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1. 发明授权

US10107626B2 Method for acquiring angular velocity of gyro sensor and device for doing the same 有权
公开(公告)号：US10107626B2
公开(公告)日：2018-10-23
申请号：US14848344
申请日：2015-09-09
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Tamio Ikehashi
IPC分类号： G01C19/56 , G01P9/04 , G01C19/5726 , G01C19/5762 , G01C19/5719
摘要： According to one embodiment, a method of acquiring rotational information of a gyro sensor includes sensing a predetermined physical quantity which depends upon an amplitude of a vibration in a second direction, the vibration in the second direction being based on Coriolis force that is applied to a movable body which is vibrating in a first direction, calculating rotational information of the movable body based on the sensed predetermined physical quantity, and stopping a vibration in the first direction of the movable body after the predetermined physical quantity is sensed.

2. 发明授权

US09207081B2 Electrode arrangements for quadrature suppression in inertial sensors 有权
标题翻译：惯性传感器正交抑制电极装置
公开(公告)号：US09207081B2
公开(公告)日：2015-12-08
申请号：US14098781
申请日：2013-12-06
申请人： Analog Devices, Inc.
发明人： John A. Geen
IPC分类号： G01P9/04 , G01C19/5719 , G01C19/5776 , G01C19/56
CPC分类号： G01C19/5719 , G01C19/56 , G01C19/5776
摘要： A substrate for an inertial sensor system includes a plurality of electrode arrangements, each electrode arrangement including an acceleration sensor electrode and a pair of quadrature adjusting electrodes on opposite sides of the acceleration sensor electrode, where each electrode arrangement is capable of being overlaid by a corresponding plate of a shuttle such that the plate completely overlays the acceleration sensor electrode and partially overlays the pair of quadrature adjusting electrodes on opposite sides of the acceleration sensor electrode such that capacitive coupling between the plate and each of the quadrature adjusting electrodes is dependent upon the rotational position of the at least one shuttle while capacitive coupling between the plate and the acceleration sensor electrodes is substantially independent of the rotational position of the at least one shuttle.
摘要翻译：用于惯性传感器系统的基板包括多个电极装置，每个电极装置包括加速度传感器电极和在加速度传感器电极的相对侧上的一对正交调节电极，其中每个电极装置能够被相应的穿梭板的板，使得板完全覆盖加速度传感器电极并且部分地覆盖加速度传感器电极的相对侧上的该对正交调节电极，使得板和每个正交调节电极之间的电容耦合取决于旋转所述至少一个梭子的位置在所述板和所述加速度传感器电极之间的电容耦合基本上独立于所述至少一个梭子的旋转位置。

3. 发明授权

US08616055B2 Mode-matching apparatus and method for micromachined inertial sensors 有权
标题翻译：微机械惯性传感器的模拟匹配装置和方法
公开(公告)号：US08616055B2
公开(公告)日：2013-12-31
申请号：US13442010
申请日：2012-04-09
申请人： John A. Geen
发明人： John A. Geen
IPC分类号： G01P9/04
CPC分类号： G01C19/5719 , G01C19/56 , G01C19/5776
摘要： In an inertial sensor having a resonator and an accelerometer, acceleration signals are induced by resonating at least one shuttle of the resonator in a device plane at a shuttle resonance mode frequency and modulating the motion of the at least one resonator shuttle to induce accelerometer signals from the accelerometer. The motion may be modulated in the device plane or out of the device plane. A shuttle resonance mode and an accelerometer resonance mode may me matched based on the induced accelerometer signals, for example, by providing a feedback signal to the inertial sensor in response to such induced accelerometer signals to substantially nullify the induced accelerometer signals.
摘要翻译：在具有谐振器和加速度计的惯性传感器中，通过在穿梭谐振模式频率下在器件平面中谐振至少一个谐振器的梭子而引起加速度信号，并且调制至少一个谐振器穿梭件的运动以从加速度计。该运动可以在设备平面中或在设备平面之外调制。可以例如通过响应于这种感应加速度计信号向惯性传感器提供反馈信号来基本上使感应的加速度计信号无效，可以基于感应的加速度计信号来匹配梭式共振模式和加速度计共振模式。

