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1. 发明授权

US08398783B2 Workpiece de-chucking device of plasma reactor for dry-cleaning inside of reaction chamber and electrostatic chuck during workpiece de-chucking, and workpiece de-chucking method using the same 有权
标题翻译：用于在工件脱夹中的反应室和静电吸盘内部进行干洗的等离子体反应器的工件脱夹装置，以及使用其的工件脱扣方法
公开(公告)号：US08398783B2
公开(公告)日：2013-03-19
申请号：US12854545
申请日：2010-08-11
申请人： Byoungil Lee , Hyeokjin Jang , Sungyong Ko , Minshik Kim
发明人： Byoungil Lee , Hyeokjin Jang , Sungyong Ko , Minshik Kim
IPC分类号： B08B3/00
CPC分类号： H01L21/6831 , H01J37/321 , H01L21/68742
摘要： A workpiece de-chucking device of a plasma reactor for dry-cleaning the inside of a reaction chamber and an ElectroStatic chuck (ESC) during workpiece de-chucking and a workpiece de-chucking method using the same are provided. The workpiece de-chucking device includes a lifting unit, an ICP source power unit, and a controller. The lifting unit lifts a workpiece mounted on a top surface of an ESC. The ICP source power unit forms a magnetic field in an inductive coil arranged outside a dielectric window. The controller outputs a source power control signal, a lift control signal, and a de-chucking control signal.
摘要翻译：提供了一种用于在工件去夹紧期间干燥清洁反应室内部和静电卡盘（ESC）的等离子体反应器的工件脱扣装置和使用其的工件脱扣方法。工件脱扣装置包括提升单元，ICP源功率单元和控制器。提升单元提升安装在ESC顶部表面上的工件。 ICP源功率单元在布置在电介质窗外部的感应线圈中形成磁场。控制器输出源功率控制信号，升降控制信号和去夹紧控制信号。

2. 发明授权

US07669788B2 Fluid injector for treating surface of flat display panel 有权
标题翻译：用于处理平面显示面板表面的流体注射器
公开(公告)号：US07669788B2
公开(公告)日：2010-03-02
申请号：US10864994
申请日：2004-06-10
申请人： Yong-Seok Park , Kyoung-Heon Heo , Seung-Won Lee
发明人： Yong-Seok Park , Kyoung-Heon Heo , Seung-Won Lee
IPC分类号： B05B1/26
CPC分类号： B05C5/0254 , B05B13/0207
摘要： A fluid injector for treating a surface of a flat display panel includes a case provided with a cavity for receiving fluid; a pair of nozzle guiders coupled to the case and disposed facing each other; a gap-adjusting plate disposed between the nozzle guiders to adjust a gap between the nozzle guiders; and a coupling device for coupling the nozzle guiders to the gap-adjusting plate.
摘要翻译：用于处理平面显示面板的表面的流体注入器包括设置有用于接收流体的空腔的壳体; 一对连接到壳体并相对设置的喷嘴引导器; 设置在所述喷嘴引导件之间的间隙调节板，以调节所述喷嘴引导件之间的间隙; 以及用于将喷嘴引导件联接到间隙调节板的联接装置。

3. 发明授权

US07594842B2 Cassette assembly for manufacturing fluorescent lamps 失效
标题翻译：用于制造荧光灯的盒式组件
公开(公告)号：US07594842B2
公开(公告)日：2009-09-29
申请号：US11466210
申请日：2006-08-22
申请人： Young-Chul Lee , Dong-Gil Kim , Sung-Jung Kim
发明人： Young-Chul Lee , Dong-Gil Kim , Sung-Jung Kim
IPC分类号： H01J9/46 , H01J9/38
CPC分类号： H01J9/38 , H01J9/247
摘要： A cassette assembly and a method of manufacturing fluorescent lamps using the cassette assembly are provided. The cassette assembly includes a housing defining a process chamber and having a plurality of holes in which glass tubes for the fluorescent lamps are inserted to communicate with the chamber, a carrying unit including two or more porous plates through which the glass tubes are fitted, a plurality of ring members disposed on the porous plates to preliminarily fix the glass tubes to the carrying unit by allowing the outer circumferences of the glass tubes to contact, and a locking unit for changing the glass tubes from the preliminary fixing status to a lockup status by varying contact pressure applied between the ring members and the glass tubes.
摘要翻译：提供一种盒组件和使用盒组件制造荧光灯的方法。盒组件包括限定处理室并具有多个孔的壳体，其中荧光灯的玻璃管被插入以与腔室连通;承载单元，包括两个或多个多孔板，玻璃管通过该多孔板安装，多个环形构件设置在多孔板上，以通过允许玻璃管的外周接触来预先将玻璃管固定到承载单元;以及锁定单元，用于将玻璃管从预备固定状态改变为锁定状态在环件和玻璃管之间施加不同的接触压力。

