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    • 2. 发明授权
    • Precision polishing system
    • 精密抛光系统
    • US5741171A
    • 1998-04-21
    • US699309
    • 1996-08-19
    • Ori SarfatyYossi HayDan Gunders
    • Ori SarfatyYossi HayDan Gunders
    • B24B17/04B24B37/04B24B49/12B24B49/00
    • B24B37/005B24B17/04B24B37/04B24B49/12
    • A precision polishing system able to polish samples to an accuracy within the submicron range is disclosed. The novel polishing system has applications in the semiconductor field for use in polishing silicon wafers during testing and quality control inspections. In the examination of failed wafers during the semiconductor manufacturing process, it is desirable to examine a cross section of the wafer at the point of failure. The polishing system of the present invention enables very accurate polishing of the wafer down to the submicron accuracy range. The sample is held is place by a gripper assembly which is attached to a polishing arm slideably connected to a fixed rail. The polishing arm is raised and lowered to polish the sample using a polishing wheel covered with a suitable abrasive. A video microscope attached to an object lens and a video camera provide images that are processed to control the polishing operation. The video microscope is mounted on a precision X-Y table to facilitate focusing and defect location of the sample in addition to forming part of the closed loop control of the polishing process. Two closed loop feedback control methods are utilized by the invention to achieve high polishing accuracies. The first utilizes electromechanical means to perform rough polishing of the sample. The second method utilizes digital image processing techniques to accurately control the movement of a polishing arm which holds the sample as it is polished.
    • 公开了一种能够将样品抛光到亚微米范围内的精度的精密抛光系统。 该新型抛光系统在半导体领域中的应用可用于在测试和质量控制检查期间抛光硅晶片。 在半导体制造过程中检查失败晶片时,期望在故障点检查晶片的横截面。 本发明的抛光系统能够将晶片非常精确地抛光到亚微米精度范围。 通过夹持器组件保持样品的位置,该夹持器组件附接到可滑动地连接到固定轨道的抛光臂。 使用覆盖有合适磨料的抛光轮将抛光臂升高和降低以对样品进行抛光。 附接到物镜和摄像机的视频显微镜提供被处理以控制抛光操作的图像。 视频显微镜安装在精密X-Y台上,以便于形成样品的聚焦和缺陷位置,同时形成抛光过程的闭环控制的一部分。 本发明利用两个闭环反馈控制方法实现高抛光精度。 第一种使用机电装置来对样品进行粗糙的抛光。 第二种方法利用数字图像处理技术精确地控制在抛光时保持样品的抛光臂的运动。
    • 3. 发明申请
    • Polishing fixture for simultaneous loading of a plurality of optical connectors and fiber stubs and a method of loading
    • 用于同时加载多个光学连接器和光纤短截线的抛光夹具和一种装载方法
    • US20050260932A1
    • 2005-11-24
    • US10851119
    • 2004-05-24
    • Rami GazitOri SarfatyGuy KlupDaniel Hachonochi
    • Rami GazitOri SarfatyGuy KlupDaniel Hachonochi
    • B24B1/00B24B19/22B24B41/06G02B6/38
    • B24B41/067B24B19/226G02B6/3863
    • A fixture for simultaneously clamping a number of optical fiber ferrules or fiber stubs for polishing. The fixture includes a plate assembly with an upper surface, a lower surface and a number of ferrule-receiving bores disposed across the upper surface and extending from the upper surface to the lower surface, each ferrule-receiving bore for receiving a ferrule. The fixture further includes a number of ferrule gripper arrangements, each associated with one of the ferrule-receiving bores, each of the ferrule gripper arrangements being selectively deployable between a released state for insertion of a ferrule into the ferrule-receiving bore and a gripping state in which the gripper arrangement clamps a ferrule within the ferrule-receiving bore. The fixture also includes a locking mechanism associated with at least a group of the number of ferrule gripper arrangements and configured to deploy the group of ferrule gripper arrangements substantially simultaneously from the released state to the gripping state so as to clamp substantially simultaneously a number of optical fiber ferrules located within a corresponding group of the ferrule-receiving bores.
    • 用于同时夹紧多个用于抛光的光纤套圈或纤维短截线的夹具。 固定装置包括具有上表面的板组件,下表面和多个套圈接纳孔,其跨过上表面设置并且从上表面延伸到下表面,每个套圈接收孔用于接纳套圈。 夹具还包括多个套圈夹持装置,每个套圈夹持装置与套管接收孔中的一个相关联,每个套圈夹持装置可选择地展开在用于将套圈插入套圈容纳孔的释放状态和夹紧状态 其中夹具装置将套圈夹在套圈容纳孔内。 夹具还包括与至少一组数量的套圈夹持器装置相关联的锁定机构,并且构造成将套管夹持器组合基本上同时地从释放状态展开到抓握状态,以便基本同时夹紧多个光学 光纤套圈位于相应的套圈接收孔组内。
    • 4. 发明申请
    • Method and apparatus for planar lightwave circuits pigtailing
    • 平面光波导电路的方法和装置
    • US20050180695A1
    • 2005-08-18
    • US10683292
    • 2003-10-14
    • Rafael BronsteinSerge SteinblattDaniel Leigh
    • Rafael BronsteinSerge SteinblattDaniel Leigh
    • G02B6/255G02B6/30
    • G02B6/30G02B6/2551
    • A method of bonding of an optical fiber to at least one port of a Planar Lightwave Circuit (PLC). The method includes steps of depositing an index matching and bonding material on the tip of the optical fiber, bringing in contact with the planar lightwave circuit (PLC) the tip of optical fiber having index matching and bonding material on it in a way where the index matching and bonding material serves as an interface between the port of the planar lightwave component (PLC) and the tip of optical fiber, and bonding the tip of optical fiber to the planar lightwave component by curing the index matching and bonding material in the interface between the planar lightwave component and optical fiber tip by curing radiation. The method is characterized in that the curing radiation from a source of curing radiation is delivered along the optical fiber to the tip of the optical fiber to be bonded.
    • 将光纤接合到平面光波回路(PLC)的至少一个端口的方法。 该方法包括以下步骤:在光纤的尖端上沉积折射率匹配和接合材料,使其与平面光波电路(PLC)接触,其中具有折射率匹配的光纤的尖端和接合材料在其上,其中指数 匹配和接合材料用作平面光波分量(PLC)的端口和光纤末端之间的接口,并且通过固化光纤的尖端与光纤波段之间的界面中的折射率匹配和接合材料 平面光波分量和光纤尖端通过固化辐射。 该方法的特征在于,来自固化辐射源的固化辐射沿着光纤传送到待粘合的光纤的末端。