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1. 发明授权

US08261762B2 Processing gas supplying system and processing gas supplying method 有权
标题翻译：加工气体供应系统和加工气体供应方法
公开(公告)号：US08261762B2
公开(公告)日：2012-09-11
申请号：US12093491
申请日：2007-08-10
申请人： Kiyoshi Komiyama , Akitoshi Tsuji , Takuya Fujiwara
发明人： Kiyoshi Komiyama , Akitoshi Tsuji , Takuya Fujiwara
IPC分类号： H01L21/30 , B05C11/00
CPC分类号： F17C7/00 , F17C5/06 , F17C2205/0326 , F17C2205/0335 , F17C2205/0352 , F17C2221/016 , F17C2223/0123 , F17C2227/044 , F17C2227/045 , F17C2250/032 , F17C2250/0443 , F17C2250/0626 , F17C2250/0636 , F17C2250/0673 , F17C2260/044 , F17C2260/053 , F17C2270/0518 , Y10T137/0419 , Y10T137/4259
摘要： A gas supplying system includes a processing gas supply pipe for supplying a processing gas from a gas cylinder 210 into a processing apparatus and a nonreactive gas supply source 230 for supplying a nonreactive gas into the gas supply pipe. While the system is in operation, the gas supply pipe is charged with the nonreactive gas and a control unit is in a standby state. If a processing gas use start signal is received from the processing apparatus, the system exhausts the nonreactive gas from the gas supply pipe to create a vacuum therein; charges the gas supply pipe with the processing gas; and starts a supply of the processing gas from the processing gas supply source. If a processing gas use finish signal is received from the processing apparatus, the system stops the supply of the processing gas from the processing gas supply source; exhausts the processing gas from the gas supply pipe to create a vacuum therein; and charges the gas supply pipe with the nonreactive gas. Accordingly, the gas pipe from the processing gas supply source to the processing apparatus can be kept charged with the nonreactive gas when the processing gas is not used in the processing apparatus. Therefore, a deposit generation inside the gas pipe can be prevented during that period.
摘要翻译：气体供给系统包括用于将来自气瓶210的处理气体供给到处理装置中的处理气体供给管和用于向气体供给管供给非反应性气体的非反应性气体供给源230。当系统运行时，气体供给管上装有非反应气体，控制单元处于待机状态。如果从处理装置接收到处理气体使用开始信号，则系统从气体供给管排出非反应性气体，以在其中产生真空; 用加气处理供气管; 并开始从处理气体供应源供应处理气体。如果从处理装置接收到处理气体使用完成信号，则系统停止从处理气体供应源供应处理气体; 从气体供给管排出处理气体以在其中产生真空; 并用非反应性气体对气体供给管进行充电。因此，当在处理装置中不使用处理气体时，从处理气体供给源到处理装置的气体管道可以保持充满非反应性气体。因此，能够防止在该期间内的气体管内的沉积物。

2. 发明申请

US20070144191A1 METHOD OF OPERATING A CRYOGENIC TEMPERATURE CONTROL APPARATUS 审中-公开
标题翻译：运行低温温度控制装置的方法
公开(公告)号：US20070144191A1
公开(公告)日：2007-06-28
申请号：US11549990
申请日：2006-10-17
申请人： Herman Viegas , David Vander Woude , Suresh Kumar , Joseph Glentz
发明人： Herman Viegas , David Vander Woude , Suresh Kumar , Joseph Glentz
IPC分类号： F17C13/02 , F25D17/02
CPC分类号： F25D29/001 , F17C7/04 , F17C2221/013 , F17C2221/014 , F17C2223/0161 , F17C2223/033 , F17C2223/046 , F17C2225/0123 , F17C2225/033 , F17C2227/0313 , F17C2227/0393 , F17C2250/0439 , F17C2250/0473 , F17C2250/0478 , F17C2250/0673 , F17C2265/012 , F17C2270/0171 , F25B2700/21172 , F25B2700/21173 , F25D3/105 , F25D3/125 , F25D2400/30 , F25J3/04478
摘要： A method of temperature control in a cryogenic temperature control apparatus. The method includes operating the cryogenic temperature control apparatus in a first mode, and delivering a first flow rate of cryogen from a storage tank to an evaporator coil in the first mode. The cryogenic temperature control apparatus is operated in a second mode after operating the cryogenic temperature control apparatus in the first mode for a predetermined time duration. A second flow rate of cryogen that is lower than the first flow rate is delivered to the evaporator coil in the second mode.
摘要翻译：一种低温温度控制装置中的温度控制方法。该方法包括以第一模式操作低温温度控制装置，并且在第一模式中将冷冻剂的第一流量从储罐输送到蒸发器盘管。在第一模式中操作低温温度控制装置达预定时间后，低温温度控制装置以第二模式操作。低于第一流量的冷冻剂的第二流量在第二模式下输送到蒸发器盘管。

