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    • 1. 发明申请
    • RETENTION AND INSULATION FEATURES FOR LAMP
    • 灯具的保持和绝缘特征
    • WO2015183381A1
    • 2015-12-03
    • PCT/US2015/021271
    • 2015-03-18
    • APPLIED MATERIALS, INC.
    • IU, DongmingRANISH, Joseph M.SEREBRYANOV, Oleg V.
    • H01L21/324H04L21/02
    • H01L21/67115H01R33/09H05B3/0047H05B3/06
    • Embodiments of the present disclosure generally relate to an improved retention and insulation features for lamps used as a source of heat radiation in a thermal processing chamber. In one embodiment, a process chamber is provided. The process chamber includes a lamp assembly for thermal processing of semiconductor substrates, the lamp assembly has a lamp electrical connector and a first laterally operative element, a lamp assembly housing having a passage for receiving the lamp assembly, a power distribution assembly having a receptacle for receiving the lamp electrical connector and delivering power to the lamp electrical connector, and a spacer plate disposed between the lamp assembly housing and the power distribution assembly, wherein the spacer plate has a passage contoured to allow passage of the lamp electrical connector therethrough, and the spacer plate has a retention feature configured to engage or disengage the first laterally operative element.
    • 本公开的实施例总体上涉及用于在热处理室中作为热辐射源的灯的改进的保持和绝缘特征。 在一个实施例中,提供处理室。 处理室包括用于半导体衬底的热处理的灯组件,灯组件具有灯电连接器和第一横向操作元件,灯组件壳体具有用于接收灯组件的通道,配电组件,具有用于 接收灯电连接器并向灯电连接器供电,以及间隔板,其设置在灯组件壳体和配电组件之间,其中间隔板具有允许灯电连接器通过的通路, 间隔板具有构造成使第一横向操作元件接合或分离的保持特征。