041998A3
公开(公告)日：2005-01-20
申请号：PCT/US0314566
申请日：2003-05-07
申请人： CALIFORNIA INST OF TECHN , ROUKES MICHAEL L , EKINCI KAMIL L , YANG Y T , HUANG X M H , TANG H X , HARRINGTON DARRELL A , CASEY JEAN , ARLETT JESSICA L
发明人： ROUKES MICHAEL L , EKINCI KAMIL L , YANG Y T , HUANG X M H , TANG H X , HARRINGTON DARRELL A , CASEY JEAN , ARLETT JESSICA L
IPC分类号： B81B3/00 , G01N27/00 , G01P15/08 , G01P15/097 , H01L27/14 , H01N31/0328 , C12Q1/68 , G01B7/14 , G01G11/00 , G01N21/00 , G01N23/00 , G01N33/543 , H01P1/10
CPC分类号： B81B3/0035 , G01P15/08 , G01P15/097 , H03H9/02244 , H03H9/2457 , H03H9/2463 , H03H2009/02496 , H03H2009/02511 , H03H2009/02519 , H03H2009/02527
摘要： A doubly clamped beam (30) has an asymmetric piezoelectric layer within the beam with a gate (32) proximate to the beam within a submicron distance with a gate and beam dipole.
摘要翻译：双夹紧光束（30）在光束内具有不对称压电层，其中栅极（32）靠近与栅极和光束偶极子亚微米距离的光束。

5. 发明申请

WO2004041998A9 AN APPARATUS AND METHOD FOR TWO-DIMENSIONAL ELECTRON GAS ACTUATION AND TRANSDUCTION FOR GAS NEMS 审中-公开
标题翻译：用于二维电子气体致动和气体传播的装置和方法
公开(公告)号：WO2004041998A9
公开(公告)日：2004-07-15
申请号：PCT/US0314566
申请日：2003-05-07
申请人： CALIFORNIA INST OF TECHN , ROUKES MICHAEL L , EKINCI KAMIL L , YANG Y T , HUANG X M H , TANG H X , HARRINGTON DARRELL A , CASEY JEAN , ARLETT JESSICA L
发明人： ROUKES MICHAEL L , EKINCI KAMIL L , YANG Y T , HUANG X M H , TANG H X , HARRINGTON DARRELL A , CASEY JEAN , ARLETT JESSICA L
IPC分类号： B81B3/00 , G01N27/00 , G01P15/08 , G01P15/097 , H01L27/14 , C12N
CPC分类号： B81B3/0035 , G01P15/08 , G01P15/097 , H03H9/02244 , H03H9/2457 , H03H9/2463 , H03H2009/02496 , H03H2009/02511 , H03H2009/02519 , H03H2009/02527
摘要： A doubly clamped beam has an asymmetric piezoelectric layer within the beam with a gate proximate to the beam within a submicron distance with a gate and beam dipole. A suspended beam is formed using a Cl2/He plasma etch supplied at a flow rate ratio of 1:9 respectively into a plasma chamber. A parametric amplifier comprises a NEMS signal beam driven at resonance and a pair of pump beams driven at twice resonance to generate a modulated Lorentz force on the pump beams to perturb the spring constant of the signal beam. A bridge circuit provides two out-of-phase components of an excitation signal to a first and second NEMS beam in a first and second arm. A DC current is supplied to an AC driven NEMS device to tune the resonant frequency. An analyzer comprises a plurality of piezoresistive NEMS cantilevers with different resonant frequencies and a plurality of drive/sense elements, or an interacting plurality of beams to form an optical diffraction grating, or a plurality of strain-sensing NEMS cantilevers, each responsive to a different analyte, or a plurality of piezoresistive NEMS cantilevers with different IR absorbers.
摘要翻译：双夹紧光束在光束内具有非对称压电层，栅极和栅极和光束偶极子之间的亚微米距离内的栅极靠近光束。使用以1：9的流量比提供的Cl 2 / He等离子体蚀刻分别形成悬臂，形成等离子体室。参数放大器包括以共振驱动的NEMS信号光束和以两次谐振为驱动的一对泵浦光束，以在泵浦光束上产生调制的洛伦兹力，以扰乱信号光束的弹簧常数。桥接电路在第一和第二臂中向第一和第二NEMS波束提供激励信号的两个异相分量。直流电流被提供给AC驱动NEMS器件以调谐谐振频率。分析器包括具有不同谐振频率的多个压阻NEMS悬臂和多个驱动/感测元件或相互作用的多个光束以形成光学衍射光栅，或多个应变感测NEMS悬臂，每个响应于不同的分析物或具有不同IR吸收剂的多个压阻NEMS悬臂。

