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1. 发明授权

US3648059A Polarity control electric power supply circuit 失效
标题翻译：极性控制电源电路
公开(公告)号：US3648059A
公开(公告)日：1972-03-07
申请号：US3648059D
申请日：1970-06-03
申请人： INT PLASMA CORP
发明人： BEAUDRY HARVEY JAMES , WAIDTLOW ROBERT M
IPC分类号： H02H11/00 , H02J1/00
CPC分类号： H02H11/002 , Y10T307/839
摘要： A transformerless direct-coupled power supply circuit having built-in protection against faulty potential and ground side connections to the power supply mains and including a protective normally open relay which is closed to supply power only when proper potential and ground connections are made to the power supply mains.
摘要翻译：一种无变压器直流电源电路，具有内置保护功能，可防止与电源电源的故障电位和接地侧连接，并包括一个保护常开继电器，该继电器只有在对电源进行适当的电位和接地连接时才关闭供电供电。

2. 发明授权

US3678381A Radio frequency wattmeter 失效
标题翻译：无线电频率计
公开(公告)号：US3678381A
公开(公告)日：1972-07-18
申请号：US3678381D
申请日：1968-08-19
申请人： INT PLASMA CORP
发明人： BEAUDRY HARVEY JAMES
IPC分类号： G01R21/01 , G01R21/00 , G01R21/10 , G01R21/04 , G01R27/04
CPC分类号： G01R21/00
摘要： A wattmeter for measuring the power delivered by a generator operating at a radio frequency, to a load of variable impedance through a coaxial transmission line, wherein the wattmeter is designed for accurate operation when the load is free from capacitive and inductive reactance as evidenced by the wattmeter indicating zero reflected power.
摘要翻译：一种用于测量由射频工作的发电机通过同轴传输线传递到可变阻抗的负载的功率的功率表，其中，当负载没有电容和电感时，功率计被设计用于精确的操作，如电表表示零反射功率。

3. 发明授权

US3573192A Plasma generating apparatus 失效
公开(公告)号：US3573192A
公开(公告)日：1971-03-30
申请号：US3573192D
申请日：1968-08-19
申请人： INT PLASMA CORP
发明人： BERSIN RICHARD L , BEAUDRY HARVEY JAMES
IPC分类号： H05H1/30 , B01K1/00 , C01B13/12
CPC分类号： H05H1/30 , Y10S422/906
摘要： A PLASMA, OR IONIZED GAS, GENERATING APPARATUS FOR REACTION OF THE PLASMA WITH NON-GASEOUS SUBSTANCES IN A CONTAINER, THE APPARATUS HAVING A SUPPORT STRUCTURE DEFINED BY SPACED APART SUPPORT PLATES WHICH ARE INTERCONNECTED BY A PLURALITY OF POSTS. A PAIR OF ELONGATE ELECTRODE PLATES FOR EACH CONTAINER IS MOUNTED ON THE SUPPORT STRUCTURE SO THAT AT LEAST ONE OF THE PLATES CAN BE MOVED TOWARD AND INTO ENGAGEMENT WITH THE CONTAINER FOR GRASPING THE CONTAINER AND MOUNTING IT ON THE APPARATUS. THE ELECTRODE PLATES HAVE A CONCAVE CONFIGURATION TO GRASP THE CONTAINER AND INCLUDE A LAYER OF AN ELECTRICALLY INSULATING MATERIAL ON THE CONCAVE SIDE TO PREVENT SHORT CIRCUITS BETWEEN THE ELECTRODE PLATES AND THE CONTAINER AND TO FACILITATE THE SLIDEABLE INSERTION AND REMOVAL OF THE CONTAINER FROM BETWEEN THE PLATES. A SUPPLY MANIFOLD IS CARRIED BY THE SUPPORT STRUCTURE AND INCLUDES A PLURALITY OF SUPPLY CONDUITS FOR CONNECTION WITH THE CONTAINERS AND THE TRANSMISSION OF GAS INTO THE CONTAINERS. AN EXHAUST MANIFOLD IS SIMILARLY CARRIED BY THE SUPPORT STRUCTURE AND CONNECTED WITH THE CONTAINER FOR REMOVAL OF THE GAS AND THE PLASMA FROM THE CONTAINER.