3. 发明授权

US07568507B2 Diagnostic method and apparatus for a pressurized gas supply system 有权
标题翻译：加压气体供应系统的诊断方法和装置
公开(公告)号：US07568507B2
公开(公告)日：2009-08-04
申请号：US11295222
申请日：2005-12-06
申请人： David John Farese , Todd Eric Carlson , Joseph Perry Cohen , Amanda Elizabeth Witmer , Keith H. Schultz
发明人： David John Farese , Todd Eric Carlson , Joseph Perry Cohen , Amanda Elizabeth Witmer , Keith H. Schultz
IPC分类号： B65B57/00
CPC分类号： F17C5/06 , F17C2201/0109 , F17C2201/056 , F17C2201/058 , F17C2205/0142 , F17C2205/0323 , F17C2205/0338 , F17C2221/012 , F17C2221/017 , F17C2223/0123 , F17C2223/035 , F17C2223/036 , F17C2227/043 , F17C2250/032 , F17C2250/043 , F17C2250/0636 , F17C2250/0673 , F17C2260/023 , F17C2270/0168 , F17C2270/0178 , Y02E60/321
摘要： A diagnostic method for a gas supply system includes: determining a desired ramp rate for filling a vessel from a supply of compressed gas; monitoring the actual pressure of gas entering the vessel; and discontinuing the flow of gas into the vessel when the actual pressure deviates from the intended pressure at the desired ramp rate by an undesired amount. A system for carrying out the method includes a flow controller for controlling operation of the supply system to deliver compressed gas from a source to a vessel through a supply line at a desired ramp rate. The system employs a pressure monitor downstream of a control valve for measuring the pressure of gas directed into the vessel and transmitting pressure-related data to the flow controller, which closes the control valve to discontinue filling of the vessel if the actual pressure exceeds a permissible deviation from the intended pressure.
摘要翻译：一种用于气体供应系统的诊断方法包括：确定用于从压缩气体供应器填充容器的期望斜率; 监测进入船舶的气体的实际压力; 并且当实际压力以期望的斜率以期望的压力偏离不期望的量时，停止气体流入容器。用于执行该方法的系统包括流量控制器，用于控制供应系统的操作，以通过供应管线以期望的斜坡速率将压缩气体从源输送到容器。该系统在控制阀的下游采用压力监测器，用于测量导入容器的气体的压力，并将压力相关数据传送到流量控制器，该流量控制器如果实际压力超过允许值则关闭控制阀以停止对容器的填充偏离预期压力。

4. 发明授权

US5495699A Method and apparatus for pressure filling and sealing a vessel 失效
标题翻译：压力填充和密封容器的方法和装置
公开(公告)号：US5495699A
公开(公告)日：1996-03-05
申请号：US336764
申请日：1994-11-09
申请人： Thomas I. Buckley, Jr.
发明人： Thomas I. Buckley, Jr.
IPC分类号： F17C5/00 , F17C13/06 , F17C13/12 , B65B31/02 , B65B7/28
CPC分类号： F17C5/005 , F17C13/06 , F17C13/123 , F17C2205/037 , F17C2209/221 , F17C2227/0121 , F17C2227/04 , F17C2250/0636 , F17C2250/0673 , F17C2260/036 , F17C2270/059
摘要： The invention is directed to an apparatus for filling and sealing a canister having a weldable end wall. A weld head assembly includes a head having a welding electrode disposed within an opening for receiving a pressurized gas and defining a terminal end. The head further has a seal operably associated with the terminal end for engaging the end wall of the canister. A ball shuttle assembly includes a shuttle block having a passage for receiving the weld ball. The ball shuttle assembly further includes a device for positioning the shuttle block whereby the weld ball is in substantially coaxial alignment with the opening, and moving the weld ball into the opening of the weld head. The passage of the shuttle block is fluidly disassociated from the opening in the weld head when the seal is engaged with the end wall of the canister. The present invention further is directed to an apparatus for pressure testing a weldable vessel, which properly aligns a top flange of the vessel with an end face of the apparatus to thereby ensure proper sealing therebetween during the pressure testing operation.
摘要翻译：本发明涉及一种用于填充和密封具有可焊接端壁的罐的设备。焊头组件包括具有设置在用于接收加压气体并限定终端的开口内的焊接电极的头部。头部还具有可操作地与终端连接的密封件，用于接合罐的端壁。球形梭组件包括具有用于接收焊球的通道的梭块。球形梭组件还包括用于定位梭子块的装置，由此焊球与开口基本上同轴对准，并且将焊球移动到焊接头的开口中。当密封件与罐的端壁接合时，穿梭块的通道与焊接头中的开口流体地分离。本发明还涉及一种用于对可焊容器进行压力测试的装置，其将容器的顶部凸缘与设备的端面正确对准，从而在压力测试操作期间确保其间的适当密封。

