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    • 8. 发明授权
    • Piezoelectric resonator and method of manufacturing piezoelectric resonator
    • 压电谐振器及制造压电谐振器的方法
    • US08604675B2
    • 2013-12-10
    • US12932832
    • 2011-03-08
    • Mitoshi Umeki
    • Mitoshi Umeki
    • H01L41/053H01L41/22
    • H03H9/1021H03H9/02023H03H9/21H03H2003/022
    • To provide a piezoelectric resonator that suppresses spread of a conductive adhesive and is low in cost and a method of manufacturing a piezoelectric resonator. At positions, of a base 3, corresponding to electrode terminals on a crystal resonating piece 10, projection portions 41, 42 are formed by etching the base 3, and a metal film is formed on front surfaces of the above projection portions 41, 42, and the above metal films and the electrode terminals on the above-described crystal resonating piece 10 are electrically connected with a conductive adhesive 34. The conductive adhesives 34 rise on side surfaces of the above-described projection portions 41, 42 due to surface tension to bring the conductive adhesives 34 into a state where they do not easily flow outward, so that it is possible to suppress spread of the conductive adhesives 34. Further, it is possible to reduce a film thickness of the metal film to be formed on the front surfaces of the projection portions 41, 42, so that the crystal resonating piece 10 is reduced in cost.
    • 提供抑制导电性粘接剂扩散的压电谐振器,成本低,压电谐振器的制造方法。 在与晶体谐振片10上的电极端子相对应的基座3的位置,通过蚀刻基座3形成突起部分41,42,并且在上述突出部分41,42的前表面上形成金属膜, 并且上述晶体谐振片10上的上述金属膜和电极端子与导电粘合剂34电连接。由于表面张力,导电粘合剂34在上述突出部分41,42的侧表面上升到 使导电性粘合剂34成为不容易向外流动的状态,能够抑制导电性粘合剂34的扩散。而且,可以减少前面形成的金属膜的膜厚 突出部分41,42的表面,使得晶体谐振片10的成本降低。