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    • 32. 发明申请
    • SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
    • 半导体器件及其制造
    • WO1995004375A1
    • 1995-02-09
    • PCT/JP1994001241
    • 1994-07-28
    • NGK INSULATORS, LTD.TERASAWA, Yoshio
    • NGK INSULATORS, LTD.
    • H01L29/80
    • H01L29/66356H01L29/66363H01L29/66416H01L29/739
    • After selectively forming a P -type gate regions (14) in the upper surface of a first N -type semiconductor substrate (10), gate electrodes are selectively formed on the gate regions (14). A P -type layer (12) is formed in the lower surface of the substrate (10). Recesses (26) which can house the gate electrodes (30) are formed in the lower surfaces of the semiconductor substrate (20) and an N -type layer (22) is formed in the upper surface thereof. After removing impurities from the surfaces of the first and second semiconductor substrates (10 and 20) by RCA cleaning, the surfaces are cleaned with pure water and dried by a centrifugal dryer. Then the substrates (10 and 20) are joined to each other by heating the substrates (10 and 20) at 700-1.100 DEG C in an H2 atmosphere while the upper surface of the substrate (10) is in contact with projections (29) on the lower surface of the substrate (20). Thus a static induction thyrister, static induction transistor, or gate turn-off thyristor in which gate regions and gate electrodes are buried in a semiconductor substrate can be obtained.
    • 在第一N +型半导体衬底(10)的上表面中选择性地形成P ++型栅极区域(14)之后,选择性地在栅极区域(14)上形成栅电极。 在基板(10)的下表面上形成P +型层(12)。 在半导体衬底(20)的下表面形成能够容纳栅电极(30)的凹部(26),在其上表面形成N +型层(22)。 在通过RCA清洁从第一和第二半导体衬底(10和20)的表面除去杂质之后,用纯水清洗表面并通过离心干燥器干燥。 然后,在基板(10)的上表面与突起(29)接触的同时,在H 2气氛中,在700〜1100℃下加热基板(10,20),将基板(10,20) 在基板(20)的下表面上。 因此,可以获得其中栅极区域和栅极电极埋在半导体衬底中的静态感应晶体管,静电感应晶体管或栅极截止晶闸管。
    • 33. 发明申请
    • SHELF PLATE HAVING ANTI-SPALLING, ANTI-CREEP AND OXIDATION RESISTANT PROPERTIES
    • 具有抗起球,抗蠕变和抗氧化性能的鞋面板
    • WO1993025859A1
    • 1993-12-23
    • PCT/JP1993000759
    • 1993-06-07
    • NGK INSULATORS, LTD.HANZAWA, ShigeruKOMIYAMA, Tsuneo
    • NGK INSULATORS, LTD.
    • F27D03/12
    • C04B35/573C04B35/565F27D5/00
    • An anti-spalling shelf plate having fire resistant physical properties for use in a heating furnace, produced by use of a material having a bend strength higher than 1000 kgf/cm at 1000 - 1300 DEG C, and having slits formed therein extending from side portions of the shelf plate toward side portions opposed thereto, each having a length 15 - 35 % of the length of the side. The shelf plate has amounts of impurities and a porosity in a sintered body of Si - SiC controlled to predetermined levels, so that the shelf plate has excellent anti-creep and oxidation resistant properties. An amount of a sintered article which can be mounted can be increased and an efficiency of sintering can be improved, and further, the sintered article can be made high in the anti-spalling, anti-creep and oxidation resistant properties.
    • 一种具有耐火物理特性的抗剥落搁板,其用于加热炉,其使用在1000-1300℃下具有高于1000kgf / cm 2的弯曲强度的材料制成,并且其中形成有狭缝 从搁板的侧面朝向与其相对的侧部,各自具有长度为侧面长度的15-35%。 搁板在Si-SiC烧结体中具有控制到预定水平的杂质和孔隙率,使得搁板具有优异的抗蠕变和抗氧化性能。 可以提高可以安装的烧结制品的量,并且可以提高烧结效率,此外,可以使烧结体的防剥离,抗蠕变和抗氧化性能高。
    • 35. 发明申请
    • CERAMIC CONDENSER AND METHOD OF MANUFACTURING THE SAME
    • 陶瓷冷凝器及其制造方法
    • WO1979000860A1
    • 1979-11-01
    • PCT/JP1979000078
    • 1979-03-29
    • NGK INSULATORS LTDSUZUKI GASAI MMIZUNO F
    • NGK INSULATORS LTD
    • H05K01/16
    • H01G4/08H05K1/0306H05K1/162H05K3/4614H05K3/4629H05K2201/09672
    • A ceramic condenser comprising a ceramic circuit board prepared by the steps of: providing one or more insulating layers on a ceramic green sheet, forming conductive metal layers of a desired pattern such that said conductive metal layers are each arranged between any adjacent two layers of said insulating layers, providing other conductive metal layers arranged so as to run through said insulating layers for connecting together the first mentioned conductive metal layers at their portions which make electrodes of the condenser elements after a subsequent sintering treatment, and sintering said ceramic green sheet in a non-oxidizing atmosphere to thereby obtain the ceramic circuit board in which the conductive circuit of a desired pattern and the condenser elements are formed integrally. An electrode of the ceramic condenser is simultaneously made upon sintering the ceramic substrate in the non-oxidizing atmosphere. However, another electrode of the ceramic condenser may be provided on the top surface of the dielectric layer after sintering treatment. This may be used as a functional block by mounting thereon electronic parts such as semiconductor elements or the like. According to this invention, a part or the whole of the condenser elements is formed together with the conductive connection circuits of the desired pattern, simultaneously with sintering the ceramic substrate in the non-oxidizing atmosphere, so that conductive connection circuit and the condenser elements are printed upon sintering and wiring step after sintering is not necessary.
    • 一种陶瓷电容器,包括通过以下步骤制备的陶瓷电路板:在陶瓷生片上提供一个或多个绝缘层,形成所需图案的导电金属层,使得所述导电金属层各自布置在所述 绝缘层,提供布置成穿过所述绝缘层的其它导电金属层,用于在随后的烧结处理之后在其制造电容器的电极的部分处将第一提到的导电金属层连接在一起,并将所述陶瓷生片烧结在 从而获得其中所需图案的导电电路和电容器元件一体形成的陶瓷电路板。 陶瓷电容器的电极在非氧化性气氛中烧结陶瓷衬底时同时制成。 然而,陶瓷电容器的另一电极可以在烧结处理之后设置在电介质层的顶表面上。 这可以通过在其上安装诸如半导体元件等的电子部件来用作功能块。 根据本发明,与非氧化性气氛中的陶瓷基板烧结同时,与所需图案的导电连接电路一起形成一部分或全部电容器元件,使得导电连接电路和电容器元件 烧结后印刷,烧结后的配线工序不是必需的。