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1. 发明授权

US07772552B2 Methods and devices for atom probe mass resolution enhancement 有权
标题翻译：原子探针质量分辨率增强的方法和装置
公开(公告)号：US07772552B2
公开(公告)日：2010-08-10
申请号：US11629414
申请日：2005-06-17
申请人： Tye Gribb , Jesse D. Olson , Daniel Lenz , Joseph H. Bunton
发明人： Tye Gribb , Jesse D. Olson , Daniel Lenz , Joseph H. Bunton
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： H01J49/168
摘要： In an atom probe or other mass spectrometer wherein a specimen is subjected to ionizing pulses (voltage pulses, thermal pulses, etc.) which induce field evaporation of ions from the specimen, the evaporated ions are then subjected to corrective pulses which are synchronized with the ionizing pulses. These corrective pulses have a magnitude and timing sufficient to reduce the velocity distribution of the evaporated ions, thereby resulting in increased mass resolution for the atom probe/mass spectrometer. In a preferred arrangement, ionizing pulses are supplied to the specimen from a first counter electrode adjacent the specimen. The corrective pulses are then supplied from a second counter electrode which is coupled to the first via a passive or active network, with the network controlling the form (timing, amplitude, and shape) of the corrective pulses.
摘要翻译：在原子探针或其他质谱仪中，其中样品经受电离脉冲（电压脉冲，热脉冲等），其从样品中引起离子的场蒸发，然后对蒸发的离子进行校正脉冲，其与电离脉冲。这些校正脉冲具有足以降低蒸发离子的速度分布的量值和时间，从而导致原子探针/质谱仪的质量分辨率提高。在优选的布置中，电离脉冲从邻近样品的第一对置电极提供给样品。然后，校正脉冲从第二对电极提供，第二对电极通过无源或有源网络耦合到第一对准电极，网络控制校正脉冲的形式（定时，幅度和形状）。

2. 发明授权

US11340256B2 Energy beam input to atom probe specimens from multiple angles 有权
公开(公告)号：US11340256B2
公开(公告)日：2022-05-24
申请号：US16319620
申请日：2018-01-31
申请人： CAMECA INSTRUMENTS INC.
发明人： Joseph Hale Bunton , Daniel Robert Lenz , Dana Jeffrey Shepard
IPC分类号： H01J37/285 , G01Q60/30 , G01N27/626 , G01N27/66 , G01Q60/38
摘要： An atom probe directs two or more pulsed laser beams onto a specimen, with each laser beam being on a different side of the specimen, and with each laser beam supplying pulses at a time different from the other laser beams. The laser beams are preferably generated by splitting a single beam provided by a laser source. The laser beams are preferably successively aligned incident with the specimen by one or more beam steering mirrors, which may also scan each laser beam over the specimen to achieve a desired degree of specimen ionization.

3. 发明申请

US20210333306A1 ENERGY BEAM INPUT TO ATOM PROBE SPECIMENS FROM MULTIPLE ANGLES 有权
公开(公告)号：US20210333306A1
公开(公告)日：2021-10-28
申请号：US16319620
申请日：2018-01-31
申请人： CAMECA INSTRUMENTS INC.
发明人： Joseph Hale Bunton , Daniel Robert LENZ , Dana Jeffrey SHEPARD
IPC分类号： G01Q60/30 , G01Q60/38 , G01N27/66
摘要： An atom probe directs two or more pulsed laser beams onto a specimen, with each laser beam being on a different side of the specimen, and with each laser beam supplying pulses at a time different from the other laser beams. The laser beams are preferably generated by splitting a single beam provided by a laser source. The laser beams are preferably successively aligned incident with the specimen by one or more beam steering mirrors, which may also scan each laser beam over the specimen to achieve a desired degree of specimen ionization.

