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    • 3. 发明授权
    • Multiple frequency processing to improve electrical resistivity of blind
micro-vias
    • 多频处理提高了盲孔的电阻率
    • US5731047A
    • 1998-03-24
    • US746425
    • 1996-11-08
    • David B. Noddin
    • David B. Noddin
    • B23K26/00H05K3/00H05K3/46B05D3/02C08J7/18
    • H05K3/0035B23K26/0006B23K2203/16B23K2203/30B23K2203/42H01L2224/16225H01L2924/15311H05K2203/0554H05K2203/1105H05K2203/128H05K3/4652
    • A method of forming a blind-via in a laminated substrate by forming a first conductive layer. A dielectric layer is then formed on the first conductive layer. An exposed second conductive layer is formed on the dielectric layer, with the second conductive layer having a preformed aperture. The dielectric layer is laser drilled through to the first conductive layer to form a blind-via at a location within the preformed aperture of the second conductive layer using a plurality of laser pulses. Each laser pulse has a first energy density per pulse that is greater than an ablation threshold of the dielectric layer and less than an ablation threshold of the first conductive layer. The first conductive layer is then laser drilled for a predetermined number of pulses. Each of the predetermined number of pulses has a second energy density per pulse that is greater than an ablation threshold of the first conductive layer. The predetermined number of pulses cause the surface of the first conductive layer exposed by the laser drilling to become molten.
    • 通过形成第一导电层在层叠基板中形成盲通孔的方法。 然后在第一导电层上形成电介质层。 暴露的第二导电层形成在电介质层上,其中第二导电层具有预制孔。 使用多个激光脉冲将电介质层激光钻到第一导电层上以在第二导电层的预制孔的位置处形成盲通孔。 每个激光脉冲具有大于电介质层的消融阈值且小于第一导电层的消融阈值的每脉冲的第一能量密度。 然后将第一导电层激光钻出预定数量的脉冲。 预定数量的脉冲中的每一个具有大于第一导电层的消融阈值的每脉冲的第二能量密度。 预定数量的脉冲导致由激光钻孔暴露的第一导电层的表面变得熔化。
    • 7. 发明授权
    • Bonding diverse thermal expansion materials
    • 粘合各种热膨胀材料
    • US5495978A
    • 1996-03-05
    • US300857
    • 1994-09-06
    • David L. Muth
    • David L. Muth
    • B23K1/19B23K103/16
    • B23K1/19B23K2203/16
    • The disclosure is for a method of bonding materials with severely mismatched coefficients of thermal expansion, such as carbon/carbon and a composite of aluminum oxide and niobium and for the structure of the bonded joint. The key to a good bond between such materials is the use of a thin layer of porous sintered metal as an intermediate material which is bonded to the two diverse thermal expansion materials. The sintered material has a porosity of 20 to 80 percent, and stays bonded to both of the different material surfaces while the sintered material itself is also not destroyed by the thermal stress.
    • 本公开内容涉及将具有严重错配的热膨胀系数的材料如碳/碳和氧化铝和铌的复合物以及用于结合接头的结构的方法。 这种材料之间良好结合的关键是使用薄层的多孔烧结金属作为中间材料,其结合到两种不同的热膨胀材料上。 烧结材料的孔隙率为20〜80%,并且与两种不同的材料表面保持粘合,而烧结材料本身也不被热应力破坏。