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    • 59. 发明申请
    • LONG WAVELENGTH VCSEL WITH TUNNEL JUNCTION AND IMPLANT
    • 长波长VCSEL与隧道连接和植入
    • WO2004049528A2
    • 2004-06-10
    • PCT/US2003/040047
    • 2003-11-20
    • HONEYWELL INTERNATIONAL INC.
    • JOHNSON, Ralph, H.WANG, Tzu-Yu
    • H01S5/183
    • H01S5/18308H01S5/0425H01S5/18311H01S5/18316H01S5/1833H01S5/18369H01S5/18377H01S5/2063H01S5/3095
    • A vertical cavity having a tunnel junction surface emitting laser (VCSEL) for emitting long wavelength light (i.e., 1200 to 1800 nanometers, though it is contemplated that the structures and techniques are applicable to other wavelength VCSELs). The tunnel junction may be isolated with an implant down into the top mirror through the tunnel junction and p-layer and a trench around the VCSEL down to at least past the tunnel junction. The trench may result in reduced capacitance and D.C. isolation of the tunnel junction. The implant is performed after the trench is made. Some of the implant may enter the bottom of the trench into the bottom mirror for some further isolation for the tunnel junction of the VCSEL. Further isolation and some current confinement may be provided with lateral oxidation of a layer below the tunnel junction. Internal trenches may be made from the top of the VCSEL vertically down to the oxidizable layer below the tunneljunction. Oxidation of that layer via these trenches may provide further isolation of the tunnel junction. Also, a bonding pad connected to a contact on the VCSEL with a bridge may have an open trench about their periphery for their isolation. Internal trenches may be placed on the pad and its bridge that go down vertically to the oxidizable layer. Oxidation via these trenches may provide further isolation for the pad and bridge if the latter is present.
    • 具有用于发射长波长光的隧道结表面发射激光器(VCSEL)的垂直腔(即1200至1800纳米,尽管预期该结构和技术可应用于其它波长VCSEL)。 隧道结可以通过隧道结和p层以及VCSEL周围的沟槽沿着至少穿过隧道结的方式与植入物隔离成上反射镜。 沟道可能会导致隧道结的电容和直流隔离。 在制造沟槽之后执行注入。 一些植入物可以进入沟槽的底部进入底部反射镜,以进一步隔离VCSEL的隧道结。 可以在隧道结下方的层的侧向氧化提供进一步隔离和一些电流限制。 内部沟槽可以从VCSEL的顶部垂直向下到达隧道结下方的可氧化层。 通过这些沟槽氧化该层可以进一步隔离隧道结。 此外,连接到具有桥接器的VCSEL上的接触件的接合焊盘可以围绕其外围具有敞开的沟槽用于隔离。 内部沟槽可以放置在垂直于可氧化层的衬垫及其桥上。 通过这些沟槽的氧化可以为衬垫和桥梁提供进一步隔离,如果后者存在的话。