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    • 22. 发明申请
    • METHOD FOR FORMING BUMP AND SEMICONDUCTOR DEVICE
    • 形成保护和半导体器件的方法
    • WO1998020541A1
    • 1998-05-14
    • PCT/JP1997003925
    • 1997-10-29
    • NIIGATA SEIMITSU CO., LTD.OKAMOTO, Akira
    • NIIGATA SEIMITSU CO., LTD.
    • H01L21/60
    • H05K3/3468H01L21/4853H01L24/11H05K3/3452H05K3/3484H05K2203/043H05K2203/044H05K2203/0545H05K2203/0746H05K2203/1581H05K2203/159
    • A method by which bumps having desired sizes and shapes can be formed through a simple process. After pads (2) are formed on a printed wiring board (1) at the same interval of pads (6) formed on a semiconductor chip (5), the upper surface of the board (1) is coated with a resist (3) except pad forming areas. Then, the board (1) is inverted so that the surface coated with the resist (3) can come to the downside and molten solder is sprayed upon the surface. The molten solder only adheres to pad forming surfaces of the board (1) and ideal semispheric bumps (4) are formed by the action of the gravity. After the bumps (4) are formed, the board (1) is passed to a high-temperature furnace together with the semiconductor chip (5) while the board (1) is put on the chip (5) in a state where the bumps (4) are aligned with the pads (6) on the chip (5). Consequently, the bumps (4) melt and the chip (5) is joined to the board (1) through the bumps (4).
    • 可以通过简单的工艺形成具有所需尺寸和形状的凸块的方法。 在形成在半导体芯片(5)上的相同间隔的焊盘(6)上的印刷电路板(1)上形成焊盘(2)之后,将电路板(1)的上表面涂覆有抗蚀剂(3) 除了垫形成区域。 然后,将板(1)反转,使得涂覆有抗蚀剂(3)的表面可能到达下侧,并将熔融的焊料喷涂在表​​面上。 熔融焊料仅粘附到板(1)的焊盘形成表面,并且通过重力的作用形成理想的半球体凸块(4)。 在形成凸起(4)之后,将板(1)与半导体芯片(5)一起传递到高温炉,同时将板(1)放置在芯片(5)上,在凸起 (4)与芯片(5)上的焊盘(6)对准。 因此,凸起(4)熔化,并且芯片(5)通过凸块(4)接合到基板(1)。