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1. 发明授权

US08707971B2 Laminated walls for uniform fluid flow 有权
标题翻译：层压壁均匀流体流动
公开(公告)号：US08707971B2
公开(公告)日：2014-04-29
申请号：US12122571
申请日：2008-05-16
申请人： Kenneth C. Miller , Mike Wallis
发明人： Kenneth C. Miller , Mike Wallis
IPC分类号： H01L21/02
CPC分类号： H01L21/6719 , B05D3/0272 , H01L21/67034 , Y10T137/85938
摘要： A chamber with a fluid distribution network for uniform fluid flow within the chamber is provided. The chamber includes a first chamber wall that has a first surface and an opposing interior surface. The first surface is formed with a first set of channels, and the interior surface is exposed to the interior of the chamber and includes a plurality of interior ports that are connected to a plurality of the first set of channels. The chamber also includes a second chamber wall that has a second surface and an opposing exterior surface. The second surface has a second set of channels that partially intersect the first set of channels when the first surface is mated with the second surface. The exterior surface also includes at least one exterior port that provides access to the second set of channels.
摘要翻译：提供了具有流体分配网络的腔室，用于在腔室内均匀地流动流体。该室包括具有第一表面和相对的内表面的第一室壁。所述第一表面形成有第一组通道，并且所述内表面暴露于所述室的内部，并且包括连接到多个所述第一组通道的多个内部端口。该室还包括具有第二表面和相对的外表面的第二室壁。当第一表面与第二表面配合时，第二表面具有与第一组通道部分相交的第二组通道。外表面还包括提供对第二组通道的访问的至少一个外部端口。

2. 发明申请

US20100186180A1 SUPPORT STRUCTURE FOR MULTIPLE WORKPIECE SUPPORT ROLLERS 审中-公开
标题翻译：多个工作支持滚动支撑结构
公开(公告)号：US20100186180A1
公开(公告)日：2010-07-29
申请号：US12359173
申请日：2009-01-23
申请人： Kenneth C. Miller
发明人： Kenneth C. Miller
IPC分类号： A47L15/39 , B23Q1/64
CPC分类号： H01L21/67313
摘要： Apparatuses for supporting a workpiece are disclosed. In one example, the apparatus includes a plurality of shaft supports. The apparatus further includes a shaft defined between the shaft supports, the shaft extending through an aperture defined in each of the plurality of shaft supports. Further included in the apparatus is a plurality of rollers defined to rotate about the shaft, the rollers defined between the plurality of shaft supports.
摘要翻译：公开了用于支撑工件的装置。在一个示例中，该装置包括多个轴支撑件。该装置还包括一个轴，该轴限定在轴支撑件之间，该轴延伸穿过限定在多个轴支架中的每一个中的孔。进一步包括在该装置中的是定义为围绕轴旋转的多个辊，所述辊限定在多个轴支撑件之间。

3. 发明申请

US20090283158A1 LAMINATED WALLS FOR UNIFORM FLUID FLOW 有权
标题翻译：用于均匀流体流动的层压墙
公开(公告)号：US20090283158A1
公开(公告)日：2009-11-19
申请号：US12122571
申请日：2008-05-16
申请人： KENNETH C. MILLER , Mike Wallis
发明人： KENNETH C. MILLER , Mike Wallis
IPC分类号： F16L41/02 , C23C16/00 , B05B1/36
CPC分类号： H01L21/6719 , B05D3/0272 , H01L21/67034 , Y10T137/85938
摘要： A chamber with a fluid distribution network for uniform fluid flow within the chamber is provided. The chamber includes a first chamber wall that has a first surface and an opposing interior surface. The first surface is formed with a first set of channels, and the interior surface is exposed to the interior of the chamber and includes a plurality of interior ports that are connected to a plurality of the first set of channels. The chamber also includes a second chamber wall that has a second surface and an opposing exterior surface. The second surface has a second set of channels that partially intersect the first set of channels when the first surface is mated with the second surface. The exterior surface also includes at least one exterior port that provides access to the second set of channels.
摘要翻译：提供了具有流体分配网络的腔室，用于在腔室内均匀地流动流体。该室包括具有第一表面和相对的内表面的第一室壁。所述第一表面形成有第一组通道，并且所述内表面暴露于所述室的内部，并且包括连接到多个所述第一组通道的多个内部端口。该室还包括具有第二表面和相对的外表面的第二室壁。当第一表面与第二表面配合时，第二表面具有与第一组通道部分相交的第二组通道。外表面还包括提供对第二组通道的访问的至少一个外部端口。

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