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31. 发明申请

WO01080281A2 STAND ALONE PLASMA VACUUM PUMP 审中-公开
标题翻译：独立等离子真空泵
公开(公告)号：WO01080281A2
公开(公告)日：2001-10-25
申请号：PCT/US2001/011111
申请日：2001-04-06
IPC分类号： H05H1/46 , B01J3/02 , H01J41/12 , H01J41/18 , H01L21/3065 , H01L21/31 , H05H1/14 , H01J41/00
CPC分类号： H01J41/18
摘要： A stand-alone plasma vacuum pump for pumping gas from a low-pressure inlet to a high-pressure outlet, composed of: a housing enclosing one or more pumping regions located between the inlet and the outlet; a plurality of permanent magnet assemblies providing magnetic fields that extend in the pumping region between the inlet and the outlet, the magnetic field forming magnetic flux channels for guiding and confining plasmas; elements disposed for coupling microwave power into the flux channels to heat electrons, ionize gas, and accelerate plasma ions in a direction from the inlet to the outlet; elements disposed for creating an electric in the magnetic flux channels to accelerate ions in the flux channels toward the outlet by momentum transfer; and a differential conductance baffle proximate to the outlet for promoting flow of plasma ions and neutral atoms to the outlet while impeding flow of neutral gas molecules in a direction from the outlet toward the inlet.
摘要翻译：一种独立的等离子体真空泵，用于将气体从低压入口泵送到高压出口，所述等离子体真空泵由围绕位于入口和出口之间的一个或多个泵送区域的外壳组成; 多个永磁体组件，其提供在入口和出口之间的泵送区域中延伸的磁场，形成用于引导和限制等离子体的磁通通道的磁场; 用于将微波功率耦合到通量通道中以加热电子，离子化气体并在从入口到出口的方向加速等离子体离子的元件; 被设置用于在磁通量通道中产生电的元件，以通过动量传递将通量通道中的离子加速到出口; 以及靠近出口的差分电导挡板，用于促进等离子体离子和中性原子流到出口，同时阻止中性气体分子在从出口朝向入口的方向上的流动。

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