4. 发明授权

US08333112B2 Frequency tuning of disc resonator gyroscopes via resonator mass perturbation based on an identified model 有权
标题翻译：基于识别的模型，通过谐振器质量扰动对光盘谐振器陀螺仪进行频率调谐
公开(公告)号：US08333112B2
公开(公告)日：2012-12-18
申请号：US12481247
申请日：2009-06-09
申请人： David M. Schwartz , Dong-Joon Kim , Robert T. M'Closkey , A. Dorian Challoner
发明人： David M. Schwartz , Dong-Joon Kim , Robert T. M'Closkey , A. Dorian Challoner
IPC分类号： G01P9/04
CPC分类号： G01C19/5684
摘要： Techniques for reducing the frequency split between the Coriolis-coupled modes in disc resonator gyroscopes (DRGs) by perturbing the mass distribution on the disc resonator based on an identified model are disclosed. A model-identification method of tuning a resonator comprises perturbing the mass and measuring a frequency response matrix of the resonator. The frequency response matrix includes a plurality of inputs and a plurality of outputs and the resonator has a plurality of coupled resonance modes. A reduced structural mechanics matrix model of the resonator in sensor and actuator coordinates is identified from the measured frequency response matrix and analyzed to determine generalized eigenvectors of the structural mechanics model and their variations due to selected mass perturbations which is then estimated to improve degeneracy of the plurality of coupled resonance modes based on the generalized eigenvectors of the mass and the stiffness.
摘要翻译：公开了通过基于识别的模型扰动盘式共振器上的质量分布来减小盘式谐振器陀螺仪（DRG）中的科里奥利耦合模式之间的频率分裂的技术。调谐谐振器的模型识别方法包括扰动质量并测量谐振器的频率响应矩阵。频率响应矩阵包括多个输入和多个输出，并且谐振器具有多个耦合谐振模式。从测量的频率响应矩阵中确定传感器和执行器坐标中谐振器的结构力学矩阵模型，并进行分析，以确定结构力学模型的广义特征向量及其由于选定的质量扰动引起的变化，基于质量和刚度的广义特征向量的多个耦合谐振模式。

5. 发明授权

US08225659B2 Vibrating gyro 有权
标题翻译：振动陀螺仪
公开(公告)号：US08225659B2
公开(公告)日：2012-07-24
申请号：US12540387
申请日：2009-08-13
申请人： Hideaki Sugibayashi , Keiichi Okano
发明人： Hideaki Sugibayashi , Keiichi Okano
IPC分类号： G01P9/04
CPC分类号： H01L41/107 , G01C19/5607
摘要： A piezoelectric vibrator of a vibration gyro vibrates in response to a drive voltage Vdrv input into a drive electrode, and when deformed by a Coriolis force, generates detection voltages Vagc, between which a potential difference corresponds to the deformation, at detection electrodes. An AGC circuit outputs a drive voltage Vdrv while performing automatic gain control so that the detection voltages Vagc have a given amplitude. A phase inversion circuit and a BTL amplifier circuit output a BTL voltage Vbtl, whose phase is opposite to the detection voltage Vagc and whose amplitude has been increased, to the detection electrodes via detection resistances. The AGC circuit reduces the detection voltages Vagc in order to prevent the drive voltage Vdrv from exceeding a design upper limit value V′drv.
摘要翻译：振动陀螺仪的压电振动器响应于输入到驱动电极的驱动电压Vdrv振动，并且当由科里奥利力变形时，在检测电极处产生检测电压Vagc，其间的电位差对应于变形。 AGC电路在执行自动增益控制时输出驱动电压Vdrv，使得检测电压Vagc具有给定的幅度。相位反转电路和BTL放大电路通过检测电阻向检测电极输出与检测电压Vagc相反且振幅增大的BTL电压Vbt1。 AGC电路减小检测电压Vagc，以防止驱动电压Vdrv超过设计上限值V'drv。