4. 发明授权

US3879597A Plasma etching device and process 失效
标题翻译：等离子体蚀刻装置及工艺
公开(公告)号：US3879597A
公开(公告)日：1975-04-22
申请号：US49810074
申请日：1974-08-16
申请人： INT PLASMA CORP
发明人： BERSIN RICHARD L , SINGLETON MICHAEL J
IPC分类号： H01L21/302 , H01J37/32 , H01J65/04 , H01L21/3065 , H05H1/46 , B23K9/00
CPC分类号： H01J37/32009 , H01J65/044 , H05H1/46 , Y10S422/906
摘要： There is disclosed a device for plasma etching which includes a quartz cylinder surrounded by a coil of electrodes connected to a source of radio frequency energy, and having within it a concentric cylinder or perforated aluminum or other electrically conductive metal.
摘要翻译：公开了一种用于等离子体蚀刻的装置，其包括被连接到射频能量源的电极线圈围绕的石英圆柱体，并且在其内部具有同心圆筒或穿孔铝或其它导电金属。

5. 发明授权

US3671195A Method and apparatus for ashing organic substance 失效
标题翻译：用于有机物质的方法和装置
公开(公告)号：US3671195A
公开(公告)日：1972-06-20
申请号：US3671195D
申请日：1968-08-19
申请人： INT PLASMA CORP
发明人： BERSIN RICHARD L
IPC分类号： G01N31/12 , G01M1/00 , H05H1/16
CPC分类号： G01N31/12
摘要： A SUPPORT STRUCTURE FOR A SPECIMEN TO BE TREATED IN THE CHAMBER OF A PLASMA MACHINE WHEREIN EXCITED GAS FLOWS THROUGH THE CHAMBER FOR REACTION WITH THE SPECIMEN, SUCH STRUCTURE BEING FABRICATED OF A FIBROUS MATERIAL SHAPED TO BE SUPPORTED INSIDE THE REACTION CHAMBER AND TO CARRY THE SPECIMEN, THE MATERIAL ITSELF BEING A SUBSTANCE WHICH IS INERT TO THE EXCITED GAS YET PERMEABLE THERETO, WHEREBY THE EXCITED GAS FLOWS THROUGH AS WELL AS AROUND THE SUPPORT STRUCTURE AND THUS INTO SUBSTANTIAL CONTACT WITH THE SURFACES OF THE SPECIMEN TO BE TREATED.

6. 发明授权

US3647676A Method and apparatus for reacting ionized gas with a non-gaseous substance 失效
标题翻译：用非反应性物质反应离子化气体的方法和装置
公开(公告)号：US3647676A
公开(公告)日：1972-03-07
申请号：US3647676D
申请日：1968-08-19
申请人： INT PLASMA CORP
发明人： BERSIN RICHARD L
IPC分类号： B01J12/00 , H01J37/32 , H05H1/46 , B01K1/00
CPC分类号： H01J37/32082 , B01J12/002 , H01J2237/338 , H05H1/46 , Y10S422/906
摘要： A METHOD FOR IONIZING GAS AND REACTING IT WITH A NONGASEOUS SUBSTANCE IN WHICH THE GAS IS IONIZED BY AN ELECTRICAL RADIO FREQUENCY (RF) FIELD GENERATED IN THE SPACE SURROUNDING THE SUBSTANCE. THE APPARATUS COMPRISES A CONTAINER DEFINING A REACTION CHAMBER AND A PAIR OF ELECTRODES COUPLED WITH AN RF GENERATOR AND PLACED CLOSELY ADJACENT AN EXTERIOR SURFACE OF THE CONTAINER. THE CONTAINER INCLUDES AN INTAKE CONDUIT AND AN EXHAUST CONDUIT WHICH IS PREFERABLY DIAMMETRICALLY OPPOSITE THE FORMER. AN ACCESS OPENING TO THE CHAMBER IS CLOSED AND SEALED FROM THE EXTERIOR OF THE CONTAINER BY A COVER BIASED TOWARD THE PORTION OF THE CONTAINER DEFINING THE OPENING.

