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1. 发明公开

US20230420242A1 Laser-Driven Light Source with Electrodeless Ignition 审中-公开
公开(公告)号：US20230420242A1
公开(公告)日：2023-12-28
申请号：US18465022
申请日：2023-09-11
申请人： Hamamatsu Photonics K.K. , Energetiq Technology, Inc.
发明人： Matthew Partlow , Donald K. Smith , Matthew Besen , Akinori Asai
IPC分类号： H01J61/54 , H01S3/1115 , H01S3/094 , H01J65/00 , H01S3/091 , H01S3/16 , H01S3/06 , H01J61/16 , H01J65/04
CPC分类号： H01J61/54 , H01S3/1115 , H01S3/094038 , H01J65/00 , H01S3/0912 , H01S3/1623 , H01S3/1643 , H01S3/0602 , H01S3/0621 , H01J61/16 , H01J65/04 , H01S3/1305
摘要： An electrodeless laser-driven light source includes a laser that generates a CW sustaining light. A pump laser generates pump light. A Q-switched laser crystal receives the pump light generated by the pump laser and generates pulsed laser light at an output in response to the generated pump light. A first optical element projects the pulsed laser light along a first axis to a breakdown region in a gas-filled bulb comprising an ionizing gas. A second optical element projects the CW sustaining light along a second axis to a CW plasma region in the gas-filled bulb comprising the ionizing gas. A detector detects plasma light generated by a CW plasma and generates a detection signal at an output. A controller generates control signals that control the pump light to the Q-switched laser crystal so as to extinguish the pulsed laser light within a time delay after the detection signal exceeds a threshold level.

2. 发明授权

US11587781B2 Laser-driven light source with electrodeless ignition 有权
公开(公告)号：US11587781B2
公开(公告)日：2023-02-21
申请号：US17328433
申请日：2021-05-24
申请人： Hamamatsu Photonics K.K. , Energetiq Technology, Inc.
发明人： Matthew Partlow , Donald Smith , Matthew Besen , Akinori Asai
IPC分类号： H01J65/00 , H01J61/54 , H01S3/1115 , H01S3/094 , H01S3/091 , H01S3/16 , H01S3/06 , H01J61/16 , H01J65/04 , H01S3/13
摘要： An electrodeless laser-driven light source includes a laser that generates a CW sustaining light. A pump laser generates pump light. A Q-switched laser crystal receives the pump light generated by the pump laser and generates pulsed laser light at an output in response to the generated pump light. A first optical element projects the pulsed laser light along a first axis to a breakdown region in a gas-filled bulb comprising an ionizing gas. A second optical element projects the CW sustaining light along a second axis to a CW plasma region in the gas-filled bulb comprising the ionizing gas. A detector detects plasma light generated by a CW plasma and generates a detection signal at an output. A controller generates control signals that control the pump light to the Q-switched laser crystal so as to extinguish the pulsed laser light within a time delay after the detection signal exceeds a threshold level.

3. 发明授权

US11569083B2 Excimer lamp 有权
公开(公告)号：US11569083B2
公开(公告)日：2023-01-31
申请号：US17736279
申请日：2022-05-04
申请人： Ushio Denki Kabushiki Kaisha
发明人： Shigeki Fujisawa , Kazuyuki Mori
IPC分类号： H01J65/00 , H01J61/12 , H01J61/30 , H01J61/33 , H01J61/36
摘要： In the excimer lamp according to the present invention, a flat discharge vessel having a substantially rectangular cross-sectional shape and comprising a pair of planar parts and a pair of side-surface parts has a pair of external electrodes disposed on the respective outer surfaces of the planar parts. The end parts of the external electrodes are provided with an auxiliary electrode extending to a region that is made smaller than the distance between the planar parts. A lead that supplies electricity to the external electrode is connected to the auxiliary electrode in the region that is made smaller than the distance between the planar parts.

