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    • 2. 发明授权
    • Smart process modules and objects in process plants
    • 过程工厂中的智能过程模块和对象
    • US09069344B2
    • 2015-06-30
    • US11567116
    • 2006-12-05
    • Duncan SchleissRam RamachandranMark NixonMichael Lucas
    • Duncan SchleissRam RamachandranMark NixonMichael Lucas
    • G05B15/02G05B19/042G05B23/02
    • G05B19/0428G05B15/02G05B23/0267G05B2219/23255G05B2219/23258G05B2219/23261G05B2219/25428Y02P80/156Y02P90/14Y02P90/18
    • An operator interface within a process plant includes an execution engine that implements process flow modules made up of interconnected smart process objects that are aware of devices and other entities within the plant and that can perform methods to detect conditions within the plant, especially on a system-level basis. The smart process objects include a display element to be displayed to the operator, data storage for storing data pertaining to and/or received from an associated entity within a plant, inputs and outputs for communicating with other smart process objects and methods that may be executed on the stored and received data to detect plant conditions, including system-level conditions, such as leaks, errors and other conditions. Process flow modules, which may be made up of numerous interconnected smart process objects, may also include flow algorithms associated therewith to calculate mass balances, flows, etc. for the process elements within the process flow modules.
    • 过程工厂内的操作员界面包括一个执行引擎,该执行引擎实现由互连的智能过程对象组成的过程流模块,该对象流程模块知道工厂内的设备和其他实体,并且可以执行方法来检测工厂内的条件,特别是在系统 级基础 智能过程对象包括要向操作者显示的显示元素,用于存储与工厂内的关联实体相关联和/或从工厂内的相关实体接收的数据的数据存储器,用于与其他智能过程对象通信的输入和输出以及可执行的方法 对存储和接收的数据进行检测,以检测工厂条件,包括系统级条件,如泄漏,错误等条件。 可以由许多互连的智能过程对象组成的过程流模块还可以包括与其相关联的流程算法,以计算过程流模块内的过程元件的质量平衡,流程等。
    • 7. 发明授权
    • Methods and apparatus for configuring plasma cluster tools
    • 用于配置等离子体集群工具的方法和装置
    • US07162317B2
    • 2007-01-09
    • US11098037
    • 2005-03-31
    • Chung-Ho HuangShih-Jeun FanChin-Chuan Chang
    • Chung-Ho HuangShih-Jeun FanChin-Chuan Chang
    • G06F19/00
    • G05B19/0426G05B2219/23195G05B2219/23255G05B2219/24167G05B2219/25066G05B2219/25076G05B2219/25314G05B2219/2602
    • A method for configuring a specific plasma cluster tool having a plurality of modules. The method includes providing a set of module option definition files, the set of module option definition files containing generic configuration definitions for generic plasma cluster tools. The method further includes providing a set of tool-specific protection information, the set of tool-specific protection information including data that specifically identifies the particular plasma cluster tool for which the configuring is intended. The method further includes providing a set of tool-specific options specifications, the set of tool-specific options specifications specifying options that are specified for the specific plasma cluster tool. The method additionally includes generating a key file, the key file encapsulating configuration restrictions imposed on the specific plasma cluster tool, the key file being configured to be a required file in the configuring the specific plasma tool.
    • 一种用于配置具有多个模块的特定等离子体簇工具的方法。 该方法包括提供一组模块选项定义文件,该模块选项定义文件集合包含通用等离子体集群工具的通用配置定义。 该方法还包括提供一组特定于工具的保护信息,该组特定于工具的保护信息包括专门识别用于该配置的特定等离子体簇工具的数据。 该方法还包括提供一组特定于工具的选项规范,该组指定特定选项规范指定为特定等离子体簇工具指定的选项。 该方法还包括生成密钥文件,密钥文件封装对特定等离子体簇工具施加的配置限制,密钥文件被配置为配置特定等离子体工具中的所需文件。