5. 发明授权

US5101636A Cryogen delivery apparatus and method for regulating the cooling potential of a flowing cryogen 失效
标题翻译：用于调节流动原子的冷却潜能的交付装置和方法
公开(公告)号：US5101636A
公开(公告)日：1992-04-07
申请号：US633903
申请日：1990-12-26
申请人： Ron C. Lee , Mark J. Kirschner
发明人： Ron C. Lee , Mark J. Kirschner
IPC分类号： B29C49/64 , B29L22/00 , F17C5/02 , F17C7/00 , F17C9/00 , F17C13/02 , F17D3/10
CPC分类号： F17C13/02 , F17C9/00 , F17C2203/0329 , F17C2203/0391 , F17C2221/014 , F17C2223/0161 , F17C2225/0123 , F17C2225/0161 , F17C2250/061 , F17C2250/0673 , F17C2270/05
摘要： The present invention relates to a cryogen delivery apparatus and method for delivering a flowing cryogen with a regulated cooling potential. The apparatus includes a pressure vessel for receiving a liquid form of the cryogen. A liquid-vapor interface is maintained within the pressure vessel so that a gaseous form of the cryogen having a low cooling potential is situated above the liquid-vapor interface and a liquid form of the cryogen having a high cooling potential is situated below the liquid-vapor interface. An outlet conduit is provided for delivering the gas and liquid forms of the cryogen from the pressure vessel. The conduit has a moveable end section located within the pressure vessel. When the moveable end section is oscillated above and below the level of a liquid-vapor interface, a two-phase flow of cryogen is delivered comprising the pure gaseous and liquid forms of the cryogen. A timing control circuit is provided to selectively regulate the time intervals that moveable end section is above and below the liquid-vapor interface during each period of oscillation. Such regulation in turn regulates the proportions of the gaseous and liquid forms and thus, the cooling potential contained in the delivered cryogen.

6. 发明授权

US5018358A Cryogen delivery apparatus 失效
标题翻译：低温输送装置
公开(公告)号：US5018358A
公开(公告)日：1991-05-28
申请号：US496397
申请日：1990-03-20
申请人： Ron C. Lee , Mark J. Kirschner
发明人： Ron C. Lee , Mark J. Kirschner
IPC分类号： F17C9/00 , F17C13/02
CPC分类号： F17C13/02 , F17C9/00 , F17C2203/0329 , F17C2203/0391 , F17C2205/0332 , F17C2221/013 , F17C2221/014 , F17C2223/0161 , F17C2225/0123 , F17C2225/0161 , F17C2250/061 , F17C2250/0673 , F17C2270/05
摘要： The present invention relates to an apparatus for delivery of pure gaseous and liquid forms of cryogen. The apparatus includes a pressure vessel for receiving a liquid form of the cryogen. A liquid-vapor interface is maintained within the pressure vessel by a liquid level detector and a cut-off valve connected to the level detector to vent the gaseous form of the cryogen to the atmosphere when the liquid form falls below a predetermined level. A heated overflow tube projects into the pressure vessel and is positioned at the predetermined level of the liquid. When the liquid rises above the predetermined level, it flowws into the overflow tube and is heated to vapor to add to the gaseous form of the cryogen within the pressure vessel. An outlet conduit is provided for delivering the gas and liquid forms of the cryogen from the pressure vessel. The conduit has a moveable end section located within the pressure vessel. When the movable end section is moved above the level of a liquid-vapor interface, the gas form of the material is delivered from the conduit; and when the moveable end section is positioned below the liquid-vapor interface, a pure liquid form of the cryogen is delivered from the pressure vessel. Movement of the moveable end section of the conduit is preferably controlled by a solenoid connected to a timing circuit.
摘要翻译：本发明涉及用于输送纯气体和液体形式的冷冻剂的装置。该装置包括用于接收液体形式的冷冻剂的压力容器。通过液位检测器和连接到液位检测器的截止阀将液体 - 蒸汽界面保持在压力容器内，以在液体形式下降到预定水平以下时将气态形式的冷冻剂排放到大气中。加热的溢流管伸入压力容器中并且位于液体的预定水平。当液体升高到高于预定水平时，它流入溢流管并被加热至蒸气以加压至压力容器内的气态形式的冷冻剂。提供出口导管，用于从压力容器输送冷冻剂的气体和液体形式。导管具有位于压力容器内的可移动端部。当可移动端部移动到高于液 - 液界面的高度时，材料的气体形式从导管输送; 并且当可移动端部位于液 - 蒸汽界面下方时，冷却剂的纯液体形式从压力容器输送。导管的可移动端部的移动优选地由连接到定时电路的螺线管控制。

