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    • 7. 发明申请
    • EPSILON-SHAPED MICROCANTILEVER ASSEMBLY WITH ENHANCED DEFLECTIONS FOR SENSING, COOLING, AND MICROFLUIDIC APPLICATIONS
    • 用于传感,冷却和微流体应用的增强偏转的EPSILON型微型计算机组件
    • US20110197684A1
    • 2011-08-18
    • US13095530
    • 2011-04-27
    • Kambiz VafaiAbdul Rahim A. Khaled
    • Kambiz VafaiAbdul Rahim A. Khaled
    • G01L1/22B23P17/00
    • B01J19/0093B01J2219/00783B01J2219/00804B01J2219/00864B01J2219/00873F23C2900/03001F23N2900/01001F28F2230/00Y10T29/49982
    • An assembly of microcantilever-based sensors with enhanced deflections. A deflection profile of an ε-assembly can be compared with that of a rectangular microcantilever and a modified triangular microcantilever. Various force-loading conditions can also be considered. A theorem of linear elasticity for thin beams is utilized to obtain the deflections. The obtained defections can be validated against an accurate numerical solution utilizing a finite element method with a maximum deviation of less than 10 percent. The ε-assembly produces larger deflections than the rectangular microcantilever under the same base surface stress and same extension length. Also, the ε-microcantilever assembly produces a larger deflection than a modified triangular microcantilever. The deflection enhancement increases as the ε-assembly's free length decreases for various types of force loading conditions. The ε-microcantilever can be utilized in microsensing applications to provide a favorable high detection capability with a reduced susceptibility to external noises.
    • 具有增强偏转的基于微型悬臂梁的传感器组件。 可以将组装的偏转轮廓与矩形微悬臂梁和改进的三角形微悬臂梁的偏转轮廓进行比较。 也可以考虑各种力加载条件。 利用薄梁的线性弹性定理来获得偏转。 获得的偏差可以使用最大偏差小于10%的有限元法进行精确数值解。 在相同的基础表面应力和相同的延伸长度下,该组件产生比矩形微悬臂梁更大的偏转。 此外,微型悬臂梁组件产生比改进的三角形微悬臂梁更大的偏转。 随着各种类型的力加载条件下,组件的自由长度减小,挠度增强将增加。 微型悬臂梁可用于微型应用中,以提供有利的高检测能力,降低对外部噪声的敏感性。