4. 发明申请

US20220262617A1 EXCIMER LAMP 有权
公开(公告)号：US20220262617A1
公开(公告)日：2022-08-18
申请号：US17736279
申请日：2022-05-04
申请人： Ushio Denki Kabushiki Kaisha
发明人： Shigeki FUJISAWA , Kazuyuki MORI
IPC分类号： H01J65/00 , H01J61/12 , H01J61/36 , H01J61/30 , H01J61/33
摘要： In the excimer lamp according to the present invention, a flat discharge vessel having a substantially rectangular cross-sectional shape and comprising a pair of planar parts and a pair of side-surface parts has a pair of external electrodes disposed on the respective outer surfaces of the planar parts. The end parts of the external electrodes are provided with an auxiliary electrode extending to a region that is made smaller than the distance between the planar parts. A lead that supplies electricity to the external electrode is connected to the auxiliary electrode in the region that is made smaller than the distance between the planar parts.

5. 发明授权

US11328923B2 Excimer lamp 有权
公开(公告)号：US11328923B2
公开(公告)日：2022-05-10
申请号：US17257268
申请日：2019-06-26
申请人： Ushio Denki Kabushiki Kaisha
发明人： Shigeki Fujisawa , Kazuyuki Mori
IPC分类号： H01J61/067 , H01J65/00 , H01J61/12 , H01J61/30 , H01J61/33 , H01J61/36
摘要： In the excimer lamp according to the present invention, a flat discharge vessel having a substantially rectangular cross-sectional shape and comprising a pair of planar parts and a pair of side-surface parts has a pair of external electrodes disposed on the respective outer surfaces of the planar parts. The end parts of the external electrodes are provided with an auxiliary electrode extending to a region that is made smaller than the distance between the planar parts. A lead that supplies electricity to the external electrode is connected to the auxiliary electrode in the region that is made smaller than the distance between the planar parts.

6. 发明授权

US11270879B2 Excimer lamp light source device 有权
公开(公告)号：US11270879B2
公开(公告)日：2022-03-08
申请号：US17290875
申请日：2019-11-08
申请人： Ushio Denki Kabushiki Kaisha
发明人： Koji Oda , Junya Asayama , Masashi Okamoto
IPC分类号： H01J65/00 , H05B41/24
摘要： Provided is an excimer lamp light source device that achieves low cost and avoids the occurrence of narrowly-defined contracted discharge by adopting a lamp bulb having a simple structure and of the type in which a discharge current is passed in a tube axis direction.
The excimer lamp light source device includes: an excimer lamp that has a pair of external electrodes configured to induce an electric discharge in a discharge space of a lamp bulb and to cause a discharge current to flow in a tube axis direction of the lamp bulb, and that generates UV light in the discharge space by the discharge; and an inverter having a transformer equipped with a secondary winding to which the external electrodes are connected in order to apply a high-voltage alternating current to the excimer lamp, the inverter supplying power lower than power that causes a linear discharge.

7. 发明申请

US20220068627A1 DEVICE FOR EMITTING ULTRAVIOLET LIGHT 有权
公开(公告)号：US20220068627A1
公开(公告)日：2022-03-03
申请号：US17396944
申请日：2021-08-09
申请人： Ushio Denki Kabushiki Kaisha
发明人： Hideaki YAGYU , Atsushi IMAMURA , Manabu MORI
IPC分类号： H01J61/54 , H01J65/00 , H01J61/52 , H01J61/40 , A61L2/10
摘要： A device for emitting ultraviolet light includes at least one excimer lamp and a housing for the excimer lamp(s). Each excimer lamp has a discharge vessel filled with light-emitting gases, and a pair of first and second electrodes that are placed in contact with the discharge vessel and produce a dielectric barrier discharge inside the discharge vessel. The housing is made of an insulating and heat-resistant resin material. The housing is configured to house the excimer lamp(s), and has a light-emitting window that allows light with a center wavelength in a range from 200 nm to 230 nm emitted from the excimer lamp(s) to exit from the housing.

