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1. 发明申请

US20080062427A1 EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD 失效
标题翻译：曝光装置和装置制造方法
公开(公告)号：US20080062427A1
公开(公告)日：2008-03-13
申请号：US11851029
申请日：2007-09-06
申请人： Yumiko Ohsaki , Yasuhiro Sawada , Kenji Yamazoe , Seiji Takeuchi
发明人： Yumiko Ohsaki , Yasuhiro Sawada , Kenji Yamazoe , Seiji Takeuchi
IPC分类号： G01B9/02
CPC分类号： G03F7/70566 , G02B27/0025 , G03F7/706
摘要： An exposure apparatus includes an interferometer which forms interference fringes including aberration information on projection optics using polarized light beams emitted from an illumination system, and a processor which calculates the optical characteristics of the projection optics on the basis of interference patterns sequentially formed by the interferometer using at least three different polarized light beams sequentially generated by a polarization controller. The optical characteristics include unpolarization aberration which does not depend on the polarization state of light entering the projection optics, and polarization aberration which depends on the polarization state of the light entering the projection optics.
摘要翻译：曝光装置包括：干涉仪，其形成干涉条纹，其包括使用从照明系统发射的偏振光束的投影光学器件上的像差信息;以及处理器，其基于由干涉仪依次形成的干涉图案来计算投影光学元件的光学特性，所述干涉图案使用由偏振控制器顺序产生的至少三个不同的偏振光束。光学特性包括不依赖于进入投影光学器件的光的偏振状态的非偏振像差，以及取决于进入投影光学器件的光的偏振状态的偏振像差。

2. 发明授权

US07675629B2 Exposure apparatus and device manufacturing method using a common path interferometer to form an interference pattern and a processor to calculate optical characteristics of projection optics using the interference pattern 失效
标题翻译：使用公共路径干涉仪形成干涉图案的曝光装置和装置制造方法以及使用干涉图案计算投影光学元件的光学特性的处理器
公开(公告)号：US07675629B2
公开(公告)日：2010-03-09
申请号：US11851029
申请日：2007-09-06
申请人： Yumiko Ohsaki , Yasuhiro Sawada , Kenji Yamazoe , Seiji Takeuchi
发明人： Yumiko Ohsaki , Yasuhiro Sawada , Kenji Yamazoe , Seiji Takeuchi
IPC分类号： G01B9/02
CPC分类号： G03F7/70566 , G02B27/0025 , G03F7/706
摘要： An exposure apparatus including an illumination system which illuminates an original, and projection optics which project a pattern of the original illuminated by the illumination system onto a substrate. The apparatus includes an interferometer which forms an interference pattern including aberration information on the projection optics using a polarized light beam emitted from the illumination system, in which the interferometer is a common path interferometer in which two light beams forming interference pattern pass along a path in the projection optics, and a processor which calculates optical characteristics of the projection optics on the basis of the interference pattern formed by the interferometer. The illumination system including a polarization controller which sequentially generates at least three difference polarized light beams with respective polarization states different from each other. The processor separates first aberration and second aberration from wavefront aberration represented by the interference patterns sequentially formed by the interferometer using the at least three different polarized light beams, by calculating a data of the interference patterns, the first aberration being aberration which does not change dependent on a polarization state of polarized light beam entering the projection optics. The second aberration is aberration which changes dependent on the polarization state of the polarized light beam entering the projection optics.
摘要翻译：一种曝光装置，包括照亮原稿的照明系统，以及投影光学元件，其将由照明系统照射的原稿的图案投影到基板上。该装置包括干涉仪，其使用从照明系统发射的偏振光形成包括投影光学器件上的像差信息的干涉图案，其中干涉仪是公共路径干涉仪，其中形成干涉图案的两个光束沿着路径投影光学器件和基于由干涉仪形成的干涉图案来计算投影光学元件的光学特性的处理器。所述照明系统包括偏振控制器，其顺序地产生具有彼此不同的各自偏振状态的至少三个差分偏振光束。处理器通过计算干涉图案的数据，使用至少三个不同的偏振光束分离由干涉仪顺序形成的干涉图案所表示的波前像差的第一像差和第二像差，第一像差是不依赖于变化的像差在入射到投影光学器件的偏振光束的偏振状态下。第二像差是根据进入投影光学器件的偏振光束的偏振状态而变化的像差。

3. 发明授权

US08494260B2 Image processing device, image processing method, program, and imaging device 有权
公开(公告)号：US08494260B2
公开(公告)日：2013-07-23
申请号：US12666511
申请日：2008-06-24
申请人： Yasuhiro Sawada , XianJi Zhang , Takashi Masuda
发明人： Yasuhiro Sawada , XianJi Zhang , Takashi Masuda
IPC分类号： G06K9/00 , G06K9/34 , H04N9/68
CPC分类号： H04N9/07 , G06T3/4015 , H04N9/045 , H04N2209/046
摘要： An image processing device includes: a coordinate conversion unit (142) which calculates a corresponding sampling coordinate on a color mosaic image corresponding to a pixel position of a color image when a deformation process is performed, according to the pixel position of the color image; a sampling unit (143); a sampling unit (143) which interpolates-generates a pixel value in a sampling coordinate for each of color planes obtained by decomposing the color mosaic image; and a color generation unit (144) which generates a color image by synthesizing interpolation values of the respective color planes. Each pixel value of a color image subjected to a deformation process is obtained as a pixel value of the sampling coordinate from the color mosaic image by interpolation calculation, thereby realizing the color interpolation process for generating a color image from the color mosaic image and a deformation process of the color image by one interpolation calculation.

