会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明申请
    • PASTE PRINTER AND METHOD OF PRINTING WITH PASTE
    • 浆料打印机和印刷方法
    • US20080145972A1
    • 2008-06-19
    • US11860889
    • 2007-09-25
    • Tetsuji ISHIKAWAMakoto HIRANO
    • Tetsuji ISHIKAWAMakoto HIRANO
    • H01L21/00
    • H05K3/1233H01L21/67017H01L21/6715H05K3/3484H05K3/3489H05K2203/0257H05K2203/0285H05K2203/082H05K2203/095
    • A paste printer allows an electrically-conductive pad formed on a board to be exposed in an opening of a masking member. A removal mechanism is allowed to act on the surface of the electrically-conductive pad within the opening. A rust film is removed from the surface of the electrically-conductive pad. The surface of the electrically-conductive pad gets cleaned. Since the electrically-conductive pad is exposed within the opening of the masking member, the removal mechanism is applied only to the electrically-conductive pad. This results in prevention of damages to the board over an area outside the electrically-conductive pad. In addition, the squeegee serves to supply the electrically-conductive paste to the surface of the electrically-conductive pad through the opening of the masking member. The electrically-conductive pad is covered with the electrically-conductive paste. This results in a reliable prevention of oxidation on the surface of the electrically-conductive pad.
    • 糊状打印机允许形成在板上的导电垫暴露在掩蔽构件的开口中。 允许去除机构作用在开口内的导电垫的表面上。 从导电垫的表面去除锈膜。 导电垫的表面被清洁。 由于导电垫在掩模构件的开口内露出,所以移除机构仅被施加到导电垫上。 这导致防止在导电焊盘外部的区域上对板的损坏。 此外,刮板用于通过掩蔽构件的开口将导电浆料供应到导电垫的表面。 导电焊盘用导电膏覆盖。 这导致可靠地防止导电焊盘表面上的氧化。
    • 3. 发明申请
    • SUBSTRATE PROCESSING APPARATUS, GAS NOZZLE AND METHOD OF PROCESSING SUBSTRATE
    • 基板加工装置,气体喷嘴及其加工方法
    • US20120076936A1
    • 2012-03-29
    • US13209515
    • 2011-08-15
    • Makoto HIRANO
    • Makoto HIRANO
    • C23C16/455C23C16/458
    • C23C16/45578C23C16/45563C23C16/4557
    • Provided are a substrate processing apparatus, a gas nozzle, and a method of processing a substrate, which is capable of improving heating efficiency of a gas without increasing a size of a reaction container. A gas supply nozzle 300 includes a first extension part 321, a third extension part 323, and a fifth extension part 325, which extend in a circumferential direction of wafers 200, and the first extension part 321, a second extension part 322, a fourth extension part 324, and a sixth extension part 326, which extend in a stacking direction of the wafers 200. The gas supply nozzle 300 may be disposed in a gap between an outer tube and an inner tube to save a space without increasing a size of a processing furnace as in the art. By increasing a gas circulation path of the gas supply nozzle 300, a gas in the gas supply nozzle 300 can be sufficiently heated due to radiant heat of each susceptor 218. As a result, the heating efficiency of the gas can be improved and thus, the occurrence of slip or haze on each of the wafers 200 can be suppressed.
    • 提供了能够提高气体的加热效率而不增加反应容器的尺寸的基板处理装置,气体喷嘴和处理基板的方法。 气体供给喷嘴300包括在晶片200的圆周方向上延伸的第一延伸部321,第三延伸部323和第五延伸部325,第一延伸部321,第二延伸部322,第四延伸部322 延伸部分324和第六延伸部分326,其沿晶片200的层叠方向延伸。气体供给喷嘴300可以设置在外管和内管之间的间隙中,以节省空间而不增加尺寸 本领域的加工炉。 通过增加气体供给喷嘴300的气体循环路径,气体供给喷嘴300中的气体可以由于每个基座218的辐射热而被充分地加热。结果,可以提高气体的加热效率,因此, 可以抑制每个晶片200上的滑动或雾度的发生。