7. 发明授权

US4336689A Process for delivering liquid cryogen 失效
标题翻译：输送液体冷冻剂的方法
公开(公告)号：US4336689A
公开(公告)日：1982-06-29
申请号：US282256
申请日：1981-07-10
申请人： Robert B. Davis
发明人： Robert B. Davis
IPC分类号： F17C9/00 , F17C7/02
CPC分类号： F17C9/00 , F17C2205/0355 , F17C2221/014 , F17C2221/017 , F17C2223/0161 , F17C2225/0161 , F17C2250/0636 , F17C2250/0673 , F17C2250/0694 , Y10T137/0396
摘要： A process for delivering a liquid cryogen to a use point in an essentially liquid phase at an about constant flow rate in the range of about 1 to about 40 pounds per hour, said use point having a variable internal pressure drop, comprising the following steps:(i) providing said liquid cryogen at a line pressure in the range of about 4 to about 10 times the maximum use point operating pressure;(ii) subcooling the liquid cryogen of step (i) to an equilibrium pressure of no greater than about one atmosphere while maintaining said ine pressure;(iii) passing the liquid cryogen of step (ii) through a device having a flow coefficient in the range of about 0.0002 to about 0.005 while cooling said device externally to a temperature, which will maintain the liquid cryogen in essentially the liquid phase; and(iv) passing the liquid cryogen exiting the device in step (iii) through an insulated tube having an internal diameter in the range of about 0.020 inch to about 0.200 inch to the use point.
摘要翻译：一种将液体冷冻剂以约1至约40磅/小时范围内的约恒定流速输送到基本上液相中的使用点的方法，所述使用点具有可变的内部压降，包括以下步骤：（i）在最大使用点操作压力的约4至约10倍的管线压力下提供所述液体冷冻剂; （ii）将步骤（i）的液体致冷剂过冷至不大于约一个大气压的平衡压力，同时保持所述压力; （iii）将步骤（ii）的液体冷冻剂通过流动系数在约0.0002至约0.005范围内的装置，同时将所述装置外部冷却至将使液体冷冻剂基本保持液相的温度; 和（iv）使步骤（iii）中离开装置的液体冷冻剂通过内径在约0.020英寸至约0.200英寸范围内的绝缘管。

