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    • 12. 发明申请
    • COHERENCE MICROSCOPE
    • 相干显微镜
    • WO2004055570A2
    • 2004-07-01
    • PCT/EP0314323
    • 2003-12-16
    • ZEISS CARLHAUGER CHRISTOPHMIESNER HANS-JOACHIMMONZ LUDWINZEISS STIFTUNG
    • HAUGER CHRISTOPHMIESNER HANS-JOACHIMMONZ LUDWIN
    • G01B9/02G02B21/00
    • G02B21/0004G01B9/02091G01B2290/65
    • The invention relates to a coherence microscope which comprises a light source (1) that emits time-incoherent light. The confocal coherence microscope further comprises a divider (3) for dividing up the light emitted by the light source (1) into a measuring light which is supplied to a sample (13) and is reflected by the same, and into a reference light. A superposition device (25, 31) spatially superimposes the measuring light reflected by the sample (13) with the reference light. A linear array (41) is used to detect the light resulting from said superposition and is adapted to allow for a read-out rate of at least approximately 60 kHz. In order to obtain read-out rates of said order, especially short linear arrays (41) comprising not more than approximately 1000 sensor elements, for example CCD elements, and especially ultra-short linear arrays (41) comprising not more than approximately 500 sensor elements are used. The superposition device is provided with an emission device (25, 31) for emitting the measuring light and the reference light, which is adapted and disposed relative to the sensor array (41) in such a manner that at least a part of the sensor array (41) is irradiated with superimposed light over a prolonged period of time. The ratio of the distances covered by the measuring light and the reference light from the emission device (25, 31) to the respective point of incidence on the sensor array (41)varies in the section of the sensor array (41) that is irradiated with superimposed light.
    • 根据本发明,包括:一个相干显微镜在时间上不连贯的发光光源(1)。 此外,共焦显微镜相干包括分配表(3),用于从(1)测量光的发射光被提供到样品(13)和从其反射的,并且参考光源分割的光。 此外,叠加装置(25,31),用于在空间上从所述样品(13)的反射的测量光与参考光以及传感器行(41)叠加用于检测从光的叠加,其被设计成使得其包括的一个读出速率将所得的至少 60个kHz的许可可用。 。为了实现这样的读出速率,具有至多约1000的传感器元件的传感器(41)的特别短的行,例如CCD-元件(CCD:电荷耦合器件)就可以了,尤其是在非常短的传感器线(41)与至多约500的传感器元件使用。 叠加装置包括一个辐射装置(25,31)用于辐射测量光和参照光,其被设计和布置成以这样的方式与相对于所述传感器组件(41),该延长的辐照至少一个所述传感器装置(41)一部分与叠加光和进行 改变测量光的和的比率的基准光从所述发射装置(25,31)连接到相应Ruftreffpunkt在传感器组件(41)中的照射光行进与传感器组件(41)的重叠部分的距离。