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    • 8. 发明授权
    • Gas-cluster-jet generator and gas-cluster ion-beam apparatus utilizing an improved gas-cluster-jet generator
    • 采用改进型气体簇射流发生器的气体簇射流发生器和气体簇离子束装置
    • US08217372B2
    • 2012-07-10
    • US12825504
    • 2010-06-29
    • Stanley Harrison
    • Stanley Harrison
    • H01J37/08H01J37/317G21K5/10
    • H01J37/08H01J37/301H01J2237/045H01J2237/0812H01J2237/083H01J2237/31
    • A gas-cluster-jet generator with improved vacuum management techniques and apparatus is disclosed. The gas-cluster-jet generator comprises a substantially conically shaped vacuum chamber for housing the nozzle and jet exit portions of the gas-cluster-jet generator. A skimmer may be located at the narrow end of the conical chamber and a close-coupled vacuum pump is located at the wide end of the conical chamber. Support members for the nozzle are high conductivity “spider” supports that provide support rigidity while minimizing gas flow obstruction for high pumping speed. The conically shaped vacuum chamber redirects un-clustered gas in a direction opposite the direction of the gas-cluster-jet for efficient evacuation of the un-clustered gas. The nozzle and a skimmer may have fixed precision relative alignment, or may optionally have a nozzle aiming adjustment feature for aligning the gas-cluster-jet with the skimmer and downstream beamline components. Also disclosed are various configurations of gas-cluster ion-beam processing tools employing the improved gas-cluster-jet generator.
    • 公开了一种具有改进的真空管理技术和设备的气体簇射流发生器。 气体簇喷射发生器包括用于容纳喷气发生器的喷嘴和喷射出口部分的大致锥形的真空室。 撇渣器可以位于锥形室的窄端,并且紧密联接的真空泵位于锥形室的宽端。 喷嘴的支撑构件是高导电性“蜘蛛”支撑,其提供支撑刚度,同时最大限度地减少气流阻塞以实现高泵送速度。 圆锥形真空室沿着与气体簇射流方向相反的方向重新定向未聚集的气体,以有效排出未聚集的气体。 喷嘴和撇渣器可以具有固定的精确度相对对准,或者可以可选地具有用于使气体簇射流与分离器和下游束线部件对准的喷嘴瞄准调整特征。 还公开了采用改进的气体 - 簇射流发生器的气体 - 团簇离子束加工工具的各种构造。