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    • 4. 发明授权
    • Filter container attachment and detachment system
    • US11202980B2
    • 2021-12-21
    • US16479213
    • 2017-01-19
    • ROKI TECHNO CO., LTD.
    • Takashi Kinjo
    • B01D35/30B01D29/11
    • A filter attachment and detachment apparatus removably attaching a filter container containing a filter, as a part of a filtration apparatus that filters fluid with the filter, includes a first mounting protrusion at one end of the filter container to protrude from the filter container, the first mounting protrusion including a flow path in fluid communication with the filter inside the filter container, a rotation element to which a first flow path for the fluid is connected, the rotation element including an opening groove configured to receive the first mounting protrusion, and a first mounting protrusion holding part configured to rotatably hold the rotation element. The first mounting protrusion holding part includes an inner periphery surface and a notch communicating with an outer side of the inner periphery surface, where in a state where the first mounting protrusion is inserted into the opening groove through the notch, by rotating the rotation element, the first mounting protrusion is bound between the inner periphery surface of the first mounting protrusion holding part and the rotation element.
    • 6. 发明申请
    • Polishing pad and polishing method
    • 抛光垫和抛光方法
    • US20050274626A1
    • 2005-12-15
    • US11145179
    • 2005-06-06
    • Shigeru Tominaga
    • Shigeru Tominaga
    • B23H3/00B23H5/08B24B37/20B24B37/22B24B37/24C25F3/16C25F3/30C25F7/00H01L21/304H01L21/3063
    • B24B37/20B23H5/08B24B37/046C25F7/00
    • A polishing pad for electrolytically polishing an interconnect material of a device wafer by applying a direct-current voltage to the interconnect material as an anode and a cathode as a counter electrode while causing an electrolyte to come in contact with the anode and the cathode, the polishing pad includes a plurality of electrolytic cells formed by the anode, the cathode, and the electrolyte and having a contact surface smaller than the device wafer, the electrolytic cells being moved relative to the interconnect material when electrolytically polishing the interconnect material on the device wafer. The polishing pad includes an insulating member having a plurality of openings, a conductive top layer provided on the insulating member and having a plurality of openings communicating with the openings in the insulating member, and a conductive sheet formed on the insulating member on a side opposite to the conductive top layer, wherein the electrolyte reception section is formed by the opening in the insulating member and the opening in the conductive top layer.
    • 一种抛光垫,用于通过在引起电解液与阳极和阴极接触的同时将作为阳极的阳极和阴极施加直流电压直流电压电解抛光器件晶片的互连材料, 抛光垫包括由阳极,阴极和电解质形成的多个电解池,并且具有小于器件晶片的接触表面,当对器件晶片上的互连材料进行电解抛光时,电解槽相对于互连材料移动 。 所述抛光垫包括具有多个开口的绝缘构件,设置在所述绝缘构件上并具有与所述绝缘构件中的所述开口连通的多个开口的导电顶层,以及形成在所述绝缘构件上的相对侧的导电片 导电顶层,其中电解质接收部分由绝缘构件中的开口和导电顶层中的开口形成。
    • 9. 发明授权
    • Filter and filter medium used in said filter
    • 用于所述过滤器的过滤介质和过滤介质
    • US5433851A
    • 1995-07-18
    • US226977
    • 1994-04-13
    • Mikio Itoh
    • Mikio Itoh
    • B01D29/09B01D29/13B01D33/04
    • B01D29/096B01D33/04
    • A filter designed in compact form and requiring low filtration cost, by which there is no need to replace filter each time it becomes clogged and for which no liquid for backwashing is required, and with which is possible to filter under liquid pressure. In the filter, two ends of a filtering segment with a predetermined length of a filter medium in an oblong tube shape are movably and closely squeezed and held by a pair of opposing pressure rollers. A raw liquid introducing pipe is closely squeezed and held between a pair of pressure rollers, a forward end of the raw liquid introducing pipe is disposed within the range of the filtering segment of the tube-like filter medium. The filter medium is moved to the filtering segment constantly or when the filter medium is clogged, and the clogged filter medium is moved beyond the range of the filtering segment.
    • 过滤器设计紧凑,需要低过滤成本,每次堵塞时不需要更换过滤器,并且不需要液体进行反洗,并且可以在液体压力下过滤。 在过滤器中,具有长方形管状的过滤介质的预定长度的过滤段的两端由一对相对的压力辊可移动地紧密挤压并保持。 原料液体导入管紧密挤压并保持在一对加压辊之间,原料液导入管的前端配置在管状过滤介质的过滤段的范围内。 过滤介质不断地被移动到过滤段,或者当过滤介质被堵塞时,过滤介质被堵塞并且过滤段的范围被移动。