8. 发明授权

US10420197B2 Radiation source, metrology apparatus, lithographic system and device manufacturing method 有权
公开(公告)号：US10420197B2
公开(公告)日：2019-09-17
申请号：US15888362
申请日：2018-02-05
申请人： ASML Netherlands B.V.
发明人： Martijn Petrus Christianus Van Heumen
IPC分类号： G03F7/20 , H05G2/00 , H01J65/04 , G01N21/95 , H01J61/54 , H01J65/00 , G01N21/956 , H01J61/35
摘要： A radiation source apparatus comprising: a container for being pressurized with a gaseous medium in which plasma which emits plasma emitted radiation is generated following excitation of the gaseous medium by a driving radiation, wherein said container is operable substantially to remove radiation with a wavelength of 10-400 nm from said plasma emitted radiation before said plasma emitted radiation exits said container as output radiation. In an embodiment the container comprises: an inlet radiation transmitting element operable to transmit said driving radiation from outside said container to inside said container, and an outlet radiation transmitting element operable to transmit at least some of said plasma emitted radiation from inside said container to outside said container as output radiation; wherein at least one of said inlet and outlet radiation transmitting elements comprises a plane parallel plate.

9. 发明授权

US09615439B2 System and method for inhibiting radiative emission of a laser-sustained plasma source 有权
公开(公告)号：US09615439B2
公开(公告)日：2017-04-04
申请号：US14989348
申请日：2016-01-06
申请人： KLA-Tencor Corporation
发明人： Ilya Bezel , Anatoly Shchemelinin , Kenneth P. Gross , Richard Solarz , Lauren Wilson , Rahul Yadav , Joshua Wittenberg , Anant Chimmalgi , Xiumei Liu , Brooke Bruguier
IPC分类号： H05G2/00 , H01J65/00
CPC分类号： H05G2/008 , H01J61/16 , H01J65/00 , H01J65/04 , H05G2/003
摘要： A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element. The gas containment element is configured to contain a volume of a gas mixture. The collector element is configured to focus the pump illumination from the pumping source into the volume of the gas mixture contained within the gas containment element in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas mixture filters one or more selected wavelengths of radiation emitted by the plasma.

10. 发明授权

US09355833B2 Excimer lamp 有权
标题翻译：准分子灯
公开(公告)号：US09355833B2
公开(公告)日：2016-05-31
申请号：US14763278
申请日：2013-11-25
申请人： USHIO DENKI KABUSHIKI KAISHA
发明人： Kenji Tanino , Junya Asayama , Yukiharu Tagawa
IPC分类号： H01J61/26 , H01J65/00 , H01J61/36 , H01J61/44 , H01J61/54 , H01J7/18
CPC分类号： H01J61/26 , H01J7/186 , H01J61/36 , H01J61/44 , H01J61/547 , H01J65/00 , H01J65/046
摘要： Provided is an excimer lamp having a simple and small structure, which can be used in, for example, a refrigerator, and can emit ultraviolet light at a wavelength effective in disinfection processing without generating ozone in a surrounding atmosphere, without leaving gas impurities and moisture in an electrical discharge vessel, and without causing a steep illuminance decrease. A fluorescent substance is disposed on an inner face of the electrical discharge vessel for converting ultraviolet light emitted upon excimer electrical discharge of a light emitting gas to ultraviolet light having a longer wavelength. An inner electrode has a coil shape. A tight winding portion is formed at a certain area of the interior electrode which extends in the center axial direction of the interior electrode such that the coil is tightly wound in the tight winding portion. A getter is attached to the tight winding portion.
摘要翻译：本发明提供一种具有简单且小型结构的准分子灯，其可用于例如冰箱，并且能够以有效消毒处理的波长发射紫外线，而不会在周围环境中产生臭氧，而不会留下气体杂质和水分在放电容器中，并且不会导致急剧的照度降低。荧光物质设置在放电容器的内表面上，用于将发光气体的准分子放电时发射的紫外光转换成具有较长波长的紫外光。内部电极具有线圈形状。在内部电极的沿着内部电极的中心轴向延伸的一定区域处形成紧密缠绕部分，使得线圈紧紧地缠绕在紧密缠绕部分中。吸气剂连接到紧密卷绕部分。

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