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    • 7. 发明授权
    • Optical displacement measuring instrument
    • 光学位移测量仪
    • US08134718B2
    • 2012-03-13
    • US12481040
    • 2009-06-09
    • Yutaka Miki
    • Yutaka Miki
    • G01B11/14
    • G01B11/306
    • A first light detector and a second light detector, in each of which a plurality of light-receiving elements are arranged in an adjoining manner, are respectively provided anterior to an image-forming point of first reflected light and posterior to an image-forming point of second reflected light. A focal-point detecting circuit includes: maximum value selectors for selecting the maximum values from sums of light-receiving signals from adjoining light-receiving elements of the first light detector and the second light detector respectively; a total value operator for obtaining the total value of light-receiving signals from all the light-receiving elements of each of the first light detector and the second light detector; a light-detecting-signal operator for obtaining light-detecting signals by subtracting the maximum values from the total values; and an error-signal operational circuit for outputting a difference between the light-detecting signals to a servo circuit as a signal based on an amount of displacement between a focal point and a measuring face.
    • 第一光检测器和第二光检测器分别设置在第一反射光的图像形成点的前方和图像形成点的后方,每个第一光检测器和第二光检测器中的多个光接收元件以相邻的方式排列 的第二反射光。 焦点检测电路包括:最大值选择器,用于从第一光检测器和第二光检测器的相邻光接收元件的光接收信号的和中选择最大值; 用于获得来自第一光检测器和第二光检测器中的每一个的所有光接收元件的光接收信号的总值的总值操作器; 光检测信号操作器,用于通过从总值中减去最大值来获得光检测信号; 以及误差信号操作电路,用于基于在焦点和测量面之间的位移量,将光检测信号之间的差输出到伺服电路作为信号。