8. 发明授权

US07290572B2 Method for purging a high purity manifold 失效
标题翻译：吹扫高纯度歧管的方法
公开(公告)号：US07290572B2
公开(公告)日：2007-11-06
申请号：US11160801
申请日：2005-07-10
申请人： David James Silva
发明人： David James Silva
IPC分类号： B65B1/04
CPC分类号： F17C13/04 , F17C2205/0146 , F17C2205/0323 , F17C2221/05 , F17C2227/0302 , F17C2227/044 , F17C2227/045 , F17C2250/0631 , F17C2250/0636 , F17C2250/0673 , F17C2260/048 , F17C2270/0518
摘要： A method for purging a manifold for the delivery of a high purity chemical by injecting of a purge gas into the manifold under vacuum conditions. In one embodiment, the method comprises a first step of injecting a purge gas into the manifold at a first end while applying vacuum at a second end; a second step of closing the first end and evacuating the manifold by applying vacuum at the second end; and a third step of opening the first end and injecting purge gas into the manifold at the first end while applying vacuum at the second end, causing a turbulent flow of the purge gas along the internal walls of the manifold due to the pressure differential between the purge gas and the evacuated manifold. An effective removal of residuals of the high purity chemical within the manifold is thereby achieved.
摘要翻译：一种用于通过在真空条件下将吹扫气体注入到歧管中来吹扫用于输送高纯度化学品的歧管的方法。在一个实施例中，该方法包括第一步骤，其在第一端处将净化气体注入到歧管中，同时在第二端施加真空; 第二步骤，通过在第二端施加真空来关闭第一端并排出歧管; 以及第三步骤，在第一端处打开第一端并将吹扫气体注入到歧管中，同时在第二端处施加真空，由于第二端部之间的压力差导致吹扫气体沿着歧管内壁的紊流吹扫气体和抽真空歧管。从而实现了在歧管内高效清除高纯度化学物质的有效去除。

9. 发明申请

US20070006941A1 Method for purging a high purity manifold 失效
公开(公告)号：US20070006941A1
公开(公告)日：2007-01-11
申请号：US11160801
申请日：2005-07-10
申请人： David Silva
发明人： David Silva
IPC分类号： B65B31/04
CPC分类号： F17C13/04 , F17C2205/0146 , F17C2205/0323 , F17C2221/05 , F17C2227/0302 , F17C2227/044 , F17C2227/045 , F17C2250/0631 , F17C2250/0636 , F17C2250/0673 , F17C2260/048 , F17C2270/0518
摘要： A method for purging a manifold for the delivery of a high purity chemical by injecting of a purge gas into the manifold under vacuum conditions. In one embodiment, the method comprises a first step of injecting a purge gas into the manifold at a first end while applying vacuum at a second end; a second step of closing the first end and evacuating the manifold by applying vacuum at the second end; and a third step of opening the first end and injecting purge gas into the manifold at the first end while applying vacuum at the second end, causing a turbulent flow of the purge gas along the internal walls of the manifold due to the pressure differential between the purge gas and the evacuated manifold. An effective removal of residuals of the high purity chemical within the manifold is thereby achieved.

10. 发明授权

US5293750A Control system for liquefied gas container 失效
标题翻译：液化气集装箱控制系统
公开(公告)号：US5293750A
公开(公告)日：1994-03-15
申请号：US799273
申请日：1991-11-27
申请人： Itsuro Tamura , Tsutomu Takae , Yoshiyuki Kawashima , Kazunori Kawanishi
发明人： Itsuro Tamura , Tsutomu Takae , Yoshiyuki Kawashima , Kazunori Kawanishi
IPC分类号： F17C13/02 , G05D16/00 , F17C5/02
CPC分类号： F17C13/02 , F17C2205/0326 , F17C2221/017 , F17C2223/0161 , F17C2227/0341 , F17C2250/032 , F17C2250/0626 , F17C2250/0631 , F17C2250/0636 , F17C2250/0673 , F17C2250/0694 , F17C2250/072 , F17C2265/034
摘要： A control apparatus for maintaining constant the temperature and pressure of the vapor phase in a very low-temperature controlled liquefied gas container includes a pressure sensor, a temperature sensor, two electromagnetic valves, and a refrigerator. When operation of the refrigerator disturbs measurement at low temperature, the refrigerator is stopped. Gas vaporizes from a liquid phase, and gas is discharged from the container. In this manner, the temperature and pressure of the liquefied gas in the container can be maintained constant. After measurement, the liquid level in the container will be lowered by evaporation, so that the liquefied gas is supplied to the container. In this manner, the liquid level in the container can be maintained constant.
摘要翻译：用于在极低温度控制的液化气容器中保持气相温度和压力恒定的控制装置包括压力传感器，温度传感器，两个电磁阀和冰箱。当冰箱的操作在低温下干扰测量时，冰箱停止。气体从液相中汽化，气体从容器中排出。以这种方式，容器中的液化气体的温度和压力可以保持恒定。测定后，通过蒸发使容器内的液面降低，从而将液化气供给容器。以这种方式，容器中的液位可以保持恒定。

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