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    • 32. 发明申请
    • METHOD AND SYSTEM FOR HIGH-SPEED PRECISE LASER TRIMMING, SCAN LENS SYSTEM FOR USE THEREIN AND ELECTRICAL DEVICE PRODUCED THEREBY
    • 高速精密激光切割方法与系统及其使用的扫描镜头系统及其制造的电气设备
    • WO2006042231A2
    • 2006-04-20
    • PCT/US2005036421
    • 2005-10-07
    • GSI LUMONICS CORPGU BOLENTO JOSEPH VEHRMANN JONATHAN SCOUCH BRUCE LCHU YUN FEEJOHNSON SHEPARD D
    • GU BOLENTO JOSEPH VEHRMANN JONATHAN SCOUCH BRUCE LCHU YUN FEEJOHNSON SHEPARD D
    • G06K7/10
    • H01C17/242B23K26/0622B23K26/082
    • A method, system and scan lens system are provided for high-speed, laser-based, precise laser trimming at least one electrical element. The method includes generating a pulsed laser output having one or more laser pulses at a repetition rate. Each laser pulse has a pulse energy, a laser wavelength within a range of laser wavelengths, and a pulse duration. The method further includes selectively irradiating the at least one electrical element with the one or more laser pulses focused into at least one spot having a non-uniform intensity profile along a direction and a spot diameter as small as about 6 microns to about 15 microns so as to cause the one or more laser pulses to selectively remove material from the at least one element and laser trim the at least one element while avoiding substantial microcracking within the at least one element. The wavelength is short enough to produce desired short-wavelength benefits of small spot size, tight tolerance and high absorption, but not so short so as to cause microcracking.
    • 提供了一种方法,系统和扫描透镜系统,用于高速,基于激光的,精确的激光修剪至少一个电气元件。 该方法包括以重复率产生具有一个或多个激光脉冲的脉冲激光输出。 每个激光脉冲具有脉冲能量,在激光波长范围内的激光波长和脉冲持续时间。 所述方法还包括选择性地照射所述至少一个电气元件,所述一个或多个激光脉冲聚焦在沿着方向具有不均匀强度分布的至少一个点和小至约6微米至约15微米的光点直径上 以使所述一个或多个激光脉冲从所述至少一个元件选择性地去除材料,并激光修整所述至少一个元件,同时避免所述至少一个元件内的实质性微裂纹。 波长足够短以产生小斑点尺寸,紧度公差和高吸收性能所需的短波长益处,但不会如此短,从而导致微裂纹。
    • 36. 发明申请
    • PASSIVE COMPONENT
    • 被动组件
    • WO01093283A1
    • 2001-12-06
    • PCT/EP2001/005637
    • 2001-05-16
    • H01C7/00H01C17/242H01C17/26H01G4/255H01G4/33
    • H01G4/255H01C17/242H01C17/26
    • The passive component (1) has a first part (22) of a material with a first resistance value, which value can be lowered to a second value by laser trimming. The second value is at most one tenth of the first value and preferably less. Said material crystallizes in a laser trimming process, which locally heats the material to at least a transition temperature. Said material contains at least two different elements, which are preferably aluminum and germanium. The passive component (1) may be, for example, a resistor or a capacitor and may be part of a thin-film network of resistors, capacitors and/or inductors. In a resistor, it is preferred to have a second part (4) which contains a different resistance material with a resistance value lower than the first value and preferably higher than the second value.
    • 无源部件(1)具有具有第一电阻值的材料的第一部分(22),该值可以通过激光修整降低到第二值。 第二个值最多是第一个值的十分之一,最好是较小的值。 所述材料在激光修整过程中结晶,其将材料局部加热至至少转变温度。 所述材料含有至少两种不同的元素,其优选为铝和锗。 无源部件(1)可以是例如电阻器或电容器,并且可以是电阻器,电容器和/或电感器的薄膜网络的一部分。 在电阻器中,优选具有电阻值低于第一值且优选高于第二值的不同电阻材料的第二部分(4)。
    • 39. 发明申请
    • PULSE CONTROL IN LASER SYSTEMS
    • 激光系统中的脉冲控制
    • WO99065123A1
    • 1999-12-16
    • PCT/US1999/012148
    • 1999-06-02
    • B23K26/00B23K26/06H01C17/242H01G5/019H01S3/00H01S3/10H01S3/11H01S3/117H01S3/13
    • H01C17/242B23K26/0622B23K26/064B23K26/0648H01G5/019H01S3/0057H01S3/0085H01S3/08068H01S3/10038H01S3/10046H01S3/1068H01S3/117
    • A pulsed laser system includes a laser pump (14), a laser rod (12), a reflector (18) interposed between the laser pump and the laser rod, through which energy from the laser pump enters the laser rod, an output reflector (28) through which energy is emitted from the laser rod, a switch (20) interposed between the laser rod and the output reflector, and a control device. The control device allows a primary laser pulse emitted from the laser rod during the emission period to impinge on a workpiece and blocks from the workpiece secondary laser emission occurring during the emission period after emission of the primary pulse. The pulsed laser system is operated over a range of repetition rates, so as to cause laser energy emitted during plural emission periods at each repetition rate. A portion of the laser energy emitted is directed toward the target structure.
    • 脉冲激光系统包括激光泵(14),激光棒(12),介于激光泵和激光棒之间的反射器(18),来自激光泵的能量通过该激光棒进入激光棒,输出反射器 28),通过该激光棒发射能量的激光棒和输出反射器之间的开关(20)和控制装置。 控制装置允许在发射周期期间从激光棒发射的初级激光脉冲撞击工件,并阻止在发射主脉冲之后的发射周期期间发生的工件辅助激光发射。 脉冲激光系统在重复频率范围内运行,以便在每个重复频率下在多个发射周期期间产生激光能量。 发射的激光能量的一部分指向目标结构。