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    • 2. 发明申请
    • Roller Pressing Device, Imprinting Device, and Roller Pressing Method
    • 辊压装置,压印装置和压辊方法
    • US20150217506A1
    • 2015-08-06
    • US14400824
    • 2013-06-19
    • SCIVAX CORPORATION
    • Hirosuke KawaguchiYutaka TaniguchiSatoru Tanaka
    • B29C59/04
    • B29C59/04B29C35/0805B29C2059/023B29L2007/001G03F7/0002
    • A roller-type depressing device, an imprint device and an imprint method utilizing the same which can depress an object like a die or a molding target by controlling the depressing force of a roller is provided. A roller-type depressing device to depress the object with a roller includes a pressure adjusting plate provided with the roller, a roller moving unit moving the roller relative to the object, a pressure adjusting unit holding the pressure adjusting plate in such a way that force produced by a pressure difference in fluid applied to both faces of the pressure adjusting plate acts on the roller, a pressure receiving stage receiving the pressure of the roller via the object, and a pressure adjuster adjusting the pressure difference in fluid applied to both faces of the pressure adjusting plate.
    • 提供了一种辊式压下装置,压印装置和使用该压印装置的压印方法,其通过控制辊的压下力来压制像模具或模制对象物体。 用辊压住物体的滚筒式按压装置包括设置有辊的压力调节板,相对于物体移动辊的滚动移动单元,以压力调节板的方式保持压力调节板 由压力调节板的两面施加的流体的压差产生的压力作用在辊上,压力接收台通过物体接收辊的压力,以及压力调节器,调节施加在压力调节板的两个面上的流体的压力差 压力调节板。
    • 3. 发明申请
    • IMPRINTING DEVICE AND IMPRINTING METHOD
    • 印刷装置和印刷方法
    • US20140319718A1
    • 2014-10-30
    • US14359647
    • 2012-11-21
    • SCIVAX CORPORATION
    • Hirosuke KawaguchiSatoru Tanaka
    • B29C59/02
    • G03F7/0002B29C59/02B29C59/022B29C2059/023B29C2791/006H01L21/565
    • An imprinting device to transfer the mold pattern on a die to a molding target includes a casing forming a pressure-adjusting chamber, a stage supporting the die and the molding target, a frame encircling a circumference of the stage, first moving means moving the casing and the stage in a direction coming close to each other or becoming distant from each other, second moving means moving the casing and the frame in a direction coming close to each other or becoming distant from each other, pressure-adjusting means that adjusts the pressure of a fluid in the pressure-adjusting chamber, and decompression means which decompresses a decompression chamber formed by the stage, a frame, and the die or the molding target, and which eliminates a fluid present between the die and the molding target.
    • 将模具上的模具图案转印到模制品上的压印装置包括形成压力调节室的壳体,支撑模具和成型目标的支架,围绕平台的周边的框架,移动壳体的第一移动装置 并且在彼此靠近或彼此远离的方向上的台阶,第二移动装置使壳体和框架沿彼此靠近或彼此远离的方向移动;调节装置,其调节压力 压力调节室中的流体的减压装置,以及减压装置,其对由载物台,框架和模具或模制目标物形成的减压室进行减压,并且消除了模具和模制目标之间存在的流体。
    • 4. 发明申请
    • FLUID PRESSURE IMPRINTING DEVICE PROVIDED WITH PRESSURIZATION UNIT SECURING TOOL
    • 流体压力加压装置提供加压装置工具
    • US20140147543A1
    • 2014-05-29
    • US14232081
    • 2012-07-06
    • Hirosuke KawaguchiHironobu TamuraSatoru Tanaka
    • Hirosuke KawaguchiHironobu TamuraSatoru Tanaka
    • B29C59/02
    • B29C59/02G11B5/855
    • An imprinting device is provided which is capable of using small an opening/closing device even when a transfer area increases. The imprinting device that transfers a molding pattern of a die to a molding target includes a pressurization unit that includes a pressurization chamber to pressurize the die and the molding target by a fluid, a stage that supports the die and the molding target pressurized by the pressurization unit, a pressurization device for adjusting the pressure of the fluid inside the pressurization chamber, an opening/closing device for relatively moving the pressurization unit and the stage, and a securing tool that secures the pressurization unit and the stage so as to prevent or suppress an application of force generated by the pressurization unit to the opening/closing device.
    • 提供一种即使当传送区域增加时也能够使用小的打开/关闭装置的压印装置。 将模具的成形图案转印到模制对象的压印装置包括加压单元,该加压单元包括通过流体对模具和成型目标物进行加压的加压室,支撑模具的阶段和通过加压加压的模制对象 单元,用于调节加压室内的流体的压力的加压装置,用于使加压单元和载物台相对移动的开闭装置,以及固定加压单元和载物台以防止或抑制的固定工具 施加由加压单元产生的力到打开/关闭装置。