4. 发明授权

US08153968B2 Laser atom probe methods 有权
标题翻译：激光原子探针方法
公开(公告)号：US08153968B2
公开(公告)日：2012-04-10
申请号：US12692394
申请日：2010-01-22
申请人： Joseph Hale Bunton , Jesse D. Olson , Daniel R. Lenz
发明人： Joseph Hale Bunton , Jesse D. Olson , Daniel R. Lenz
IPC分类号： G01N23/04 , H01J27/24
CPC分类号： H01J37/3045 , G01N23/22
摘要： A laser atom probe situates a counter electrode between a specimen mount and a detector, and provides a laser having its beam aligned to illuminate the specimen through the aperture of the counter electrode. The detector, specimen mount, and/or the counter electrode may be charged to some boost voltage and then be pulsed to bring the specimen to ionization. The timing of the laser pulses may be used to determine ion departure and arrival times allowing determination of the mass-to-charge ratios of the ions, thus their identities. Automated alignment methods are described wherein the laser is automatically directed to areas of interest.
摘要翻译：激光原子探针将对电极置于样品座和检测器之间，并提供其光束对准的激光器，以通过对电极的孔照射样品。检测器，样品安装座和/或对电极可以被充电到一些升压电压，然后被脉冲以使样本电离。激光脉冲的定时可用于确定离子离开和到达时间，从而确定离子的质荷比，因此确定它们的身份。描述了自动对准方法，其中激光被自动导向到感兴趣的区域。

5. 发明授权

US08575544B1 Methods and devices for improving atom probe detector performance 有权
标题翻译：提高原子探针探测器性能的方法和装置
公开(公告)号：US08575544B1
公开(公告)日：2013-11-05
申请号：US13053790
申请日：2011-03-22
申请人： Thomas F. Kelly , Daniel R. Lenz , Scott A. Wiener
发明人： Thomas F. Kelly , Daniel R. Lenz , Scott A. Wiener
IPC分类号： H01J49/40
CPC分类号： H01J49/025 , H01J37/244 , H01J37/285 , H01J2237/2446
摘要： An atom probe includes a detector which registers the time of flight of ions evaporated from a specimen, as well as the positions on the detector at which the ions impact and the kinetic energies of the ions. The detected position allows the original locations of the ions on the specimen to be mapped, and the times of flight and kinetic energies can be spectrally analyzed (e.g., binned into sets of like values) to determine the elemental identities of the ions. The use of kinetic energy data as well as time of flight data can allow more accurate identification of composition than where time of flight data are used alone, as in traditional atom probes.
摘要翻译：原子探针包括一个检测器，其记录从样品蒸发的离子的飞行时间，以及离子冲击的检测器上的位置和离子的动能。检测到的位置允许映射样品上的离子的原始位置，并且可以对飞行时间和动能进行频谱分析（例如，分组成相似值的集合），以确定离子的元素身份。使用动能数据以及飞行时间数据可以比单纯使用飞行时间数据更准确地识别组成，如同传统的原子探针一样。

6. 发明授权

US08134119B2 Reflectron 有权
标题翻译：反光镜
公开(公告)号：US08134119B2
公开(公告)日：2012-03-13
申请号：US12425291
申请日：2009-04-16
申请人： Peter Panayi
发明人： Peter Panayi
IPC分类号： H01J49/00
CPC分类号： H01J49/405
摘要： A reflectron (1) for deflecting an ion from a specimen in a time-of-flight mass spectrometer comprises a front electrode (2) and a back electrode (3). At least one of the front and back electrodes (2, 3) is capable of generating a curved electric field. The front and back electrodes are configured to perform time focusing and resolve an image of a specimen.
摘要翻译：用于在飞行时间质谱仪中从样品偏转离子的反射镜（1）包括前电极（2）和背电极（3）。前电极和后电极中的至少一个能够产生弯曲的电场。前电极和后电极被配置为执行时间聚焦并分辨样本的图像。

7. 发明授权

US10615001B2 Wide field-of-view atom probe 有权
公开(公告)号：US10615001B2
公开(公告)日：2020-04-07
申请号：US15566769
申请日：2015-04-21
申请人： CAMECA INSTRUMENTS, INC.
发明人： Joseph Hale Bunton , Michael Steven Van Dyke
IPC分类号： H01J37/285 , H01J49/16
CPC分类号： H01J37/285 , H01J49/164 , H01J49/16 , H01J2237/2626
摘要： In an atom probe having a specimen mount spaced from a detector, and preferably having a local electrode situated next to the specimen mount, a lens assembly is insertable between the specimen (and any local electrode) and detector. The lens assembly includes a decelerating electrode biased to decelerate ions from the specimen mount and an accelerating mesh biased to accelerate ions from the specimen mount. The decelerating electrode and accelerating mesh cooperate to divert the outermost ions from the specimen mount—which correspond to the peripheral areas of a specimen—so that they reach the detector, whereas they would ordinarily be lost. Because the detector now detects the outermost ions, the peripheral areas of the specimen are now imaged by the detector, providing the detector with a greatly increased field of view of the specimen, as much as 100 degrees (full angle) or more.

