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21. 发明申请

WO2003019630A2 UNIFIED FRAME FOR SEMICONDUCTOR MATERIAL HANDLING SYSTEM 审中-公开
标题翻译：用于半导体材料处理系统的整体框架
公开(公告)号：WO2003019630A2
公开(公告)日：2003-03-06
申请号：PCT/US2002/030297
申请日：2002-08-30
申请人： ASYST TECHNOLOGIES, INC.
发明人： BONORA, Anthony, C. , GOULD, Richard, H. , HINE, Roger, G. , KROLAK, Michael , SPEASL, Jerry
IPC分类号： H01L21/00
CPC分类号： H01L21/68707 , H01L21/67766 , H01L21/67775 , H01L21/67778 , Y10S414/135
摘要： The present invention is a unified spine structure that EFEM components, such as a wafer handling robot and a SMIF pod advance assembly, may mount to. The frame includes multiple vertical struts that are mounted to an upper support member and a lower support member. Structurally tying the vertical struts to the support members creates a rigid body to support the EFEM components. The vertical struts also provide a common reference that the EFEM components may align with. This eliminates the need for each EFEM component to align with respect to each other. Thus, if one EFEM component is removed it will not affect the alignment and calibration of the remaining secured EFEM components. The unified frame also creates an isolated storage area for the SMIF pod door and the port door within the environment that is isolated from the outside ambient conditions.
摘要翻译：本发明是一种统一的脊柱结构，诸如晶圆处理机器人和SMIF吊舱推进组件的EFEM部件可以安装到其上。框架包括安装到上部支撑构件和下部支撑构件的多个竖直支柱。在结构上将垂直支柱与支撑构件捆绑在一起会形成一个刚体以支撑EFEM部件。垂直支柱还提供了EFEM组件可以对齐的通用参考。这消除了每个EFEM组件相互对齐的需要。因此，如果一个EFEM组件被移除，它不会影响剩余的安全EFEM组件的对齐和校准。统一的框架还为SMIF吊舱门和隔离室外环境条件下的端口门创建了一个隔离存储区。

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