6. 发明授权

US08205495B2 Systematic disc resonator gyroscope tuning 有权
标题翻译：系统盘式谐振器陀螺仪调谐
公开(公告)号：US08205495B2
公开(公告)日：2012-06-26
申请号：US12481488
申请日：2009-06-09
申请人： A. Dorian Challoner
发明人： A. Dorian Challoner
IPC分类号： G01P9/04 , G01C19/00
CPC分类号： G01C19/5684
摘要： Tuning an axisymmetric resonator such as in a disc resonator gyroscope (DRG) is disclosed. Frequency tuning a DRG in a single step informed by a systematic physical model of the resonator structure, sensing and actuation elements, such as a finite element model, is provided. The sensitivity of selected trimming positions on the resonator to reducing asymmetry terms is determined via perturbations of the systematic model. As well, the dependence of the parameters of model transfer functions between actuation and sensing elements on resonator asymmetry are systematically determined. One or two measured transfer functions may then be analyzed according to the systematic model to fully determine the needed asymmetry correction components of the DRG. One or two of four groups of four electrostatic bias electrodes or four groups of four laser trimming locations for the DRG are utilized to correct the asymmetry components which can give rise to mistuning.
摘要翻译：公开了一种诸如在盘式谐振器陀螺仪（DRG）中的轴对称谐振器的调谐。提供了通过谐振器结构的系统物理模型，感测和致动元件（例如有限元模型）通知的单个步骤中的DRG调谐。通过系统模型的扰动来确定谐振器上选定的修整位置对减小不对称项的灵敏度。同样，系统地确定了致动和感测元件之间的模型传递函数的参数对谐振器不对称性的依赖性。然后可以根据系统模型分析一个或两个测量的传递函数，以完全确定DRG的所需不对称校正分量。用四个静电偏置电极的四组中的一组或四组用于DRG的四组激光修整位置被用于校正可能引起失谐的不对称分量。

7. 发明授权

US08113050B2 Robust six degree-of-freedom micromachined gyroscope with anti-phase drive scheme and method of operation of the same 有权
标题翻译：强大的六自由度微机械陀螺仪具有反相驱动方案及其操作方法
公开(公告)号：US08113050B2
公开(公告)日：2012-02-14
申请号：US12279174
申请日：2006-01-25
申请人： Cenk Acar , Andrei Shkel , Adam R. Schofield , Lynn E. Costlow , Asad M. Madni
发明人： Cenk Acar , Andrei Shkel , Adam R. Schofield , Lynn E. Costlow , Asad M. Madni
IPC分类号： G01P9/04 , G01C19/00
CPC分类号： G01P15/14 , G01C19/574 , G01P15/18 , Y10T74/1225
摘要： A method of operating an anti-phase six degree-of-freedom tuning fork gyroscope system comprises the steps of driving a first three degree-of-freedom gyroscope subsystem, and driving a second three degree-of freedom gyroscope subsystem in an anti-phase mode with the first gyroscope subsystem at an anti-phase resonant frequency. Acceleration or an angular rate of motion is sensed by the first and second three degree-of-freedom gyroscope subsystems operating in a flat frequency response range where the anti-phase resonant frequency is designed. Response gain and phase are stable and environmental and fabrication perturbations are avoided by such operation. A anti-phase six degree-of-freedom tuning fork gyroscope system which operates as described is also characterized.
摘要翻译：一种操作反相六自由度音叉陀螺仪系统的方法包括以下步骤：驱动第一三自由度陀螺仪子系统，以及驱动第二三自由度陀螺仪子系统的反相模式，第一个陀螺仪子系统处于反相谐振频率。通过设计反相谐振频率的平坦频率响应范围内工作的第一和第三三自由度陀螺仪子系统感测加速度或角速度。响应增益和相位是稳定的，通过这种操作可以避免环境和制造扰动。还描述了如上所述操作的反相六自由度音叉陀螺仪系统。

8. 发明授权

US08056413B2 Sensor and sensing method utilizing symmetrical differential readout 有权
标题翻译：传感器和传感方法利用对称差分读出
公开(公告)号：US08056413B2
公开(公告)日：2011-11-15
申请号：US12208402
申请日：2008-09-11
申请人： Navid Yazdi
发明人： Navid Yazdi
IPC分类号： G01P9/04
CPC分类号： G01C19/5677 , G01C19/5684
摘要： A sensor and sensing method capable of full-differential symmetry to minimize bias drift and improve stability of the sensor output. The sensor includes a sensing element, sense electrodes capacitively coupled to the sensing element to generate capacitive outputs that vary in response to the motion of the sensing element, and a differential readout device. The sense electrodes are electrically separable into at least two pairs of differential sense electrodes. The readout device performs a sampling sequence of at least two sampling cycles during which the readout device samples the capacitive outputs of the sense electrodes and produces at least two differential outputs based on the difference between the capacitive outputs within each pair of differential sense electrodes. The readout device then calculates an average of the differential outputs of the sampling sequence to produce an output of the differential readout device, and thereafter repeats the sampling sequence and calculation.
摘要翻译：一种传感器和感测方法，能够实现全差分对称，以最小化偏移漂移并提高传感器输出的稳定性。传感器包括感测元件，感测电极电容耦合到感测元件以产生响应于感测元件的运动而变化的电容性输出以及差分读出装置。感测电极可电分离成至少两对差动感测电极。读出装置执行至少两个采样周期的采样序列，在此期间，读出装置对感测电极的电容输出进行采样，并且基于每对差分感测电极之间的电容输出之间的差产生至少两个差分输出。读出装置然后计算采样序列的差分输出的平均值以产生差分读出装置的输出，然后重复采样序列和计算。

