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1. 发明申请

US20140132299A1 Electrical Inspection of Electronic Devices Using Electron-Beam Induced Plasma Probes 有权
标题翻译：使用电子束诱导等离子体探针的电子设备的电气检查
公开(公告)号：US20140132299A1
公开(公告)日：2014-05-15
申请号：US14155808
申请日：2014-01-15
申请人： Photon Dynamics, Inc.
发明人： Alexander Kadyshevitch , Ofer Kadar , Arie Glazer , Ronen Loewinger , Abraham Gross , Daniel Toet
IPC分类号： G01R1/07
CPC分类号： G01R1/072 , G01R31/305 , H01J33/00 , H01J2237/164
摘要： A non-mechanical contact signal measurement apparatus includes a first conductor on a structure under test and a gas in contact with the first conductor. At least one electron beam is directed into the gas so as to induce a plasma in the gas where the electron beam passes through the gas. A second conductor is in electrical contact with the plasma. A signal source is coupled to an electrical measurement device through the first conductor, the plasma, and the second conductor when the plasma is directed on the first conductor. The electrical measurement device is responsive to the signal source.
摘要翻译：非机械接触信号测量装置包括被测结构上的第一导体和与第一导体接触的气体。至少一个电子束被引导到气体中，以便在电子束通过气体的气体中引入等离子体。第二导体与等离子体电接触。当等离子体被引导到第一导体上时，信号源通过第一导体，等离子体和第二导体耦合到电测量装置。电测量装置响应于信号源。

2. 发明授权

US07196536B2 Method and apparatus for non-contact electrical probe 失效
标题翻译：非接触电探头的方法和装置
公开(公告)号：US07196536B2
公开(公告)日：2007-03-27
申请号：US10910060
申请日：2004-08-02
申请人： Michael J. Nystrom , Gloria E. Hofler
发明人： Michael J. Nystrom , Gloria E. Hofler
IPC分类号： G01R31/00 , G01R31/26 , G01R31/28
CPC分类号： G01R31/302 , G01R1/072
摘要： Methods and apparatus for non-contact electrical probes are described. In accordance with the invention, non-contact electrical probes use negative or positive corona discharge. Non-contact electrical probes are suited for testing of OLED flat panel displays.
摘要翻译：描述了非接触电探针的方法和装置。根据本发明，非接触电探针使用负或正电晕放电。非接触式电探头适用于OLED平板显示器的测试。

3. 发明授权

US4705329A Apparatus for electrical function checking of wiring matrices 失效
标题翻译：接线矩阵电气功能检查装置
公开(公告)号：US4705329A
公开(公告)日：1987-11-10
申请号：US902744
申请日：1986-09-02
申请人： Gunter Doemens
发明人： Gunter Doemens
IPC分类号： G01R1/07 , G01R31/02 , G01R31/28
CPC分类号： G01R1/072 , G01R31/024 , G01R31/2805
摘要： An apparatus for function checking of wiring matrices includes a carrier plate with a plurality of gas discharge channels formed therein. At least one selected measuring locations on a wiring matrix are ionically contacted through selected ones of the gas discharge channels, the gas discharge channels being selected by an electrode bus bar allocated to an electrode in the gas discharge channel and by controllably charging the gas discharge channels with an ionizing radiation to initiate the gas discharges. The ionizing radiation is controlled by either beam deflection or by masks.
摘要翻译：布线基体的功能检查装置包括形成有多个排气通道的承载板。布线基体上的至少一个选定的测量位置通过选定的气体放电通道离子接触，气体放电通道由分配给气体放电通道中的电极的电极母线选择，并且通过可控地对气体放电通道用电离辐射来引发气体放电。电离辐射由光束偏转或掩模控制。

4. 发明申请

US20080084224A1 Photoionization probe with injection of ionizing vapor 审中-公开
标题翻译：光电离探针注入电离蒸气
公开(公告)号：US20080084224A1
公开(公告)日：2008-04-10
申请号：US11545890
申请日：2006-10-10
申请人： Michael Nystrom
发明人： Michael Nystrom
IPC分类号： G01R31/302
CPC分类号： G01R31/311 , G01R1/072
摘要： A photoionization probe includes two electrodes and provides ionizable vapor in a carrier gas via a channel between the electrodes. The ionizable vapor is thereby concentrated in an aperture of the probe where it is photoionized by, for example, an ultraviolet (UV) lamp.
摘要翻译：光电离探针包括两个电极，并通过电极之间的通道在载气中提供可离子化的蒸气。因此，可离子化蒸气被浓缩在探针的孔中，其中通过例如紫外线（UV）灯进行光电离。

