会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 7. 发明授权
    • Extreme ultraviolet light generation apparatus
    • 极紫外光发生装置
    • US08710474B2
    • 2014-04-29
    • US13532365
    • 2012-06-25
    • Takeshi KodamaOsamu Wakabayashi
    • Takeshi KodamaOsamu Wakabayashi
    • G21K5/00G01K5/00B41C3/02
    • H05G2/008H05G2/006
    • An apparatus used with an external laser apparatus for generating extreme ultraviolet light includes a target storage unit for storing a target material, a nozzle unit having a through-hole in communication with the interior of the storage unit through which the target material is outputted, an electrode having a through-hole facing the nozzle unit, and a target detector for detecting a target formed of the target material and outputting a detection signal. A direct current voltage adjuster applies and adjusts a direct current between the target material and the electrode, a pressure adjuster applies and adjusts a pressure to the target material through gas, and a controller controls at least one of the direct current voltage adjuster and the pressure adjuster based on the detection signal from the target detector.
    • 与用于产生极紫外光的外部激光装置一起使用的装置包括用于存储目标材料的目标存储单元,具有与被输送目标材料的存储单元的内部连通的通孔的喷嘴单元, 电极,其具有面向喷嘴单元的通孔,以及目标检测器,用于检测由目标材料形成的目标并输出检测信号。 直流电压调节器施加并调节目标材料和电极之间的直流电流,压力调节器通过气体施加和调节对目标材料的压力,并且控制器控制至少一个直流电压调节器和压力 基于来自目标检测器的检测信号的调节器。
    • 9. 发明授权
    • Temperature sensor
    • 温度感应器
    • US08632245B2
    • 2014-01-21
    • US13243197
    • 2011-09-23
    • Seizo Fujimoto
    • Seizo Fujimoto
    • G01K7/00G01K5/00G01K9/00H01C3/04H01C7/02
    • G01K1/08G01K1/16
    • A temperature sensor is provided that can easily make possible stuffing with the filler or burying of the temperature detector element so that faster temperature response can be achieved. A temperature sensor has a closed-bottom tubular shaped case, a temperature detector element inserted and accommodated in the case, and a filler filled in the case and sealing the temperature detector element. The temperature sensor is provided with a filler flowing portion formed in a relative gap between the case and the temperature detector element along an insertion direction of the temperature detector element and having a gap relative to the temperature detector element larger than that relative to the remainder portion of the gap.
    • 提供了一种温度传感器,其可以容易地用填料填充或温度检测器元件的掩埋,从而可以实现更快的温度响应。 温度传感器具有封闭的底部管状壳体,插入并容纳在壳体中的温度检测器元件和填充在壳体中的填充物并密封温度检测器元件。 温度传感器设置有沿着温度检测器元件的插入方向形成在壳体和温度检测器元件之间的相对间隙中并且相对于温度检测器元件具有大于相对于其余部分的温度检测器元件的间隙的填充物流动部分 的差距。