9. 发明授权

US08042396B2 Microelectromechanical sensor with improved mechanical decoupling of sensing and driving modes 有权
标题翻译：微机电传感器具有改进的感测和驱动模式的机械去耦
公开(公告)号：US08042396B2
公开(公告)日：2011-10-25
申请号：US12208980
申请日：2008-09-11
申请人： Luca Coronato , Alessandro Balzelli Ludovico , Sarah Zerbini
发明人： Luca Coronato , Alessandro Balzelli Ludovico , Sarah Zerbini
IPC分类号： G01P9/04 , G01C19/00
CPC分类号： G01C19/5712 , G01P15/125 , G01P15/14 , G01P15/18 , G01P2015/0828
摘要： A driving mass of an integrated microelectromechanical structure is moved with a rotary motion about an axis of rotation, and a sensing mass is connected to the driving mass via elastic supporting elements so as to perform a detection movement in the presence of an external stress. The driving mass is anchored to a first anchorage arranged along the axis of rotation by first elastic anchorage elements. The driving mass is also coupled to a pair of further anchorages positioned externally thereof and coupled to opposite sides with respect to the first anchorage by further elastic anchorage elements; the elastic supporting elements and the first and further elastic anchorage elements render the driving mass fixed to the first sensing mass in the rotary motion, and substantially decoupled from the sensing mass in the detection movement, the detection movement being a rotation about an axis lying in a plane.
摘要翻译：集成微电子机械结构的驱动质量以围绕旋转轴线的旋转运动移动，并且感测质量块经由弹性支撑元件连接到驱动质量块，以便在存在外部应力的情况下执行检测运动。驱动质量块被锚固到通过第一弹性锚固元件沿着旋转轴线布置的第一锚固件。驱动质量体还连接到位于其外部的一对另外的锚固件，并且通过另外的弹性锚定元件相对于第一锚固件相对于相对侧联接; 弹性支撑元件和第一和另外的弹性锚固元件使得驱动质量在旋转运动中固定到第一感测块，并且在检测运动中基本上与感测质量分离，检测运动是围绕位于一架飞机。

10. 发明授权

US08001840B2 Oscillation type gyro sensor, control circuit, electronic apparatus, and method of manufacturing an oscillation type gyro sensor 有权
标题翻译：振荡式陀螺仪传感器，控制电路，电子设备以及制造振荡式陀螺传感器的方法
公开(公告)号：US08001840B2
公开(公告)日：2011-08-23
申请号：US12046635
申请日：2008-03-12
申请人： Kazuo Kurihara
发明人： Kazuo Kurihara
IPC分类号： G01P9/04 , G01C19/56
CPC分类号： G01H5/00
摘要： There is provided an oscillation type gyro sensor including an oscillation gyro device, an oscillation circuit, a controller, and an impedance conversion circuit. The oscillation gyro device includes a piezoelectric device including a drive electrode and a detection electrode, oscillates according to a drive signal input to the drive electrode, and is capable of generating an output signal including a detection signal corresponding to a Coriolis force from the detection electrode. The oscillation circuit outputs, based on the output signal, a signal for oscillating the oscillation gyro device to the drive electrode as the drive signal. The controller controls the oscillation circuit such that the oscillation circuit outputs a drive signal that makes the output signal constant. To the impedance conversion circuit, the drive signal output from the oscillation circuit is input.
摘要翻译：提供了包括振荡陀螺仪，振荡电路，控制器和阻抗转换电路的振荡型陀螺传感器。振荡陀螺装置包括：包括驱动电极和检测电极的压电装置，根据输入到驱动电极的驱动信号而振荡，并且能够产生输出信号，该输出信号包括对应于来自检测电极的科里奥利力的检测信号。振荡电路基于输出信号，将振荡陀螺仪装置的振荡信号作为驱动信号输出到驱动电极。控制器控制振荡电路，使得振荡电路输出使输出信号恒定的驱动信号。向阻抗转换电路输入从振荡电路输出的驱动信号。

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