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    • 4. 发明授权
    • Method of making a microwave device having a polycrystalline ferrite
substrate
    • 制造具有多晶铁氧体衬底的微波器件的方法
    • US6060433A
    • 2000-05-09
    • US237120
    • 1999-01-26
    • Yi-Qun LiHua Jiang
    • Yi-Qun LiHua Jiang
    • H01L39/24H01P1/19H01P1/32
    • H01P1/19H01L39/2458H01L39/2461H01L39/2464H01P1/32Y10S505/728Y10S505/731Y10S505/732Y10S505/742
    • The invention provides a structure comprising a high temperature superconducting layer deposited on a ceramic polycrystalline ferrite plate suitable for making commercial microwave devices. In one embodiment, the high temperature superconductor is yttrium barium copper oxide (YBCO), the ferrite is yttrium iron garnet (YIG), and the microwave device is a phase shifter. The method of making this embodiment comprises, polishing the YIG plate, depositing biaxially oriented yttria-stabilized zirconia (YSZ) to form a crystalline template using an ion-beam-assisted-deposition technique, depositing a CeO.sub.2 lattice matching buffer layer using pulsed laser deposition, depositing YBCO using pulsed laser deposition, and annealing the YBCO in oxygen. Etching the YBCO to form a meanderline patterned waveguide results in a high figure-of-merit microwave phase shifter when the device is cooled with liquid nitrogen and an external magnetic field is applied. Different patterns can be etched in the YBCO in order to make other well known ferrite-based microwave devices. Other oxide compounds can be used for ferrite plate and the high temperature superconductor.
    • 本发明提供了一种结构,其包括沉积在适于制造商业微波器件的陶瓷多晶铁氧体板上的高温超导层。 在一个实施例中,高温超导体是钇钡氧化铜(YBCO),铁氧体是钇铁石榴石(YIG),微波器件是移相器。 制造该实施方案的方法包括:使用离子束辅助沉积技术研磨YIG板,沉积双轴取向的氧化钇稳定的氧化锆(YSZ)以形成结晶模板,使用脉冲激光沉积沉积CeO 2晶格匹配缓冲层 ,使用脉冲激光沉积沉积YBCO,并在氧气中退火YBCO。 当器件用液氮冷却并施加外部磁场时,蚀刻YBCO以形成弯曲线图案波导,导致高品质微波移相器。 可以在YBCO中蚀刻不同的图案,以便制造其他众所周知的基于铁氧体的微波器件。 其他氧化物可用于铁氧体板和高温超导体。