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1. 发明授权

US4322661A Cross-field plasma mode electric conduction control device 失效
标题翻译：跨场等离子模式导电控制装置
公开(公告)号：US4322661A
公开(公告)日：1982-03-30
申请号：US106622
申请日：1979-12-26
申请人： Robin J. Harvey
发明人： Robin J. Harvey
IPC分类号： H01J27/04 , G05F1/02 , G05F1/10 , G05F1/325 , G05F3/12 , H01J17/00 , H01J17/14 , H01J17/38 , H01J1/50
CPC分类号： H01J17/14
摘要： Crossed-field plasma mode electric conduction control device 10 has an interelectrode space 16 between anode 12 and cathode 14 in which is produced a magnetic field 38 by coil 28. Electrons produced at region 46 travel through the crossed-fields to region 48, with cascading ionization to produce an electrically conductive plasma. The electrons are lost at region 48 and plasma density is controlled by magnetic field strength to control magnitude of interelectrode current.
摘要翻译：交叉场等离子体模式导电控制装置10在阳极12和阴极14之间具有电极间空间16，其中线圈28产生磁场38.区域46处产生的电子穿过交叉场到达区域48，电离以产生导电等离子体。电子在区域48处损失，等离子体密度由磁场强度控制以控制电极间电流的大小。

2. 发明授权

US5239366A Compact laser probe for profilometry 失效
标题翻译：精简激光探头
公开(公告)号：US5239366A
公开(公告)日：1993-08-24
申请号：US834758
申请日：1992-02-12
申请人： David H. Kittell , Guy H. Hayes , Peter J. DeGroot
发明人： David H. Kittell , Guy H. Hayes , Peter J. DeGroot
IPC分类号： G01B11/24 , G01B5/00 , G01B9/02
CPC分类号： G01B5/0014
摘要： Optical metrology apparatus, specifically a laser probe (1), includes a frame (10) comprised of a material selected to have a predetermined coefficient of thermal expansion. A beamsplitter (36) is coupled to the frame for generating a sample beam optical path (D) and a reference beam optical path (C). The beamsplitter is optically coupled to an optical fiber (12) that delivers radiation to and conveys radiation from the frame. A piezoelectric stack (48) has an excitation signal coupled thereto and includes a mirror (26) for phase modulating the reference beam optical path length in response to the excitation signal. The laser probe includes a first strain gauge (58) that is coupled to the piezoelectric stack and a second strain gauge (60) that is coupled to the frame. A closed loop control system (A1, A2, A3, A4, VR) varies the excitation signal in accordance with the detected strains so as to maintain the reference beam optical path length in a predetermined relationship to a path length of the sample beam optical path. This athermalizes the probe, in that any expansion or contraction of the frame is matched by the piezoelectric stack, yielding a net zero change in the non-common beam path lengths. The apparatus includes an optical fiber support (14) that is rotatably coupled to the frame for positioning the optical fiber at a desired angular position.

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