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    • 3. 发明授权
    • Multi-phase polishing pad
    • 多相抛光垫
    • US08133096B2
    • 2012-03-13
    • US11063653
    • 2005-02-22
    • Ramin EmamiRobert LumSourabh Mishra
    • Ramin EmamiRobert LumSourabh Mishra
    • B24B1/00B25B5/00B25B29/00B24D11/00B23H5/00
    • B24B37/24B24D7/14
    • An article of manufacture, a method, and an apparatus for use in a chemical mechanical polishing system is provided. In one aspect, an article of manufacture is provided for polishing a substrate including a polishing article having a polishing surface, the polishing surface including a first polishing portion having a first polishing material of a first hardness for polishing a first portion of the substrate, and a second polishing portion having a second polishing material of a second hardness for polishing a second portion of the substrate. The article of manufacturer may be disposed on a rotatable, stationary, or linear platen for processing a substrate. In another aspect, a method is provided for processing a substrate, including providing a platen containing the polishing article disposed on the rotatable platen, delivering a polishing composition to the polishing article, and contacting a substrate on the polishing article.
    • 提供了一种用于化学机械抛光系统的制品,方法和设备。 在一个方面,提供了一种用于抛光包括具有抛光表面的抛光制品的基底的制品,所述抛光表面包括具有用于抛光所述基底的第一部分的第一硬度的第一抛光材料的第一抛光部分,以及 第二抛光部分,具有第二硬度的第二抛光材料,用于抛光衬底的第二部分。 制造商可以设置在可旋转,静止或直线的压板上,用于处理衬底。 在另一方面,提供了一种用于处理基板的方法,包括提供包含设置在可旋转压板上的抛光制品的压板,将抛光组合物输送到抛光制品,以及使抛光制品上的基板接触。
    • 8. 发明申请
    • ELECTROLYTIC MICROFINISHING OF METALLIC WORKPIECES
    • 金属工件电解微晶
    • US20060249398A1
    • 2006-11-09
    • US11382016
    • 2006-05-06
    • Manfred Becker
    • Manfred Becker
    • B23H5/00
    • B23H3/00B23H5/08
    • The invention is an electrolytic microfinishing process which utilizes a conductive tool as a cathode and a conductive workpiece as an anode both connected to a power supply. Electrolytic fluid is pumped between the tool and workpiece, creating a decomposition of the workpiece surface allowing the surface of the workpiece to be removed or wiped away by the interaction of the flowing electrolyte and rotation of the tool without generating any heat at a rate significantly faster than any other known machining process. The tool has no contact with the workpiece and accordingly, requires very low clamping loads to hold the workpiece in the spindle during the finishing operation. Due to the low clamping loads, the distortion of the workpiece is completely eliminated. Modulating the power supply during the work cycle allows the use of a single tool for both roughing and finishing as a continuous cycle to significantly provide surface finishes previously unobtainable.
    • 本发明是利用导电工具作为阴极和导电工件作为连接到电源的阳极的电解微精加工工艺。 电解液在工具和工件之间泵送,产生工件表面的分解,允许工件的表面通过流动的电解液和工具的旋转的相互作用而被除去或擦去,而不会以显着更快的速度产生任何热量 比任何其他已知的加工过程。 该工具不与工件接触,因此,在整理操作期间,需要非常低的夹紧力以将工件保持在主轴中。 由于夹紧力低,完全消除了工件的变形。 在工作循环期间调节电源允许使用单个工具进行粗加工和精加工作为连续循环,以显着提供以前无法获得的表面处理。
    • 10. 发明授权
    • Method and apparatus for surface polishing
    • 表面抛光方法和装置
    • US5580300A
    • 1996-12-03
    • US84819
    • 1993-06-30
    • Katsuji Tsutsumi
    • Katsuji Tsutsumi
    • B23H5/00A47L15/04B23H5/06B24B31/00B24B31/06C25F3/00C25F3/16C25F7/00B24B1/00
    • A47L15/04A47L15/0094B24B31/06A47L2601/18
    • A washing liquid and a granular substance in the quantity equivalent to or more than the liquid in the specific gravity are accommodated in a barrel in a manner to position the surface of the liquid above the top surface of a granular substance layer at a stationary state of the barrel, and the barrel is swung with an object to be washed which is accommodated therein to wash away stains firmly stuck.In the same manner, various treatment liquid such as a plating liquid and a granular substance which possess conductivity or without conductivity are accommodated in the barrel with an object to be treated. By swinging the barrel, the treatment liquid and the granular substance are stirred and flow in the barrel so that the fluidity of the treatment liquid and granular substance relative to the object to be treated is improved to raise treatment effect and uniformity in the process. Thus, high quality surface treatment can be accomplished in high productivity. All kinds of surface polishing can be effectively conducted.
    • 将比重重量相当于或大于液体量的洗涤液体和粒状物质容纳在筒体中,以将液体的表面在粒状物质层的上表面的上方定位在静止状态 桶和桶被摆放在被洗涤的物体上,其被容纳在其中以洗去牢固粘住的污渍。 以相同的方式,将具有导电性或不导电性的诸如电镀液和颗粒状物质的各种处理液体容纳在具有待处理物体的筒中。 通过摆动桶,将处理液和粒状物质搅拌并流入桶中,使得处理液和颗粒状物质相对于待处理物体的流动性得到改善,从而提高处理效果和均匀性。 因此,可以以高生产率实现高质量的表面处理。 可以有效地进行各种表面抛光。