7. 发明授权

US3923568A Dry plasma process for etching noble metal 失效
标题翻译：用于蚀刻贵金属的干等离子体工艺
公开(公告)号：US3923568A
公开(公告)日：1975-12-02
申请号：US43295374
申请日：1974-01-14
申请人： INT PLASMA CORP
发明人： BERSIN RICHARD L
IPC分类号： C23F4/00 , H01L21/3213 , H01L21/48 , H01L21/70 , C23F1/00
CPC分类号： H01L21/32136 , C23F4/00 , H01L21/4846 , H01L21/707
摘要： There is disclosed a process for etching noble metals, particularly for removing selected areas of thin films of electrically conductive noble metals, by contacting exposed areas of noble metal with a plasma that must include both fluorine and chlorine and may, optionally, also contain oxygen.
摘要翻译：公开了通过使贵金属的暴露区域与必须包含氟和氯的等离子体接触并且可以任选地还含有氧气来蚀刻贵金属，特别是用于去除导电贵金属薄膜的选定区域的方法。

8. 发明授权

US3648191A Radiofrequency generator circuits and components therefor 失效
标题翻译：无线电发生器电路及其组件
公开(公告)号：US3648191A
公开(公告)日：1972-03-07
申请号：US3648191D
申请日：1968-08-19
申请人： INT PLASMA CORP
发明人： BEAUDRY HARVEY JAMES
IPC分类号： H03H2/00 , H05B6/04 , H03F1/00
CPC分类号： H05B6/04
摘要： R.F. generator circuits and components therefor including an output circuit for matching the output of the power tube to a transmission line which enables the tube to be operated at power levels below that at which the output circuit is tuned while preventing destructively high plate currents from being established under such conditions by the proper selection of capacitive and inductive components to provide current-limiting resistance in the plate circuit during detuned operation; a large air capacitor in the output circuit of the power tube having metal plates which physically shape the discharge caused by instantaneously high voltages to which the output circuit may be subjected whereby corona emissions are prevented from creating large flames which can be extremely damaging to the equipment; and a power tube grid circuit which matches, in a most unique way, a driving oscillator circuit to the grid and which provides a neutralizing circuit to eliminate the adverse effects of distributive capacitants wherein the neutralizing portion of the circuit eliminates the dangerous condition of having the plate voltage separated from the grid by only a neutralizing capacitor.
摘要翻译： R.F. 发电机电路及其组件包括用于将功率管的输出与传输线匹配的输出电路，其使得管能够在低于输出电路被调谐的功率水平下工作，同时防止在下面建立破坏性高的板电流这种条件通过适当地选择电容和电感元件以在失谐操作期间在板电路中提供限流电阻; 具有金属板的功率管的输出电路中的大型空气电容器，其物理地形成由输出电路可能经受的瞬时高电压引起的放电，从而防止电晕放电产生可能对设备极其有害的大的火焰 ; 以及以最独特的方式将驱动振荡器电路匹配到电网并且提供中和电路以消除分布电容器的不利影响的功率管栅极电路，其中电路的中和部分消除了具有平板电压仅通过中和电容与电网分离。

9. 发明授权

US3616405A Continuous sputtering system 失效
标题翻译：连续喷射系统
公开(公告)号：US3616405A
公开(公告)日：1971-10-26
申请号：US3616405D
申请日：1969-10-03
申请人： INT PLASMA CORP
发明人： BEAUDRY HARVEY JAMES
IPC分类号： H01J37/34 , C23C15/00
CPC分类号： H01J37/34
摘要： In a system for depositing thin films of material on a workpiece by a technique known as radiofrequency sputtering, an electrical transformation bridge comprised of inductive and capacitive components is electrically interfaced between an unbalanced output of a radiofrequency generator and the excitation electrodes of a sputtering chamber for converting the generator output signal into opposing phase radiofrequency voltage components employed in preferred continuous sputtering systems and for precisely matching the impedance output of the generator with the impedance of the excitation electrodes while the latter are under the influence of a plasma of charged deposition particles.

10. 发明授权

US3569777A Impedance matching network for plasma-generating apparatus 失效
标题翻译：用于等离子体发生装置的阻抗匹配网络
公开(公告)号：US3569777A
公开(公告)日：1971-03-09
申请号：US3569777D
申请日：1969-07-28
申请人： INT PLASMA CORP
发明人： BEAUDRY HARVEY JAMES
IPC分类号： H05B41/30 , H05H1/30 , H01J7/24 , H01J11/00
CPC分类号： H05H1/30 , H05B41/30
摘要： A passive impedance-matching network specifically designed to provide an interface between a fixed radio frequency power output of a generator and the capacitive electrodes of the gaseous plasma chamber of a plasma-generating apparatus, the network having the particular characteristic of providing a close impedance match over a relatively wide changing impedance range of the plasma in accordance with a known program.

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