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    • 4. 发明申请
    • X-ray detecting device and fabricating method thereof
    • X射线检测装置及其制造方法
    • US20010011705A1
    • 2001-08-09
    • US09749671
    • 2000-12-28
    • Myung Ho YouByoung Ho Lim
    • G01T001/24H01L027/146
    • H01L27/14658
    • An X-ray detecting device and a fabricating method thereof capable of preventing a short between a lower electrode of a capacitor and a data line are presented. In the device, a data line insulating layer is formed to cover the data line and a gate line. The gate line is exposed through a contact hole defined in the data line insulating. Then a lower electrode is formed on the data line insulating layer and is electrically connected to the gate line via the contact hole. Subsequently, an upper electrode is formed to complete the device. The data line insulating layer prevents a short between the data line and the lower electrode when residual conductive materials are formed when the lower electrode is formed.
    • 提出了能够防止电容器的下部电极与数据线之间短路的X射线检测装置及其制造方法。 在该器件中,形成数据线绝缘层以覆盖数据线和栅极线。 栅极线通过数据线绝缘中限定的接触孔露出。 然后在数据线绝缘层上形成下电极,并通过接触孔与栅极线电连接。 随后,形成上电极以完成该装置。 当形成下电极时,当残留的导电材料形成时,数据线绝缘层防止数据线和下电极之间的短路。