5. 发明授权

US5148102A Apparatus for the electrical function testing of wiring matrices, particularly of printed circuit boards 失效
标题翻译：布线电路特殊电线功能测试装置
公开(公告)号：US5148102A
公开(公告)日：1992-09-15
申请号：US768632
申请日：1991-10-10
申请人： Thomas Rose , Detlef Hoffmann
发明人： Thomas Rose , Detlef Hoffmann
IPC分类号： G01R1/07 , G01R31/28
CPC分类号： G01R1/072 , G01R31/2805
摘要： An apparatus for testing, for example, printed circuit boards having measuring locations connected by interconnects in which some of the measuring locations are closely spaced, includes a carrier plate having an arrangement of gas discharge channels each provided with an electrode for separate ionic contact with the more widely space measuring locations. The more closely space measuring locations are ionically contacted by a group gas discharge channel having a group electrode which extends over a group of the closely space measuring locations. The group gas discharge channel in one embodiment is an oblong hole in the carrier plate with a wire extending along its length. Current flow and voltage via the ionic contact is measured to identify faults in the interconnects between the measuring locations.
摘要翻译： PCT No.PCT / DE90 / 00641 Sec。 371日期1991年10月10日 102（e）日期1991年10月10日PCT提交1990年8月22日PCT公布。公开号WO91 / 02986 日期：1991年3月7日。一种用于测试的装置，例如具有通过互连连接的测量位置的印刷电路板，其中一些测量位置紧密地间隔开，包括具有排气通道排列的载体板，用于与更广泛的空间测量位置分离离子接触的电极。更紧密的空间测量位置通过具有延伸在一组紧密空间测量位置上的组电极的组气体放电通道离子地接触。在一个实施例中，组气体排出通道是沿着其长度延伸的导线的载体板中的长孔。测量通过离子接触的电流和电压以识别测量位置之间的互连中的故障。

6. 发明授权

US4764719A Electro-luminescent automatic testing apparatus and method for ceramic substrates, printed circuit boards and like items with background illumination suppression 失效
标题翻译：陶瓷基板，印刷电路板等具有背景照明抑制功能的电致发光自动测试装置和方法
公开(公告)号：US4764719A
公开(公告)日：1988-08-16
申请号：US901595
申请日：1986-08-29
申请人： Robert M. Zeh
发明人： Robert M. Zeh
IPC分类号： G01R1/07 , G01R31/02 , G01R31/28 , G01R31/309
CPC分类号： G01R31/309 , G01R1/072 , G01R31/026 , G01R31/2806
摘要： An automatic, electro-optical testing apparatus which employs electro-luminescence for the testing of items such as printed circuit boards, ceramic substrates and the like for electrical continuity. A unipotential array of conductor wires lying in substantially the same plane is supported within a sealable test chamber over an item under test to develop a desired electric field between exposed conductive surfaces of the item under test and the unipotential array of parallel conductors. Electro-luminescence is produced in a gaseous atmosphere within the sealable test chamber around test points contacted by a movable probe and around all conductive parts on the item under test and having electrical continuity with the test point contacted by the movable probe. The invention thus comprised eliminates the source of undesired background noise illumination while maintaining all of the transparent parallel conductor grid wires of a unipotential array at the same electric potential. This feature in conjunction with scanning with an automatic electro-optical scanning photometer in desired scanning paths parallel to the axes of the unipotential array of conductor wires reduces to a minimum the possibility of error occurring in the test results by reason of undesired background light noise illumination.
摘要翻译：一种自动的电光测试装置，其使用电致发光来测试诸如印刷电路板，陶瓷基板等的物品以用于电连续性。位于基本上相同的平面内的导线的单电位阵列被支撑在可密封的测试室内的待测试项目上，以在待测试项目的暴露的导电表面与平行导体的单电位阵列之间形成期望的电场。在可密封的测试室内的气体气氛中产生电致发光，该测试室围绕由可移动探针接触的测试点周围以及被测物品上的所有导电部件，并且与由可移动探针接触的测试点具有电连续性。因此，本发明消除了不需要的背景噪声照明的源，同时保持单电位阵列的所有透明平行导体网格线处于相同的电位。这个特征与扫描自动电光扫描光度计在平行于导线的单电位阵列的轴的所需扫描路径中的扫描减少了由于不期望的背景光噪声照明而导致测试结果中出错的可能性。

7. 发明授权

US09523714B2 Electrical inspection of electronic devices using electron-beam induced plasma probes 有权
标题翻译：使用电子束感应等离子体探针对电子设备进行电气检查
公开(公告)号：US09523714B2
公开(公告)日：2016-12-20
申请号：US14155808
申请日：2014-01-15
申请人： Photon Dynamics, Inc. , Orbotech Ltd.
发明人： Alexander Kadyshevitch , Ofer Kadar , Arie Glazer , Ronen Loewinger , Abraham Gross , Daniel Toet
IPC分类号： G01R31/305 , G01R1/07 , H01J33/00
CPC分类号： G01R1/072 , G01R31/305 , H01J33/00 , H01J2237/164
摘要： A non-mechanical contact signal measurement apparatus includes a first conductor on a structure under test and a gas in contact with the first conductor. At least one electron beam is directed into the gas so as to induce a plasma in the gas where the electron beam passes through the gas. A second conductor is in electrical contact with the plasma. A signal source is coupled to an electrical measurement device through the first conductor, the plasma, and the second conductor when the plasma is directed on the first conductor. The electrical measurement device is responsive to the signal source.
摘要翻译：非机械接触信号测量装置包括被测结构上的第一导体和与第一导体接触的气体。至少一个电子束被引导到气体中，以便在电子束通过气体的气体中引入等离子体。第二导体与等离子体电接触。当等离子体被引导到第一导体上时，信号源通过第一导体，等离子体和第二导体耦合到电测量装置。电测量装置响应于信号源。

