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    • 51. 发明申请
    • METHOD AND DEVICE FOR SPECTRALLY SEPARATING LINES OF A LIGHT BEAM, IN PARTICULAR OF A LASER LIGHT BEAM
    • 用于光束分布线的方法和装置,特别是激光光束
    • WO2005006057A1
    • 2005-01-20
    • PCT/EP2003/009072
    • 2003-08-16
    • CARL ZEISS SMT AGDIECKMANN, NilsFIOLKA, Damian
    • DIECKMANN, NilsFIOLKA, Damian
    • G02B27/28
    • G02B27/283G02B6/2713G02B6/29302G02B27/108G02B27/145
    • A method for spectrally separating lines of a light beam, in particular of a laser light beam (12), is described, which has a first spectral line with a wavelength λ 1 and at least a second spectral line with a wavelength λ 2 , different from the wavelength λ 1 , the light beam (12) being irradiated onto an optical arrangement (14, 14') as light beam (16) at the input end having the first spectral line and the second spectral line, and there being obtained at least one light beam (18) at the output end in the case of which the second spectral line is eliminated. The state of polarization of the second spectral line is varied relative to the state of polarization of the first spectral line by means of at least one first wavelength-selective optical component (20, 20') of the optical arrangement (14, 14'), and in that subsequently the second spectral line is eliminated from the light beam by means of at least one polarization-selective second optical component (22, 22') of the optical arrangement (14, 14'). Further, a device, by means of which the method can be carried out, is disclosed.
    • 描述了一种用于光谱分离光束的方法,特别是激光束(12)的线,其具有波长λ1的第一光谱线和至少具有波长λ2的第二光谱线,不同于 波长λ1,在具有第一光谱线和第二光谱线的输入端作为光束(16)照射到光学装置(14,14')上的光束(12),并且获得至少一个光 在消除第二光谱线的情况下,输出端的光束(18)。 借助于光学装置(14,14')的至少一个第一波长选择性光学部件(20,20'),第二光谱线的偏振状态相对于第一光谱线的偏振状态变化, ,随后通过光学装置(14,14')的至少一个偏振选择性第二光学部件(22,22')从光束中消除第二光谱线。 此外,公开了一种可以执行该方法的装置。
    • 52. 发明申请
    • 照明装置及びこれを備えたプロジェクタ
    • 照明装置和具有该装置的投影仪
    • WO2004109389A1
    • 2004-12-16
    • PCT/JP2004/008265
    • 2004-06-07
    • セイコーエプソン株式会社
    • 藤澤 尚平竹澤 武士
    • G03B21/14
    • G02B27/1046G02B27/145G02B27/149G03B21/2026H04N9/315
    • 発光管110B及び楕円面リフレクタ110Aを有する光源ランプ110と、リフレクタ110Aからの照明光を平行化する光学レンズ116とを備えた照明装置において 発光管110Bは、リフレクタ110Aの内外に位置する2つの焦点P1,P2のうちリフレクタ反射面側の焦点P1を発光管110B内に含み、かつ発光管110Bの発光中心Qがリフレクタ中心軸OCに直交する仮想平面内で偏倚する位置に配置され、 平行化レンズ116は、リフレクタ中心軸OCに平行な基準軸L上にレンズ光軸を有し、平行化レンズ116のレンズ光軸がリフレクタ中心軸OCに対して発光管110Bの発光中心Qが偏倚する方向と反対側方向に偏倚する位置に配置されている特徴とする照明装置。
    • 照明装置包括具有电弧管(110B)和椭圆面反射体(110A)的光源灯(110)和准直来自反射器(110A)的照明光的光学透镜(116)。 该照明装置的特征在于,电弧管(110B)包括位于反射器(110A)内部和外部的两个焦点(P1,P2),位于反射器反射面侧的焦点(P1) 在电弧管(110B)中,发光管(110B)的发光中心(Q)位于与反射体中心轴(OC)正交的虚拟平面偏移的位置,并且准直 透镜116具有与反射体中心轴(OC)平行的基准轴(L)上的光学透镜轴,准直透镜(116)的光学透镜轴位于相反方向偏移的位置 与发光管(110B)的发光中心(Q)相对于反射器中心轴(OC)偏移的方向。
    • 54. 发明申请
    • DEVICE FOR REDUCING COHERENCE
    • 安排一致性还原
    • WO2004031837A8
    • 2004-10-28
    • PCT/EP0310074
    • 2003-09-11
    • ZEISS CARL SMS GMBHBRUNNER ROBERTBURKHARDT MATTHIASERDMANN LARSMENCK ALEXANDER
    • BRUNNER ROBERTBURKHARDT MATTHIASERDMANN LARSMENCK ALEXANDER
    • G02B27/14G02B27/48
    • G02B27/144G02B27/143G02B27/145G02B27/48
    • The invention relates to a device for reducing the coherence of a light beam, especially a laser light beam for illuminating the image surface of a probe. According to the invention, said device comprises a beam divider, e.g. a first divider cube (2) whereon an incident beam (1) is divided into two partial beams (4,5), a device for reconstituting a beam, e.g. a second divider cube (6) whereon the partial beams (4,5) are recombined to form an outgoing light beam (10), and deflector elements, e.g. mirrors (8,9) which are positioned in the light paths of the partial beams (4,5) between the two devices. The lengths of the light paths of the partial beams (4,5) vary and the length difference is such that the coherence of the wave trains/phase space cells is exceeded, whereby the ability to cause mutual interference is reduced or removed.