4. 发明授权

US07455733B2 Fluorescent material coating apparatus and method of coating fluorescent substance using the same 失效
标题翻译：荧光材料涂布装置及使用其的荧光物质的涂布方法
公开(公告)号：US07455733B2
公开(公告)日：2008-11-25
申请号：US11363352
申请日：2006-02-27
申请人： Young-Chul Lee , Dong-Gil Kim , Sung-Jung Kim , Jeon-Gu Kim , Hong-Lae Cho
发明人： Young-Chul Lee , Dong-Gil Kim , Sung-Jung Kim , Jeon-Gu Kim , Hong-Lae Cho
IPC分类号： B05C3/00 , B05D5/06
CPC分类号： B05D7/22 , B05D3/0254 , B05D2254/04
摘要： There is provided a fluorescent material coating apparatus for a fluorescent lamp. The fluorescent material coating apparatus includes a cassette on which a plurality of glass tubes are detachably mounted, a delivery member having a delivery chamber communicating with first ends of the glass tubes, a negative pressure generating unit for allowing fluorescent solution to be drawn into the glass tubes by generating a negative pressure in the glass tubes communicating with the delivery chamber by lowering the pressure of the delivery chamber, a dry air supplying unit for supplying dry air to the delivery chamber to dry the fluorescent solution applied on inner surfaces of the glass tubes, a solution tank containing the fluorescent solution and disposed below the glass tubes mounted on the cassette, and a moving unit for allowing lower end portions of the glass tubes mounted in the delivery chamber to be dipped into the fluorescent solution contained in the solution tank.
摘要翻译：提供了一种用于荧光灯的荧光材料涂覆装置。荧光材料涂布装置包括：多个玻璃管可拆卸地安装在其上的盒，具有与玻璃管的第一端连通的输送室的输送构件，用于使荧光溶液被吸入玻璃的负压产生单元通过降低输送室的压力而在与输送室连通的玻璃管中产生负压的管;干空气供给单元，用于向输送室供给干燥空气以干燥施加在玻璃管的内表面上的荧光溶液包含荧光溶液并设置在安装在盒上的玻璃管下方的溶液罐，以及用于使安装在输送室中的玻璃管的下端部浸入溶液罐中所含荧光溶液的移动单元。

5. 发明申请

US20070090763A1 Method for fabricating electrode of external electrode fluorescent lamp and external electrode fluorescent lamp having electrode fabricated by the method 失效
标题翻译：用于制造外部电极荧光灯的电极的方法和具有通过该方法制造的电极的外部电极荧光灯
公开(公告)号：US20070090763A1
公开(公告)日：2007-04-26
申请号：US11584918
申请日：2006-10-20
申请人： Dong-Gil Kim , Young-Chul Lee , Sung-Jung Kim , Sung-Hae Kim
发明人： Dong-Gil Kim , Young-Chul Lee , Sung-Jung Kim , Sung-Hae Kim
IPC分类号： H01J9/00 , H01J65/00 , H01J11/00
CPC分类号： H01J65/00 , H01J9/02 , H01J61/06
摘要： A method of fabricating an electrode of an external electrode fluorescent lamp (EEFL) includes plating nickel on both ends of a glass tube through an electroless nickel plating process and forming electrodes by dipping the glass tube into an electrode material including zinc, and tin or lead.
摘要翻译：一种制造外部电极荧光灯（EEFL）的电极的方法包括通过无电镀镍工艺在玻璃管的两端镀镍，并通过将玻璃管浸入包含锌的电极材料中形成电极，并且将锡或铅。

