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    • 10. 发明授权
    • Bipolar transistor having self-adjusted emitter contact
    • 具有自调节发射极接触的双极晶体管
    • US08933537B2
    • 2015-01-13
    • US12998869
    • 2009-12-03
    • Alexander FoxBernd HeinemannSteffen Marschmeyer
    • Alexander FoxBernd HeinemannSteffen Marschmeyer
    • H01L27/102H01L29/66H01L29/08H01L29/10H01L29/161H01L29/732H01L29/737
    • H01L29/66242H01L21/8222H01L21/8249H01L29/0804H01L29/0817H01L29/0821H01L29/1004H01L29/161H01L29/66272H01L29/7322H01L29/7371
    • A semiconductor device, comprising a substrate layer made of a semiconductor material of a first conductivity type and having a first insulation region, and a vertical bipolar transistor having a first vertical portion of a collector made of monocrystalline semiconductor material of a second conductivity type and disposed in an opening of the first insulation region, a second insulation region lying partly on the first vertical portion of the collector and partly on the first insulation region and having an opening in the region of the collector, in which opening a second vertical portion of the collector made of monocrystalline material is disposed, said portion including an inner region of the second conductivity type, a base made of monocrystalline semiconductor material of the first conductivity type, a base connection region surrounding the base in the lateral direction, a T-shaped emitter made of semiconductor material of the second conductivity type and overlapping the base connection region, wherein the base connection region, aside from a seeding layer adjacent the substrate or a metallization layer adjacent a base contact, consists of a semiconductor material which differs in its chemical composition from the semiconductor material of the collector, the base and the emitter and in which the majority charge carriers of the first conductivity type have greater mobility compared thereto.
    • 一种半导体器件,包括由第一导电类型的半导体材料制成并具有第一绝缘区域的衬底层和垂直双极晶体管,其具有由第二导电类型的单晶半导体材料制成的集电体的第一垂直部分,并且被布置 在第一绝缘区域的开口中,第二绝缘区域部分地位于集电器的第一垂直部分上并且部分地位于第一绝缘区域上并且在集电器的区域中具有开口,其中开口的第二垂直部分 设置由单晶材料构成的集电体,所述部分包括第二导电类型的内部区域,由第一导电类型的单晶半导体材料制成的基底,在横向方向上围绕基底的基极连接区域,T形发射极 由第二导电类型的半导体材料制成并与基底连接重叠 其中基底连接区域除了与基底相邻的晶种层或邻近基极接触处的金属化层组成,其半导体材料的化学成分不同于集电极,基极和发射极的半导体材料 并且其中第一导电类型的多数电荷载流子具有比其更大的迁移率。