8. 发明授权

US10614995B2 Atom probe with vacuum differential 有权
公开(公告)号：US10614995B2
公开(公告)日：2020-04-07
申请号：US15634471
申请日：2017-06-27
申请人： CAMECA Instruments Inc.
发明人： Thomas F. Kelly , Mark Ronald Levesque
IPC分类号： H01J37/18 , H01J37/285 , H01J37/16
CPC分类号： H01J37/18 , H01J37/16 , H01J37/285 , H01J2237/188 , H01J2237/244 , H01J2237/2852
摘要： In an atom probe having a vacuum chamber containing a specimen mount and a detector for receiving ions emitted from the specimen, a high vacuum subchamber is provided about the specimen mount, with an aperture in the subchamber allowing passage of emitted ions to the detector. The high vacuum subchamber may be pumped to higher vacuum (lower pressure) than the vacuum chamber, and so long as the pressure in the vacuum chamber is below about 10−1 Pa, very little gas diffusion takes place through the aperture, allowing higher vacuum to be maintained in the subchamber despite the aperture opening to the chamber. The higher vacuum in the subchamber about the specimen assists in reducing noise in atom probe image data. The aperture may conveniently be provided by the aperture in a counter electrode, such as a local electrode, as commonly used in atom probes.

9. 发明授权

US08670608B2 3D atomic scale imaging methods 有权
标题翻译： 3D原子尺度成像方法
公开(公告)号：US08670608B2
公开(公告)日：2014-03-11
申请号：US13000098
申请日：2009-06-18
申请人： Thomas F. Kelly
发明人： Thomas F. Kelly
IPC分类号： G06K9/00 , G06K9/32
CPC分类号： H01J37/28 , B82Y15/00 , H01J2237/24495 , H01J2237/2611 , H01J2237/2802 , H01J2237/2813 , H01J2237/2818
摘要： The present invention is directed generally toward atom probe and TEM data and associated systems and methods. Other aspects of the invention are directed toward combining APT data and TEM data into a unified data set. Other aspects of the invention are directed toward using the data from one instrument to improve the quality of data obtained from another instrument.
摘要翻译：本发明通常涉及原子探针和TEM数据及相关系统和方法。本发明的其它方面旨在将APT数据和TEM数据组合成统一的数据集。本发明的其他方面涉及使用来自一个仪器的数据来提高从另一个仪器获得的数据的质量。

10. 发明授权

US08513597B2 Atom probe 有权
标题翻译：原子探针
公开(公告)号：US08513597B2
公开(公告)日：2013-08-20
申请号：US11917663
申请日：2006-06-16
申请人： Peter Panayi
发明人： Peter Panayi
IPC分类号： H01J49/00
CPC分类号： H01J37/05 , G01N2001/045 , H01J37/285 , H01J49/0004 , H01J49/405 , H01J2237/0535
摘要： Aspects of the present invention are directed generally toward atom probe and three-dimensional atom probe microscopes. For example, certain aspects of the invention are directed -toward an atom probe or a three-dimensional atom probe that includes a sub-nanosecond laser to evaporate ions from a specimen under analysis and a reflectron for reflecting the ions. In further aspects of the invention, the reflectron can include a front electrode and a back electrode. At least one of the front and back electrodes can be capable of generating a curved electric field. Additionally, the front electrode and back electrodes can be configured to perform time focusing and resolve an image of a specimen.
摘要翻译：本发明的方面通常涉及原子探针和三维原子探针显微镜。例如，本发明的某些方面涉及原子探针或三维原子探针，该原子探针或三维原子探针包括用于蒸发分析中的样品的离子的亚纳秒激光和用于反射离子的反射器。在本发明的其它方面中，反射器可以包括前电极和后电极。前电极和后电极中的至少一个能够产生弯曲的电场。此外，前电极和背电极可以被配置为执行时间聚焦并且解析样本的图像。

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