6. 发明授权

US07206061B2 Mask supporting apparatus using vacuum and light exposing system, and method using the same 有权
标题翻译：使用真空和曝光系统的面罩支撑装置及其使用方法
公开(公告)号：US07206061B2
公开(公告)日：2007-04-17
申请号：US10967367
申请日：2004-10-18
申请人： Chang-Won Lee , Yong-Hui Bae
发明人： Chang-Won Lee , Yong-Hui Bae
IPC分类号： G03B27/62 , G03B27/58
CPC分类号： G03B27/62
摘要： A mask supporting apparatus includes an absorption glass provided with at least one vacuum hole, a mask provided with a predetermined pattern and attached on a bottom surface of the absorption glass, and an absorption pad disposed between the absorption glass and the mask to define a space between the absorption glass and the mask. Air in the space is exhausted through the vacuum hole to securely fix the mask on the absorption glass.
摘要翻译：掩模支撑装置包括设置有至少一个真空孔的吸收玻璃，设置有预定图案并附着在吸收玻璃的底表面上的掩模，以及设置在吸收玻璃和掩模之间以限定空间的吸收垫在吸收玻璃和面罩之间。空间中的空气通过真空孔排出，以将面罩牢固地固定在吸收玻璃上。

7. 发明申请

US20060198947A1 Fluorescent material coating apparatus and method of coating fluorescent substance using the same 失效
标题翻译：荧光材料涂布装置及使用其的荧光物质的涂布方法
公开(公告)号：US20060198947A1
公开(公告)日：2006-09-07
申请号：US11363352
申请日：2006-02-27
申请人： Young-Chul Lee , Dong-Gil Kim , Sung-Jung Kim , Jeon-Gu Kim , Hong-Lae Cho
发明人： Young-Chul Lee , Dong-Gil Kim , Sung-Jung Kim , Jeon-Gu Kim , Hong-Lae Cho
IPC分类号： B05D5/06 , B05D5/12
CPC分类号： B05D7/22 , B05D3/0254 , B05D2254/04
摘要： There is provided a fluorescent material coating apparatus for a fluorescent lamp. The fluorescent material coating apparatus includes a cassette on which a plurality of glass tubes are detachably mounted, a delivery member having a delivery chamber communicating with first ends of the glass tubes, a negative pressure generating unit for allowing fluorescent solution to be drawn into the glass tubes by generating a negative pressure in the glass tubes communicating with the delivery chamber by lowering the pressure of the delivery chamber, a dry air supplying unit for supplying dry air to the delivery chamber to dry the fluorescent solution applied on inner surfaces of the glass tubes, a solution tank containing the fluorescent solution and disposed below the glass tubes mounted on the cassette, and a moving unit for allowing lower end portions of the glass tubes mounted in the delivery chamber to be dipped into the fluorescent solution contained in the solution tank.
摘要翻译：提供了一种用于荧光灯的荧光材料涂覆装置。荧光材料涂布装置包括：多个玻璃管可拆卸地安装在其上的盒，具有与玻璃管的第一端连通的输送室的输送构件，用于使荧光溶液被吸入玻璃的负压产生单元通过降低输送室的压力而在与输送室连通的玻璃管中产生负压的管;干空气供给单元，用于向输送室供给干燥空气以干燥施加在玻璃管的内表面上的荧光溶液包含荧光溶液并设置在安装在盒上的玻璃管下方的溶液罐，以及用于使安装在输送室中的玻璃管的下端部浸入溶液罐中所含荧光溶液的移动单元。

8. 发明授权

US10919007B2 Organic material purification composition and method of purifying organic materials using the same 有权
公开(公告)号：US10919007B2
公开(公告)日：2021-02-16
申请号：US16144302
申请日：2018-09-27
申请人： SAMSUNG DISPLAY CO., LTD. , DMS CO., LTD.
发明人： Myung-ki Lee , Hyunsoo Moon , Jongwon Lee , Sunwoo Kang , Yongseok Park
IPC分类号： B01D11/04 , A61K39/02 , F01N3/20 , G05B1/00 , B01F3/22 , C07D403/04 , H01L51/00 , C07D401/14 , B01F3/12 , H01G9/20
摘要： An organic material purification composition, a mixed composition, and a method of purifying an organic material, the organic material purification composition including an ionic liquid in which a cation and an anion are combined; and an organic solvent, wherein the organic solvent includes an alcohol or a ketone.

