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61. 发明申请

WO01038036A1 METHOD AND DEVICE FOR TREATING SUBSTRATES BY MEANS OF LASER BEAMS 审中-公开
标题翻译：方法和设备，用于处理衬底用激光
公开(公告)号：WO01038036A1
公开(公告)日：2001-05-31
申请号：PCT/DE2000/004240
申请日：2000-11-28
IPC分类号： B23K26/06 , B23K26/073 , B23K26/38 , H05K3/00 , H05K3/02 , B23K26/00
CPC分类号： H05K3/0026 , B23K26/0604 , B23K26/073 , B23K26/389 , H05K3/027 , H05K2203/108
摘要： The invention relates to a method and to a device for treating substrates by means of laser beams. When large-surface structures (21) and fine structures (20) on a substrate (7) are treated at the same time, the large-surface structures (21) are usually treated in fine lines, which is a very time-consuming process. According to the inventive method, the fine structures (20) are treated with a smaller spot size (8) than the structures (21) that have a large surface.
摘要翻译：大型结构（21）和在衬底上的精细结构（20）（7）来处理通常导致一个事实，即大尺度结构（21）在细线被除去，这是非常耗时的。根据本发明，提出具有更小光斑宽度（8），其在平面构造结构（21）来编辑精细结构（20）。

62. 发明申请

WO00054926A1 SYSTEM AND METHOD FOR FEATURE COMPENSATION OF AN ABLATED INKJET NOZZLE PLATE 审中-公开
标题翻译：喷射式喷嘴板特征补偿系统及方法
公开(公告)号：WO00054926A1
公开(公告)日：2000-09-21
申请号：PCT/US1999/028156
申请日：1999-11-29
IPC分类号： B41J2/135 , B23K26/00 , B23K26/06 , B23K26/38 , B23K101/36 , B41J2/16
CPC分类号： B41J2/1634 , B23K26/066 , B23K26/382 , B23K26/389 , B23K2203/42 , B23K2203/50 , B41J2/162
摘要： A system and method of adjusting mask feature dimensions to compensate for anomalies in energy output of a laser beam used in ablating a workpiece. This method involves measuring the effects of variations in energy output of the laser beam at several points in the laser beam profile. This is accomplished by measuring test parts that have been ablated with a standard mask with holes of uniform size. In the embodiment where the workpiece is a nozzle plate, the features adapted in the mask are the diameters of the mask holes. Differences in the effects of the energy output between the points in the laser beam are then compensated for by adjusting the mask features that correspond to the points in the laser beam as shown in the figure.
摘要翻译：调整掩模特征尺寸以补偿在烧蚀工件时使用的激光束的能量输出异常的系统和方法。该方法包括测量激光束在几个点处的能量输出的变化的影响。这是通过测量已经用具有均匀尺寸的孔的标准面罩烧蚀的测试部件来实现的。在工件是喷嘴板的实施例中，适用于掩模的特征是掩模孔的直径。然后通过调整对应于激光束中的点的掩模特征来补偿激光束中的点之间的能量输出的影响的差异，如图所示。

63. 发明申请

WO00030799A1 MASK ORBITING FOR LASER ABLATED FEATURE FORMATION 审中-公开
标题翻译：用于激光吸收特征形成的掩模
公开(公告)号：WO00030799A1
公开(公告)日：2000-06-02
申请号：PCT/US1999/005637
申请日：1999-03-17
IPC分类号： B41J2/135 , B23K26/00 , B23K26/06 , B23K26/38 , B23K101/36 , B41J2/14 , B41J2/16
CPC分类号： B23K26/40 , B23K26/066 , B23K26/382 , B23K26/389 , B23K2203/30 , B23K2203/42 , B23K2203/50 , B41J2/14 , B41J2/162 , B41J2/1634
摘要： This invention concerns a process useful for ablating features from a substrate, including the steps of illuminating the substrate with laser light that has passed through a mask to form an ablated feature in the substrate, wherein the mask is orbited perpendicular to the angle of the laser light during formation of the feature thereby forming a selected wall shape. This invention also concerns an apparatus useful for making holes in a substrate having a radiation source; a mask positioned between the radiation source and a substrate to be irradiated with radiation from the radiation source, wherein the mask is capable of following a trajectory perpendicular to the angle of the radiation.
摘要翻译：本发明涉及一种用于从衬底烧蚀特征的方法，包括以下步骤：用穿过掩模的激光照射衬底，以在衬底中形成烧蚀特征，其中掩模垂直于激光角度在形成特征期间的光，从而形成选定的壁形。本发明还涉及一种用于在具有辐射源的衬底中制造孔的装置; 位于辐射源和待辐射源的辐射源之间的掩模，其中掩模能够跟随垂直于辐射角度的轨迹。

