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    • 33. 发明申请
    • METHOD AND APPARATUS FOR DETERMINATION OF ADDITIVES IN METAL PLATING BATHS
    • 用于确定金属镀层中添加剂的方法和装置
    • WO01029548A1
    • 2001-04-26
    • PCT/US2000/041202
    • 2000-10-17
    • G01N1/00C25D21/12G01N27/30G01N27/416G01N27/42G01N27/26
    • G01N27/42G01N27/4161
    • An apparatus and method for the indirect determination of concentrations of additives in metal plating electrolyte solutions, particularly organic additives in Cu-metalization baths for semiconductor manufacturing. The apparatus features a reference electrode housed in an electrically isolated chamber (2) and continuously immersed in the base metal plating solution (4) (without the additive to be measured). An additive concentration determination method comprises electroplating a test electrode (1) in a two-phase process in a mixing chamber wherein the base metal plating solution is mixed with small volumes of the sample and various calibration solutions containing the additive to be measured. The first phase of the electroplating process is a nucleation pulse comprising electroplating with a high plating current density for a short duration (milliseconds), the second phase is electroplating at a constant or known current density. Plating potentials between the electrodes are measured and plotted for each of the solution mixtures, and data are extrapolated to determine the concentration of both accelerator and suppressor organic additives in Cu plating solution in a single test suite.
    • 用于间接测定金属电镀溶液中添加剂浓度的装置和方法,特别是用于半导体制造的Cu金属化浴中的有机添加剂。 该装置具有一个参考电极,该参比电极容纳在一个电隔离的腔室(2)中,并连续浸没在贱金属镀液(4)中(不含被测量的添加剂)。 添加剂浓度测定方法包括在混合室中以两相工艺电镀测试电极(1),其中将贱金属镀液与少量样品和包含待测量添加剂的各种校准溶液混合。 电镀工艺的第一阶段是包含具有高电镀电流密度的电镀短时间(毫秒)的成核脉冲,第二相以恒定或已知的电流密度进行电镀。 测量每个溶液混合物之间的电极之间的电位,并对每个溶液混合物进行绘图,外推数据以确定单个测试套件中Cu电镀溶液中促进剂和抑制剂有机添加剂的浓度。
    • 34. 发明申请
    • 電極の水分量測定方法、リチウムイオン二次電池用電極の製造方法、水分量測定装置および水分量測定方法
    • 用于测量电极的水分含量的方法,用于制造用于锂离子二次电池的电极的方法,水分含量测量装置和水分内容测量方法
    • WO2016199631A1
    • 2016-12-15
    • PCT/JP2016/066131
    • 2016-06-01
    • NECエナジーデバイス株式会社
    • 深津 公良林 朋彦
    • G01N25/56G01N1/22G01N25/00G01N27/44G01N31/00H01M4/139
    • G01N31/168G01N1/22G01N25/00G01N25/56G01N27/4161G01N27/44G01N31/00H01M4/139H01M4/1391H01M4/525H01M10/0525
    • 本発明の電極の水分量測定方法は、以下の(A)~(C)の3つの工程を少なくとも含む。 (A)ガス導入管(101)とガス導出管(103)とを備えた容器(105)内に被測定試料である電極(110)を配置する工程 (B)あらかじめ所定の温度に加熱された不活性ガスをガス導入管(101)から容器(105)内に供給することにより電極(110)を加熱し、電極(110)に吸着している水分を気化させる工程 (C)電極(110)から気化した水分を不活性ガスとともにガス導出管(103)から回収し、回収された水分を定量する工程 また、本発明の水分量測定装置(100)は、ガス導入管(101)とガス導出管(103)とを有し、被測定試料(110)を収容する容器(105)と、あらかじめ所定の温度に加熱された不活性ガスをガス導入管(101)から容器(105)内に供給することにより被測定試料(110)を加熱し、被測定試料(110)に吸着している水分を気化させる加熱手段(107)と、被測定試料(110)から気化した上記水分をガス導出管(103)から回収し、回収された上記水分を定量する水分量測定手段(109)と、を備える。
    • 用于测量电极的水分含量的方法至少包括以下三个步骤(A)至(C)。 (A):设置有设置有气体导入管(101)和气体排出管(103)的容器(105)中的作为测定试样的电极(110)的工序。 (B):从气体引入管(101)向容器(105)预先供给预定温度的惰性气体供给步骤,由此加热电极(110)并蒸发吸附在电极(110)上的水分 )。 (C):从气体出口管103回收从电极(110)蒸发的水分与惰性气体一起回收并量化回收水分的步骤。 该含水量测量装置(100)具备容纳测定试样(100)的容器(105),具有气体导入管(101)和气体排出管(103)的容器(105) 用于从气体导入管(101)向容器(105)预先加热到预定温度的惰性气体的加热装置(107),从而加热测量样品(110)并蒸发吸附在测量样品上的水分 110); 以及用于从气体出口管(103)回收从测量样品(110)蒸发的水分并量化回收的水分的含水量测量装置(109)。
    • 38. 发明申请
    • MULTIPLE POTENTIAL BASED CHRONOAMPEROMETRIC FREE CHLORINE SENSORS
    • 多种可能的基于CHRONOAMPEROMETRIC的免费CHLORINE传感器
    • WO2013070853A1
    • 2013-05-16
    • PCT/US2012/064067
    • 2012-11-08
    • NANOSELECT, INC.LI, ChunhongZHANG, Lin
    • LI, ChunhongZHANG, Lin
    • G01N27/49G01N33/18
    • G01N27/308B82Y15/00G01N27/4161G01N27/4168Y10S977/746Y10S977/957
    • A chronoamperometric method and device to determine concentration of an electrochemically active species in a fluid and pH of the fluid. A plurality of sets of calibration relationships may be determined for a sensor in an aqueous solution, the sensor having one or more working electrodes and one or more reference electrodes. A first plurality of potentials may be applied across the working and reference electrodes of the sensor in solution, and a first plurality of currents and current differences obtained as a function of the applied first plurality of potentials. Concentration of an electrochemically active species may then be determined as a function of the obtained first plurality of currents and current differences using the plural sets of calibration relationships, and pH of the solution may be determined as a function of the obtained first plurality of currents and current differences using the plural sets of calibration relationships.