    • 本发明涉及一种装置,用于减少光束的相干性,特别是激光束用于照射的图像区域或样品。 根据本发明,这样的布置包括一设备,用于分束,例如 第一分束器立方体(2)中,在其中入射光束(1)分割成两个部分光束(4,5),用于组合光束的装置,例如 第二分束器立方体(6)在其上的部分光束(4,5)被组合以形成一个输出光束(10)和偏转元件,例如 反射镜(8,9)布置在所述部分光束的光路(4,5)这两个装置之间被定位,其中,所述副光束的光路长度(4,5)是不同的,在长度上的差异是如此之大,使得波列的相干 在部分光束/相位空间的细胞(图4,5)的上限,因此,它们彼此干扰能力降低或取消。
    • 56. 发明申请
    • APPARATUS AND METHOD FOR JOINT MEASUREMENTS OF CONJUGATED QUADRATURES OF FIELDS OF REFLECTED/SCATTERED AND TRANSMITTED BEAMS BY AN OBJECT IN INTERFEROMETRY
    • 用于干涉测量的对象的反射/散射和透射的区域的相关联的测量的测量装置和方法
    • WO2004068187A2
    • 2004-08-12
    • PCT/US2004/002166
    • 2004-01-27
    • ZETETIC INSTITUTEHILL, Henry, Allen
    • HILL, Henry, Allen
    • G02B
    • G01B9/02007A45D2008/006G01B9/02002G01B9/0201G01B9/02014G01B9/02022G01B9/02042G01B9/02079G01B9/04G01B2290/70G02B21/0056G02B21/14G02B27/017G02B27/108G02B27/126G02B27/143G02B27/144G02B27/145
    • An interferometery system for making interferometric measurements of an object, the system including: a beam generation module which during operation delivers an output beam that includes a first beam at a first frequency and a second beam at a second frequency that is different from the first frequency, the first and second beams within the output beam being coextensive, the beam generation module including a beam conditioner which during operation introduces a sequence of different shifts in a selected parameter of each of the first and second beams, the selected parameter selected from a group consisting of phase and frequency; a detector assembly having a detector element; and an interferometer constructed to receive the output beam at least a part of which represents a first measurement beam at the first frequency and a second measurement beam at the second frequency, the interferometer further constructed to image both the first and second measurement beams onto a selected spot on the object to produce therefrom corresponding first and second return measurement beams, and to then simultaneously image the first and second return measurement beams onto said detector element.
    • 一种用于对物体进行干涉测量的干涉仪系统,所述系统包括:光束产生模块,其在操作期间传送包括第一频率的第一光束和不同于第一频率的第二频率的第二光束的输出光束 输出光束内的第一和第二光束共同延伸,光束产生模块包括光束调节器,其在操作期间引入第一和第二光束中的每一个的选定参数中的不同偏移序列,所选参数选自组 由相位和频率组成; 具有检测器元件的检测器组件; 以及干涉仪,其被构造为接收输出光束,所述输出光束的至少一部分表示第一频率处的第一测量光束和在第二频率处的第二测量光束,所述干涉仪还被构造成将所述第一和第二测量光束成像到所选择的 对象上产生相应的第一和第二返回测量光束,然后同时将第一和第二返回测量光束成像到所述检测器元件上。