64. 发明申请

WO0010037A3 METHOD FOR SCANNING A PULSED LASER BEAM FOR SURFACE ABLATION 审中-公开
标题翻译：用于扫描脉冲激光束用于表面消除的方法
公开(公告)号：WO0010037A3
公开(公告)日：2000-05-18
申请号：PCT/US9918210
申请日：1999-08-11
申请人： LAI MING
发明人： LAI MING
IPC分类号： A61B18/20 , A61F9/01 , B23K26/08 , B23K26/38 , A61B18/00
CPC分类号： B23K26/08 , A61F9/00804 , A61F2009/00872 , A61F2009/00897 , B23K26/082 , B23K26/389
摘要： A fast, smooth scanning is described for achieving uniform ablated surface without relying on any synchronization between the laser pulses and the scanner mirror (40) positions. The scanning takes a series of close loops, and the scanning speed on each loop is fine-tuned according to the perimeter of the loop. A uniform, and close-packed pulse disposition along each loop can be achieved by multiple successive scans along the loop, while the consecutive pulses of a scan can be well separated. The scanning pattern is such designed that the energy distribution is uniform for every layer, and the smoothness of the ablated surface remains substantially unchanged as the number of the layer increases.
摘要翻译：描述了快速，平滑的扫描以实现均匀的烧蚀表面，而不依赖于激光脉冲和扫描仪镜（40）位置之间的任何同步。扫描采取一系列紧密循环，每个循环上的扫描速度根据循环的周长进行微调。沿着环路的多次连续扫描可以实现沿着每个环路的均匀和紧密的脉冲配置，而扫描的连续脉冲可以很好地分离。扫描图案被设计成使得每层的能量分布是均匀的，并且随着层数的增加，烧蚀表面的平滑度基本上保持不变。

65. 发明申请

WO0026942A2 METHOD FOR PRODUCING FILLED VIAS IN ELECTRONIC COMPONENTS 审中-公开
公开(公告)号：WO0026942A2
公开(公告)日：2000-05-11
申请号：PCT/US9925652
申请日：1999-11-02
申请人： COORS CERAMICS COMPANY
发明人： RITLAND MARCUS A , LANDIN STEVEN
IPC分类号： H01L23/10 , H01L23/498 , H05K1/03 , H05K3/40 , H01L
CPC分类号： B23K26/382 , B23K26/389 , B23K26/40 , B23K2203/50 , B23K2203/52 , H01L23/10 , H01L23/49827 , H01L23/49883 , H01L2924/0002 , H01L2924/09701 , H05K1/0306 , H05K3/4046 , H05K2201/10287 , H05K2201/10416 , Y10T29/49163 , Y10T29/49165 , Y10T156/1056 , Y10T428/24157 , H01L2924/00
摘要： The present invention relates to a process for producing filled vias (230) which are made of two components, a first component (240) which forms a bonding layer between the wall of the via and a second component (250) which forms the core of the via. Preferably, the two components solidify from a melt which includes two immiscible liquids. The first liquid is capable of wetting the wall of the via and the second liquid. The resulting product is also disclosed. Preferably the first component comprises a copper oxide and the second component comprises a conductive metal such as silver or copper.

