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    • 18. 发明申请
    • SYSTEM TO MONITOR A CONSUMABLE PART AND METHOD TO MONITOR PERFORMANCE LIFE AND PREDICT MAINTENANCE THEREOF
    • 监控消耗性部分的系统和监测性能寿命及其预测维护的方法
    • WO2009117082A1
    • 2009-09-24
    • PCT/US2009/001661
    • 2009-03-17
    • MRL INDUSTRIES, INC.PECK, Kevin, B.LARSSON, Bjorn, W.
    • PECK, Kevin, B.LARSSON, Bjorn, W.
    • G06F11/00
    • G01K3/04
    • A method (20) for determining a maintenance interval for a consumable part and/or for equipment containing a consumable part obtains a plurality of measurements of temperature of the consumable part (22), receives each of the measurements at a totalizing unit (24), correlates each of the measurements to one of a plurality of temperature subranges (26), accumulates for each of the subranges an amount of time the measurements of temperature were correlated to each of the subranges (28), determines a total time by aggregating the accumulated time for each subrange with a weighting function (30), and generates a signal to prompt a maintenance event when the total time equals or passes a runtime setpoint (32). In supplement to or in alternative to the above, the method also correlates a subrange of two sequential measurements (34), indexes a breakpoint register if the correlated subranges are different (36), and generates a signal to prompt a maintenance event when a value of the breakpoint register equals or passes a breakpoint setpoint (32). A system for collecting, storing, and displaying runtime data of a resistive heating element in a semiconductor processing unit is also disclosed.
    • 用于确定消耗部件和/或包含消耗部件的设备的维护间隔的方法(20)获得消耗部件(22)的多个温度测量值,以总计单元(24)接收每个测量值, 将每个测量值与多个温度子范围(26)中的一个相关联,为每个子范围累积温度测量值与每个子范围(28)相关联的时间量,通过聚合 对于具有加权函数(30)的每个子范围的累积时间,并且当总时间等于或通过运行时间设定点(32)时,生成提示维护事件的信号。 在上述的补充或替代方案中,该方法还将两个连续测量(34)的子范围相关联,如果相关子范围不同(36)则对断点寄存器进行索引,并且当值为 的断点寄存器等于或通过断点设定点(32)。 还公开了一种用于在半导体处理单元中收集,存储和显示电阻加热元件的运行时间数据的系统。