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1. 发明授权

US06866468B2 Loading and unloading station for a device for the processing of circular flat work-pieces, especially semiconductor wafers 失效
标题翻译：用于处理圆形扁平工件，特别是半导体晶片的装置的装卸站
公开(公告)号：US06866468B2
公开(公告)日：2005-03-15
申请号：US10098163
申请日：2002-03-13
申请人： Helge Möller , Thomas Keller
发明人： Helge Möller , Thomas Keller
IPC分类号： B25J11/00 , B65G49/07
CPC分类号： H01L21/6838 , H01L21/68 , Y10S414/136 , Y10S414/141
摘要： The device comprises a carrier for a workpiece; the carrier can be moved along a vertical and a horizontal axis by use of a drive mechanism and has an approximately planar contact surface for the workpiece, whereby the workpiece can be held on the contact surface by a contact mechanism of the carrier, especially vacuum, a retaining ring on the carrier encircling the contact surface and projecting downwards beyond the contact surface and having an inner diameter which is slightly larger than the outer diameter of the workpiece. At least three centering cams are arranged on a circle, the centering cams can be moved synchronously and in a radial direction by use of a centering drive, the centering cams having a supporting surface oriented on the top. The supporting surface has an approximately vertical stop surface as well as a stop being radially outwards of the stop surface adapted to engage the outer side of the retaining ring, when the centering cams are radially moved towards each other and the carrier is set down until coming close to our onto the centering cams. A robot is provided so that a workpiece can be loaded on cams or removed from it, the outer diameter of the retaining ring and the position of the stop surface and of the stop being dimensioned such that the workpiece is arranged approximately in a centered way relative to the vertical axis of the carrier when the stops of the centering cams engage the retaining ring.
摘要翻译：该装置包括用于工件的载体; 载体可以通过使用驱动机构沿垂直和水平轴线移动，并且具有用于工件的近似平面的接触表面，由此通过载体的接触机构特别是真空将工件保持在接触表面上，载体上的保持环环绕接触表面并向下突出超过接触表面并且具有稍微大于工件外径的内径。至少三个定心凸轮布置在圆周上，定心凸轮可以通过使用定中心驱动器同步地和沿径向移动，定心凸轮具有定位在顶部的支撑表面。支撑表面具有近似垂直的止动表面，以及当定心凸轮朝向彼此径向移动时适于接合保持环的外侧的止动表面的径向向外的止动件，并且载体被放下直到到达靠近我们的定心凸轮。设置机器人，使得工件可以装载在凸轮上或从其上移除，保持环的外径和止动表面和止动件的位置的尺寸被设计成使得工件大致以中心方式布置当定心凸轮的止动件与保持环接合时，到托架的垂直轴线。

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