66. 发明申请

WO99063793A1 APPARATUS AND METHOD FOR DRILLING MICROVIA HOLES IN ELECTRICAL CIRCUIT INTERCONNECTION PACKAGES 审中-公开
标题翻译：电路互连包装中微孔的钻孔装置及方法
公开(公告)号：WO99063793A1
公开(公告)日：1999-12-09
申请号：PCT/GB1999/001694
申请日：1999-05-27
IPC分类号： B23K26/00 , B23K26/06 , B23K26/073 , B23K26/38 , B23K101/42 , H05K3/00
CPC分类号： B23K26/066 , B23K26/073 , B23K26/0734 , B23K26/382 , B23K26/389 , B23K26/40 , B23K2203/30 , B23K2203/42 , B23K2203/50 , H05K3/0026
摘要： This invention applies to the use of shaped beams of laser radiation for increasing the maximum speed of tools used to laser drill microvia holes in PCB's, PWB's and other electrical circuit packages. With an annular spatial intensity distribution, the maximum speed can be increased several fold from machines which do not incorporate such laser beam shaping. Different hole diameters on a one device can be programmed using a set of ring beam shaping elements incorporated into a single transmissive mask element whose lateral position when placed in the beam is computer-controlled.
摘要翻译：本发明适用于使用激光辐射成形光束来增加用于在PCB，PWB和其它电路封装中激光钻孔微孔的工具的最大速度。具有环形空间强度分布，最大速度可以从不包含这种激光束整形的机器增加几倍。可以使用一组环形光束整形元件来编程一个设备上的不同孔直径，该组环形束成形元件被并入单个透射掩模元件中，其中放置在光束中的横向位置是计算机控制的。

67. 发明申请

WO99028618A1 FUEL INJECTION DEVICE FOR INTERNAL COMBUSTION ENGINES 审中-公开
标题翻译：燃料喷射装置，用于内燃机
公开(公告)号：WO99028618A1
公开(公告)日：1999-06-10
申请号：PCT/DE1998/003474
申请日：1998-11-26
IPC分类号： B01D35/02 , B23K15/08 , B23K26/18 , B23K26/382 , B23K26/384 , F02M57/02 , F02M59/44 , F02M61/16 , B23K26/00
CPC分类号： F02M61/165 , B23K15/085 , B23K26/18 , B23K26/384 , B23K26/389 , F02M57/02 , F02M59/44
摘要： A fuel injection device for internal combustion engines comprises a fuel injection pump (5) which can be placed in the housing of the internal combustion engine and is axially clamped by a clamping sleeve (9) with a fuel injection valve (7) which projects with its end away from the pump into a combustion chamber of the internal combustion engine, and a pipe (41) for feeding fuel to a fuel injection pump (5). The fuel feeding pipe (41) opens into an annular space (37) which surrounds the clamping sleeve (9) and can communicate through holes (39) in the clamping sleeve (9) and inlet channels (49) in the pump housing with a working chamber (19) of the fuel injection pump. According to the invention, the fuel filter is formed in the inlet into the pump working chamber (19) by the clamping sleeve (9), which has for this purpose a plurality of filter openings (39) in its circumferential wall in the area of the annular space (37).
摘要翻译：对于具有在所述内燃机的燃料喷射泵的壳体可插入（5），通过夹紧套筒的装置的内燃机的燃料喷射装置（9）轴向上与一个燃料喷射阀（7）支撑，这与其远程突出于泵端插入内燃机的燃烧室和与燃料供给管线（ 41）（以所述燃料喷射泵5），所述夹紧套筒（在9周围）（37）打开的环形空间中，（在开口39）（在夹紧套筒9）和入口通道（49）在泵壳与所述燃料喷射泵的泵的工作空间（19）可连接。这里，根据本发明，通过在夹紧套筒（9）的进料泵的工作空间（19）中的燃料过滤器被形成具有这种在其周壁的环形空间（37）的多个过滤器开口（39）的面积。