8. 发明申请

US20060139039A1 Systems and methods for a contactless electrical probe 审中-公开
标题翻译：非接触式电探头的系统和方法
公开(公告)号：US20060139039A1
公开(公告)日：2006-06-29
申请号：US11020337
申请日：2004-12-23
申请人： David Dutton , Gloria Hofler , Michael Nystrom
发明人： David Dutton , Gloria Hofler , Michael Nystrom
IPC分类号： G01R31/02
CPC分类号： G01R1/072 , G01R31/305 , G09G3/006 , G09G3/3208
摘要： There is disclosed a contactless test probe using an ionized gas discharge for making electrical contact with the device under test (DUT). In one embodiment the ionized gas discharge is at or below atmospheric pressure thereby reducing the complexity of the control environment. In one embodiment, the atmospheric gas discharge, i.e. the electrical probing medium, is created and controlled by a micro-hollow cathode. In a further embodiment an extension gate is used to extend/retard the range of the high-density discharge.
摘要翻译：公开了一种使用电离气体放电与被测器件（DUT）进行电接触的非接触式测试探针。在一个实施例中，电离气体放电处于或低于大气压，从而降低了控制环境的复杂性。在一个实施例中，大气气体放电，即电探测介质，由微空心阴极产生和控制。在另一实施例中，延伸门用于延伸/延迟高密度放电的范围。

9. 发明授权

US6118285A Non-contact plasma probe for testing electrical continuity of printed wire boards 失效
标题翻译：用于测试印刷线路板电气连续性的非接触式等离子探头
公开(公告)号：US6118285A
公开(公告)日：2000-09-12
申请号：US36341
申请日：1998-03-06
申请人： Ronald W. Parker , James W. Grace , Gerald W. Siter , Eli K. Dabora , John T. Bahns , Baki Cetegen
发明人： Ronald W. Parker , James W. Grace , Gerald W. Siter , Eli K. Dabora , John T. Bahns , Baki Cetegen
IPC分类号： G01R1/07 , G01R31/28 , G01R31/302
CPC分类号： G01R1/072 , G01R31/2805
摘要： A system for testing the electrical conductivity of printed traces, on multiple surfaces, of a printed wiring board using non-contacting probes. The non-contact probes generate a plasma in a plasma generating chamber that is used to apply a voltage to the printed wiring board. A measurement circuit determines the magnitude of the voltage on the printed wiring board.
摘要翻译：用于使用非接触式探针在印刷线路板的多个表面上测试印刷迹线的电导率的系统。非接触式探针在等离子体发生室中产生用于向印刷线路板施加电压的等离子体。测量电路确定印刷电路板上电压的大小。

10. 发明授权

US4967149A Drive device for an apparatus for electrical function testing of wiring matrices 失效
标题翻译：用于布线基体电气功能测试装置的驱动装置
公开(公告)号：US4967149A
公开(公告)日：1990-10-30
申请号：US286347
申请日：1988-12-19
申请人： Guenter Doemens , Thomas Rose , Detlef Hoffmann , Arnold Heisen
发明人： Guenter Doemens , Thomas Rose , Detlef Hoffmann , Arnold Heisen
IPC分类号： G01R1/073 , G01R1/07 , G01R31/302 , G01R31/304
CPC分类号： G01R1/072 , G01R31/304
摘要： A drive device for an apparatus for electrical function testing of wiring matrices, which has optimally simple electrode shapes for the purpose of a further miniaturization with a two-electrode arrangement. For testing printed circuit boards a non-touching plasma contacting is used whereby two respectively selected measuring locations of a wiring matrix can be contacted via allocated discharge channels and their electrodes. The drive of the measuring locations (test points) occurs via control gas discharges that are generated by applying an adequately high voltage between the electrodes. By applying a voltage between the gas discharges, a current conduction that can be evaluated for test purposes is generated for a conductive connection between the test points.
摘要翻译：用于布线基体的电功能测试装置的驱动装置，其具有最佳简单的电极形状，以便通过双电极布置进一步小型化。为了测试印刷电路板，使用非触摸等离子体接触，由此布线基体的两个分别选择的测量位置可以经由分配的放电通道及其电极接触。测量位置（测试点）的驱动通过在电极之间施加足够高的电压产生的控制气体放电发生。通过在气体放电之间施加电压，可以为测试点之间的导电连接产生可用于测试目的的电流传导。

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