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11. 发明申请

WO2018029151A1 SCANNING PROBE MICROSCOPE AND METHOD FOR EXAMINING A SAMPLE SURFACE 审中-公开
标题翻译：扫描探针显微镜和检测样品表面的方法
公开(公告)号：WO2018029151A1
公开(公告)日：2018-02-15
申请号：PCT/EP2017/069959
申请日：2017-08-07
申请人： CARL ZEISS SMT GMBH
发明人： BAUR, Christof , EDINGER, Klaus , BARALIA, Gabriel
IPC分类号： G01Q70/04
CPC分类号： G01Q70/04 , G01Q10/045 , G01Q40/00 , G01Q70/06
摘要： The present application relates to a scanning probe microscope (1200) for examining a sample surface (150), the scanning probe microscope comprising: (a) at least one first measuring probe (330) having a first securing region (305) and at least one first cantilever (310, 810, 1710, 1910), on which at least one first measuring tip (320) is arranged; (b) wherein the at least one first cantilever (310, 810, 1710, 1910) is configured to adopt an adjustable bending at a free end (350) of the at least one first cantilever (310, 810, 1919) before the beginning of a scanning process, which adjustable bending at least partly compensates for or intensifies a tilting of the first securing region (305) and/or a pre-bending of the at least one first cantilever (310, 810, 1710, 1910); and (c) at least one optical measuring device (1300) configured to determine the adjustable bending.
摘要翻译：本申请涉及用于检查样本表面（150）的扫描探针显微镜（1200），该扫描探针显微镜包括：（a）至少一个第一测量探针（330），其具有第一（305）和至少一个第一悬臂（310,810,1710,1910），在所述第一悬臂（310,810,1710,1910）上设置有至少一个第一测量尖端（320）;其中，（b），其中，所述至少一个第一悬臂（310,810,1710,1910）被构造成在开始之前在所述至少一个第一悬臂（310,810,1919）的自由端（350）处采用可调弯曲其中所述可调弯曲至少部分地补偿或加强所述第一固定区域（305）的倾斜和/或所述至少一个第一悬臂（310,810,1710,1910）的预弯曲; 和（c）至少一个光学测量装置（1300），其被配置为确定可调整的弯曲。

12. 发明申请

WO2015131188A1 METHOD AND APPARATUS TO COMPENSATE FOR DEFLECTION ARTIFACTS IN AN ATOMIC FORCE MICROSCOPE 审中-公开
标题翻译：用于补偿原子力显微镜中偏TION TION TION E E E E E E E E
公开(公告)号：WO2015131188A1
公开(公告)日：2015-09-03
申请号：PCT/US2015/018311
申请日：2015-03-02
申请人： BRUKER NANO, INC.
发明人： SU, Chanmin , HU, Shuiqing
IPC分类号： G01Q70/04 , G01Q30/06
CPC分类号： G01Q40/00 , G01Q30/06 , G01Q60/34 , G01Q60/58
摘要： A method of compensating for an artifact in data collected using a standard atomic force microscope (AFM) operating in an oscillating mode. The artifact is caused by deflection of the probe not related to actual probe- sample interaction and the method includes compensating for thermal induced bending of the probe of the AFM by measuring a DC component of the measured deflection. The DC component of deflection is identified by calibrating the optical deflection detection apparatus and monitoring movement of the mean deflection, thereby allowing the preferred embodiments to minimize the adverse effect due to the artifact. Notably, plotting the DC deflection profile yields a corresponding temperature profile of the sample.
摘要翻译：使用以振荡模式操作的标准原子力显微镜（AFM）收集的数据中补偿伪影的方法。该伪影是由与探头 - 样品相互作用无关的探针偏转引起的，该方法包括通过测量测量的偏转的直流分量来补偿AFM的探针的热诱导弯曲。通过校准光学偏转检测装置和监测平均偏转的运动来识别偏转的直流分量，从而允许优选实施例将由于伪像引起的不利影响降至最低。值得注意的是，绘制直流偏转曲线得到相应的样品温度曲线。

13. 发明申请

WO2007036222A3 METHOD AND DEVICE FOR POSITIONING A MOVABLE PART IN A TEST SYSTEM 审中-公开
标题翻译： METHOD AND APPARATUS FOR在测定系统中定位移动部件
公开(公告)号：WO2007036222A3
公开(公告)日：2007-09-07
申请号：PCT/DE2006001722
申请日：2006-09-29
申请人： JPK INSTRUMENTS AG , KNEBEL DETLEF , JAEHNKE TORSTEN
发明人： KNEBEL DETLEF , JAEHNKE TORSTEN
IPC分类号： G01N1/00 , G01Q10/04 , G01Q70/04 , G12B5/00
CPC分类号： G01Q70/04 , G01N35/04 , G01N2035/0491 , G01Q10/04
摘要： The invention relates to a method and a device for positioning a movable part in a test system, particularly a measuring system or analysis system. According to said method, the movable part is displaced from a starting position into a final position with the aid of an actuating element that is coupled to the movable part by moving the actuating element by means of a driving force, and the movable part is impinged upon by a locking force that locks the movable part in the final position via a locking part connected to the movable part by dipping the locking part at least in part into a supply of a medium and fixing the locking part in the medium by converting the medium from a liquid state into a solid state, the medium being converted from the liquid state into the solid state by impinging the same with a manipulated variable.
摘要翻译：本发明涉及一种用于在检验系统，特别是测量或分析的系统，其特征在于，可移动部件是由一联接到从起始位置可移动部件的致动器元件的装置移动到结束位置的过程中定位可移位的部件的方法和装置由致动器元件通过一个驱动力移动，并且可移动部件被通过一个相关的施加与所述移动部件锁定部件与所述移动部件在端部位置由锁定构件至少部分地浸入在介质中的贮存器和在锁定力宣告由其中所述介质是通过从所述液体状态施加操纵变量到凝固状态的装置传送的介质的变换手段的介质从液体状态固定成凝固状态。

14. 发明申请

WO02057749A1 BALANCED MOMENTUM PROBE HOLDER 审中-公开
标题翻译：平衡动物探针架
公开(公告)号：WO02057749A1
公开(公告)日：2002-07-25
申请号：PCT/US2002/002052
申请日：2002-01-18
IPC分类号： G01B21/00 , G01Q10/00 , G01Q10/04 , G01Q10/06 , G01Q60/24 , G01Q70/00 , G01Q70/02 , G01Q70/04 , G01N13/16
CPC分类号： G01Q70/04 , G01Q10/04 , G01Q10/06 , G01Q70/02
摘要： A balanced momentum probe holder in an apparatus for characterizing a sample surface has first and second members (146, 150) each having extensible and retractable distal ends (148, 152). The distal ends extend or retract substantially simultaneously in response to a signal from a detector (190) thus balancing the momentums of the first and second members and reducing the net momemtum of the probe holder (114B) to essentially zero. Balancing the momentum of the probe holder reduces parasitic oscillations in the apparatus thus enhancing performance.
摘要翻译：用于表征样品表面的装置中的平衡动量探针支架具有每个具有可伸缩的远端（148,152）的第一和第二构件（146,150）。响应于来自检测器（190）的信号，远端基本上同时地延伸或缩回，从而平衡第一和第二构件的动量并将探针保持器（114B）的净母线减小到基本为零。平衡探头架的动量减少了设备中的寄生振荡，从而提高了性能。

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