68. 发明申请

WO99019108A1 FINE AND MICRO-MACHINING PROCESS FOR WORKPIECES BY MEANS OF LASER BEAMS 审中-公开
标题翻译：对于精细和微加工工件的方法通过激光束，并且设备包括用于实现过程
公开(公告)号：WO99019108A1
公开(公告)日：1999-04-22
申请号：PCT/EP1998/005836
申请日：1998-09-15
IPC分类号： B23K26/06 , B23K26/064 , B23K26/073 , B23K26/08 , B23K26/082 , B23K26/388 , G02B27/64
CPC分类号： G02B27/642 , B23K26/06 , B23K26/064 , B23K26/0648 , B23K26/0652 , B23K26/0665 , B23K26/08 , B23K26/082 , B23K26/389
摘要： A process and device are disclosed for fine and micro-machining workpieces by means of laser beams. The process is conducted in several stages and the device has a modular design. The process and device make it possible to generate highly uniform cut joints or grooves, to set the required conicity, to work in a highly accurate and reproducible manner and give a great freedom of design during machining.
摘要翻译：已提出了用于通过激光束，一种方法和装置执行它的精细和微机械加工的工件。处理前进在几个阶段和设备是模块化的。该方法和装置允许精细和微机械加工的工件通过激光束的装置，以这样的方式使得它们产生切口或具有基本上均匀的形状的凹槽; 允许编辑时形状的基本上自由选择; 允许所需锥度的调整; 高度准确，重复性的工作。

69. 发明申请

WO99014010A1 OPTICAL DEVICE FOR BORING USING A LASER BEAM 审中-公开
标题翻译：光学装置钻井用激光束
公开(公告)号：WO99014010A1
公开(公告)日：1999-03-25
申请号：PCT/DE1998/002639
申请日：1998-09-07
IPC分类号： B23K26/06 , B23K26/064 , B23K26/388 , B23K26/00
CPC分类号： B23K26/0665 , B23K26/06 , B23K26/064 , B23K26/0648 , B23K26/0652 , B23K26/389
摘要： The invention relates to an optical device for boring using a laser beam (5), comprising an optical system for guiding the laser beam (5) on a circular cutting course, said optical system being arranged in the beam path, and focusing optics (6) for focusing the laser beam (5) on a workpiece (7). The optical system contains an image rotation device (4) which can be rotated separately, the beam being guided on the cutting course with said image rotation device. The inventive device is therefore simply constructed and has a simple means of adjusting the various parameters.
摘要翻译：通过本发明的激光束的装置涉及一种用于钻孔的光学装置（5）具有设置在光路中的光学布置用于引导一个圆形切割路径上的激光束（5）和位于所述阵列，所述激光束（5）后面上的工件（7 ）聚焦的聚焦光学器件（6）。的各种参数的一个简单的调节是通过一个简单的结构，该光学装置包括与该光束引导是在切割线进行分别可旋转图像旋转器（4）来实现的。

70. 发明申请

WO99011419A1 LASER-DRILLING 审中-公开
标题翻译：激光打孔
公开(公告)号：WO99011419A1
公开(公告)日：1999-03-11
申请号：PCT/GB1998/002591
申请日：1998-08-28
IPC分类号： B23K26/00 , B23K26/18 , B23K26/38 , F02M61/16
CPC分类号： F02M61/168 , B23K26/18 , B23K26/382 , B23K26/389
摘要： A method of laser-drilling a hole through a workpiece, such as an injector nozzle (40), into a cavity comprising drilling a hole (41) through the workpiece (40) with a laser (50), providing a fluid having laser-barrier properties in the cavity so that, when the hole (41) is open to the cavity, laserlight passing through the hole (41) is incident upon the fluid whereby the workpiece (40) across the cavity from the hole (41) is protected from the laserlight, and arranging that the fluid does not enter the laser-drilled hole (41) during the drilling process. Apparatus for performing the method is also described.
摘要翻译：一种通过诸如喷射器喷嘴（40）的工件对孔进行激光钻孔的方法，包括用激光（50）钻孔通过工件（40）的孔（41），从而提供具有激光 - 所述空腔中的阻挡性能使得当所述孔（41）向所述空腔开放时，穿过所述孔（41）的激光入射到所述流体上，从而使来自所述孔（41）的穿过所述空腔的所述工件（40）被保护并且在钻孔过程中布置流体不进入激光钻孔（41）。还描述了用于执行该方法的装置。

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