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    • 22. 发明申请
    • AUTOMATED INTERFACE APPARATUS AND METHOD FOR USE IN SEMICONDUCTOR WAFER HANDLING SYSTEMS
    • 自动化接口装置和半导体波形处理系统中使用的方法
    • WO2014070748A1
    • 2014-05-08
    • PCT/US2013/067277
    • 2013-10-29
    • KLA-TENCOR CORPORATION
    • JENSEN, Earl
    • H01L21/677
    • H04L29/08702G05B19/41865G05B2219/45031H04L67/12H04L67/34Y10S901/50
    • Aspects of the present disclosure describe a smart docking station. The smart docking station may contain a data transfer and an electrical connection which allow a sensor wafer to be charged and to upload and download data. The smart docking station may be located at an off-track storage position above a tool. This location enables an automated materials handling system (AMHS) to retrieve the sensor wafer and deliver it to a tool requiring analysis. The sensor wafer may be stored in a smart front opening unified pod (FOUP). It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
    • 本公开的方面描述了智能对接站。 智能对接站可以包含允许传感器晶片被充电并且上传和下载数据的数据传输和电连接。 智能对接站可以位于工具上方的离轨存储位置。 该位置使得自动化材料处理系统(AMHS)能够检索传感器晶片并将其传送到需要分析的工具。 传感器晶片可以存储在智能前开口统一盒(FOUP)中。 要强调的是,该摘要被提供以符合要求抽象的规则,允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是,它不会用于解释或限制权利要求的范围或含义。