6. 发明申请

WO2003095616A2 DYNAMICS BIONEMS SENSORS AND ARRAYS OF BIONEMS SENSOR IMMERSED IN FLUIDS 审中-公开
标题翻译：动力传感器和液体传感器的传感器阵列
公开(公告)号：WO2003095616A2
公开(公告)日：2003-11-20
申请号：PCT/US2003/014284
申请日：2003-05-07
申请人： CALIFORNIA INSTITUTE OF TECHNOLOGY , ROUKES, Michael, L. , FRASER, Scott, E. , SOLOMON, Jerry, E. , CROSS, Michael, C. , ARLETT, Jessica, L.
发明人： ROUKES, Michael, L. , FRASER, Scott, E. , SOLOMON, Jerry, E. , CROSS, Michael, C. , ARLETT, Jessica, L.
IPC分类号： C12N
CPC分类号： G01N33/54373
摘要： A bioNEMS device comprises a piezoresistive cantilever having flexing legs of which attach the cantilever to a support and a biofunctionalized portion at the tip. A bias current applied to the legs is limited by a maximal acceptable temperature increase at the biofunctionalized tip. The length of the cantilever has a magnitude chosen to minimize background Johnson noise. A catalyzed receptor on the device binds to a ligand whose binding rate coefficient is enhanced. The catalyst lowers the receptor-ligand binding activation energy and is designed by forced evolution to preferentially bind with the ligand. A carrier signal is injected by a magnetic film disposed on the cantilever which is electromagnetically coupled to a source of the carrier signal. A plurality of NEMS fluidicly coupled transducers generate a plurality of output signals from which a collective output signal is derived, either by averaging or thresholding. The NEMS devices are disposed in microfluidic flow channels and fabricated in a membrane. A linking molecule is attached to the tip of the transducer and a fluffball attached to the linking molecule to increase damping.
摘要翻译： bioNEMS装置包括压阻悬臂，其具有将悬臂连接到支撑件上的弯曲腿和尖端处的生物功能化部分。施加到腿上的偏置电流受生物功能化尖端的最大可接受的温度升高的限制。悬臂的长度具有选择的最小化背景约翰逊噪声的大小。器件上的催化受体与结合速率系数增强的配体结合。催化剂降低受体 - 配体结合活化能，并通过强制进化来优先与配体结合而设计。载体信号由布置在悬臂上的磁膜注入，该磁膜电磁耦合到载波信号源。多个NEMS流体耦合的换能器产生多个输出信号，通过平均或阈值从该输出信号导出集体输出信号。 NEMS装置设置在微流体流动通道中并制成膜。连接分子连接到换能器的尖端，并且连接到连接分子上的绒毛增加阻尼。

7. 发明申请

WO2009038579A2 THERMOELASTIC SELF-ACTUATION IN PIEZORESISTIVE RESONATORS 审中-公开
标题翻译：激光谐振器中的热自动启动
公开(公告)号：WO2009038579A2
公开(公告)日：2009-03-26
申请号：PCT/US2007/078886
申请日：2007-09-19
申请人： CALIFORNIA INSTITUTE OF TECHNOLOGY , BARGATIN, Igor , KOZINSKY, Inna , ROUKES, Michael, L. , ALDRIDGE, John, Sequoyah , ARLETT, Jessica, L. , MYERS, Edward, B.
发明人： BARGATIN, Igor , KOZINSKY, Inna , ROUKES, Michael, L. , ALDRIDGE, John, Sequoyah , ARLETT, Jessica, L. , MYERS, Edward, B.
IPC分类号： G01H11/08
CPC分类号： G01H11/08
摘要： Systems and methods for thermally actuating piezoresistive cantilevers are described. One embodiment includes a nanoelectromechanical resonator connected in at least one location to a substrate, an electrically conductive path formed on the resonator and a signal source connected to the electrically conductive path and configured to provide an oscillating actuation signal capable of exciting a resonant mode in the resonator.
摘要翻译：描述了用于热致动压阻悬臂的系统和方法。一个实施例包括在至少一个位置连接到衬底的纳米机电谐振器，形成在谐振器上的导电路径和连接到导电路径的信号源，并且被配置为提供能够激励谐振模式的振荡致动信号谐振器。

8. 发明申请

WO2003095616A3 DYNAMICS BIONEMS SENSORS AND ARRAYS OF BIONEMS SENSOR IMMERSED IN FLUIDS 审中-公开
公开(公告)号：WO2003095616A3
公开(公告)日：2003-11-20
申请号：PCT/US2003/014284
申请日：2003-05-07
申请人： CALIFORNIA INSTITUTE OF TECHNOLOGY , ROUKES, Michael, L. , FRASER, Scott, E. , SOLOMON, Jerry, E. , CROSS, Michael, C. , ARLETT, Jessica, L.
发明人： ROUKES, Michael, L. , FRASER, Scott, E. , SOLOMON, Jerry, E. , CROSS, Michael, C. , ARLETT, Jessica, L.
IPC分类号： H01J37/26
摘要： A bioNEMS device is disclosed comprising a BioNEMS cantilever (10) coupled to a constriction region (12) comprising a plurality of legs (20) such that the device operates in fluid and is used to investigate ligand properties using receptors implanted on the cantilever assembly.

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