9. 发明申请

US20130019909A1 APPARATUS FOR TREATING SUBSTRATE 有权
标题翻译：用于处理基板的装置
公开(公告)号：US20130019909A1
公开(公告)日：2013-01-24
申请号：US13554231
申请日：2012-07-20
申请人： Ho youn PARK
发明人： Ho youn PARK
IPC分类号： B08B13/00 , B08B15/00 , B08B3/04
CPC分类号： H01L21/67057 , H01L21/67086 , H01L21/67706
摘要： Embodiments of the present invention relates to an apparatus for treating a substrate, more particularly, to an apparatus for treating a substrate that is able to perform treating with respect to a predetermined surface of a substrate and to reduce usage of solution for the surface treating of the substrate. The present invention provides an apparatus for treating a substrate includes a plurality of transfer rollers configured to transfer a substrate and simultaneously to be rotated to wet a back surface of the substrate; a plurality of chemical solution supply tanks configured to receive the chemical solution therein, the plurality of the chemical solution supply tanks arranged under the plurality of the transfer rollers, respectively, with being spaced apart a predetermined distance from each other; a main tank configured to surround the plurality of the chemical solution supply tanks; and an exhaustion unit configured to suck and exhaust fume generated in the process of wetting the back surface with the chemical solution and liquid drops of the chemical solution.
摘要翻译：本发明的实施例涉及一种用于处理基板的装置，更具体地，涉及一种用于处理基板的设备，该设备能够相对于基板的预定表面进行处理并且减少用于表面处理的溶液的使用底物。本发明提供了一种用于处理基板的设备，包括多个转印辊，所述多个转印辊被配置为转印基板并同时旋转以润湿所述基板的后表面; 配置成在其中容纳化学溶液的多个化学溶液供给槽，分别设置在多个转印辊下方的多个化学溶液供给槽，彼此隔开预定的距离; 构造成围绕所述多个所述化学溶液供给罐的主罐; 以及耗尽单元，其被配置为吸收和排出在化学溶液的化学溶液和液滴下润湿背面的过程中产生的烟雾。

10. 发明申请

US20120041584A1 ENDPOINT DETECTION DEVICE FOR REALIZING REAL-TIME CONTROL OF PLASMA REACTOR, PLASMA REACTOR WITH ENDPOINT DETECTION DEVICE, AND ENDPOINT DETECTION METHOD 有权
标题翻译：用于实现等离子体反应器的实时控制的端点检测装置，具有端点检测装置的等离子体反应器和端点检测方法
公开(公告)号：US20120041584A1
公开(公告)日：2012-02-16
申请号：US13279936
申请日：2011-10-24
申请人： Kun Joo PARK , Kwang Hoon HAN , Kee Hyun KIM , Weon Mook LEE , Kyounghoon HAN , Heeyeop CHAE
发明人： Kun Joo PARK , Kwang Hoon HAN , Kee Hyun KIM , Weon Mook LEE , Kyounghoon HAN , Heeyeop CHAE
IPC分类号： G06F19/00
CPC分类号： H01J37/32963 , G01N21/71 , H01J37/32935 , H01L21/67069 , H01L21/67253
摘要： An endpoint detection device, a plasma reactor with the endpoint detection device, and an endpoint detection method are provided. The endpoint detection device includes an OES data operation unit, a data selector, a product generator, an SVM, and an endpoint determiner. The OES data operation unit processes reference OES data by normalization and PCA. The data selector selects part of the linear reference loading vectors and selects part of the selected linear reference loading vectors. The product generator outputs at least one reference product value. The SVM performs regression and outputs a prediction product value. The endpoint determiner detects a process wafer etch or deposition endpoint and outputs a detection signal.
摘要翻译：提供端点检测装置，具有端点检测装置的等离子体反应器和端点检测方法。端点检测装置包括OES数据操作单元，数据选择器，产品生成器，SVM和端点确定器。 OES数据操作单元通过归一化和PCA处理参考OES数据。数据选择器选择部分线性参考载入矢量并选择部分所选线性参考载入矢量。产品发生器输出至少一个参考产品值。 SVM执行回归并输出预测乘积值。端点确定器检测处理晶片蚀刻或沉积端点并输出检测信号。

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