    • 用于确定流体中电化学活性物质的浓度和流体pH的计时电流法和装置。 可以为水溶液中的传感器确定多组校准关系,该传感器具有一个或多个工作电极和一个或多个参考电极。 第一多个电位可以施加在溶液中的传感器的工作参考电极和参考电极之间,并且作为所施加的第一多个电位的函数获得的第一多个电流和电流差。 然后可以使用多组校准关系来确定电化学活性物质的浓度作为获得的第一多个电流和电流差异的函数,并且溶液的pH可以被确定为所获得的第一多个电流的函数,并且 使用多组校准关系的电流差异。
    • 39. 发明申请
    • SMART SENSOR SYSTEM USING AN ELECTROACTIVE POLYMER
    • 使用电动聚合物的SMART传感器系统
    • WO2011082837A1
    • 2011-07-14
    • PCT/EP2010/057753
    • 2010-06-02
    • UNIVERSITE CATHOLIQUE DE LOUVAINYUNUS, SamiBERTRAND, PatrickATTOUT, Anne
    • YUNUS, SamiBERTRAND, PatrickATTOUT, Anne
    • G01N27/333G01N27/416
    • G01N27/4161G01N27/3335G01N27/4167
    • A system for measuring a solution pH comprises: • a potentiostat (1) comprising a working electrode (W) made of an electro-conductive solid polymer transducer, an input (9) to receive the potential to be applied between the working electrode and a reference electrode (R), and an output (17) to transmit a signal representative of the current flowing between a counter electrode (C) and the working electrode, the three electrodes being immerged into the solution; • a digital processor (23) connected to a digital to analog converter (25) for generating the potential to be applied between the working and the reference electrodes; and to an analog to digital converter (27) for receiving a digital value representative of the current. The digital processor is adapted to modify the potential to maintain the current inside a predetermined range such that the potential is representative of the solution pH when the current is inside the predetermined range.
    • 用于测量溶液pH的系统包括:一种恒电位仪(1),包括由导电固体聚合物转换器制成的工作电极(W),输入端(9),用于接收施加于工作电极和 参考电极(R)和输出(17),以传输表示在对电极(C)和工作电极之间流动的电流的信号,三个电极被浸入溶液中; °连接到数模转换器(25)的数字处理器(23),用于产生施加在工作电极和参考电极之间的电位; 以及用于接收代表电流的数字值的模数转换器(27)。 数字处理器适于修改将电流维持在预定范围内的电位,使得当电流在预定范围内时,电位代表溶液pH。
    • 40. 发明申请
    • ANALYZING THE RESPONSE OF AN ELECTROCHEMICAL SYSTEM TO A TIME-VARYING ELECTRICAL STIMULATION
    • 分析电化学系统对时变电刺激的反应
    • WO2007084788A3
    • 2008-06-12
    • PCT/US2007001723
    • 2007-01-23
    • WORLD ENERGY LABS 2 INCMCHARDY JOHNSALLOUX KURTSWANTON PAUL W
    • MCHARDY JOHNSALLOUX KURTSWANTON PAUL W
    • G01D3/00
    • G01N27/4161G01R31/31703G01R31/3651
    • The invention provides a method for capturing and analyzing the total electrical response to a time-varying electrical stimulation of a system or device containing electrochemically active biological or non-biological substances. The response can be either a time-varying voltage (in the case of current-mode stimulation), or a time-varying current (in the case of voltage-mode stimulation). Using synchronous data acquisition technology and advanced data analysis, the method yields not only the idealized 2-parameter information (e.g., phase and amplitude) provided by . conventional methods, but also parameters extracted from non-ideal features of the response waveform that are suppressed by impedance methods. By extracting the full range of response characteristics, the method yields a multi-parameter representation of the system or device under test. The inventive methods may be embodied in an open-loop form, wherein the results of measurements and analysis are reported to the operator, or in a closed-loop form, wherein said results are fed back to modulate the behavior of the system or device.
    • 本发明提供了一种捕获和分析对包含电化学活性生物或非生物物质的系统或装置的时变电刺激的总电响应的方法。 响应可以是时变电压(在电流模式刺激的情况下)或时变电流(在电压模式刺激的情况下)。 使用同步数据采集技术和高级数据分析,该方法不仅产生理想化的2参数信息(例如,相位和幅度)。 常规方法,也是从阻抗方法抑制的响应波形的非理想特征中提取的参数。 通过提取全范围的响应特性,该方法产生被测系统或设备的多参数表示。 本发明的方法可以以开环形式实现,其中测量和分析的结果被报告给操作者或闭环形式,其中所述结果被反馈以调制系统或设备的行为。