4. 发明申请

US20100246994A1 IMAGE PROCESSING DEVICE, IMAGE PROCESSING METHOD, AND IMAGE PROCESSING PROGRAM 有权
标题翻译：图像处理设备，图像处理方法和图像处理程序
公开(公告)号：US20100246994A1
公开(公告)日：2010-09-30
申请号：US12675671
申请日：2008-08-25
申请人： Yasuhiro Sawada
发明人： Yasuhiro Sawada
IPC分类号： G06K9/40
CPC分类号： H04N9/045 , H04N5/3572
摘要： An image processing device, an image processing method, and an image processing program by which deformation such as distortion caused by an imaging optical system can be corrected with high precision without increase in memory capacity and processing time. The image processing device comprises a vertex sampling coordinate computing section (30) for computing a sampling position on an input image by a high-order expression so as to cancel out distortion at the position of a predetermined pixel of an output image, a sampling coordinate interpolation computing section (31) for interpolating the sampling position on the input image, at the position of a pixel other than the position of the predetermined pixel of the output image, from a sampling position of a predetermined output pixel located near the pixel, and a sampling unit (32) for sampling a pixel value of the input image at the sampling position computed via the vertex sampling coordinate computing section (30) and the sampling coordinate interpolation computing section (31).
摘要翻译：可以在不增加存储容量和处理时间的情况下，以高精度校正由成像光学系统引起的失真等变形的图像处理装置，图像处理方法和图像处理程序。该图像处理装置包括顶点采样坐标计算部分（30），用于通过高阶表达式计算输入图像上的采样位置，以抵消输出图像的预定像素的位置处的失真，采样坐标插值计算部（31），用于在输入图像的除了输出图像的预定像素的位置之外的像素的位置处从输入图像上的取样位置插入位于像素附近的预定输出像素的采样位置;以及采样单元（32），用于对经由顶点采样坐标运算部（30）计算出的采样位置处的输入图像的像素值和采样坐标插补运算部（31）进行采样。

5. 发明授权

US07331299B2 Incombustible withdrawing system 失效
标题翻译：不燃回收系统
公开(公告)号：US07331299B2
公开(公告)日：2008-02-19
申请号：US11634954
申请日：2007-02-28
申请人： Norihisa Miyoshi , Yasuhiro Sawada , Tatsuya Hasegawa , Koh Sasaki
发明人： Norihisa Miyoshi , Yasuhiro Sawada , Tatsuya Hasegawa , Koh Sasaki
IPC分类号： F23G5/30 , F23N3/00
CPC分类号： F23J1/06 , F23C10/26 , F23G5/30 , F23G5/50 , F23G7/005 , F23G2201/30 , F23G2201/40 , F23G2209/102 , F23G2209/26 , F23G2209/28
摘要： An incombustible withdrawing system withdraws an incombustible from a fluidized-bed furnace having a fluidized bed formed therein by a fluidized medium. The incombustible withdrawing system has a mixture delivery path to deliver a mixture of the fluidized medium and the incombustible from a bottom of the fluidized-bed furnace. The incombustible withdrawing system also has a fluidized-bed separating chamber disposed downstream of the mixture delivery path to fluidize the mixture by a fluidizing gas and to separate the mixture into a first separated mixture and a second separated mixture. The incombustible withdrawing system includes a return passage to return the first separated mixture to the fluidized-bed furnace, and an incombustible discharge passage to discharge the second separated mixture to an exterior of the fluidized-bed furnace.
摘要翻译：不可燃的抽出系统通过流化介质从其中形成有流化床的流化床炉中取出不燃物。不燃性抽出系统具有混合物输送路径，以从流化床炉的底部输送流化介质和不可燃混合物。不燃性抽出系统还具有设置在混合物输送路径下游的流化床分离室，以通过流化气体使混合物流化，并将混合物分离成第一分离的混合物和第二分离的混合物。不燃性抽出系统包括将第一分离的混合物返回到流化床炉的返回通道和用于将第二分离的混合物排出到流化床炉的外部的不可燃排放通道。

6. 发明授权

US07312563B2 Short arc lamp 有权
标题翻译：短弧灯
公开(公告)号：US07312563B2
公开(公告)日：2007-12-25
申请号：US11199129
申请日：2005-08-09
申请人： Yasuhiro Sawada
发明人： Yasuhiro Sawada
IPC分类号： H01J5/48 , H01J5/50 , H01J5/54
CPC分类号： H01J61/86
摘要： According to the present invention, a short arc lamp comprises a lamp main body having a reflective surface therein, a first opening on an optical axis thereof, and a second openings, a window member provided so as to close the second opening and to define a discharge space between the lamp main body and the opening, a first electrode and a second electrode that are arranged so as to face each other, wherein a tip portion of each of the electrodes extends into the discharge space, and a base disposed approximately at a back end portion of the lamp main body, wherein a hole is formed in the base, the first electrode is held in a burying portion of the base, and a diameter of the first electrode in the burying portion is larger than that of the tip portion of the first electrode.
摘要翻译：根据本发明，短弧灯包括其中具有反射表面的灯主体，在其光轴上的第一开口和第二开口，设置成闭合第二开口并限定一个灯主体与开口之间的放电空间，彼此相对配置的第一电极和第二电极，其中每个电极的末端部分延伸到放电空间中，并且大致设置在基座上的基座灯主体的后端部，其中在基座中形成有孔，第一电极保持在基座的埋入部分中，并且埋入部分中的第一电极的直径大于末端部分的直径的第一电极。

7. 发明授权

US07247945B2 Semiconductor apparatus 有权
标题翻译：半导体装置
公开(公告)号：US07247945B2
公开(公告)日：2007-07-24
申请号：US11300230
申请日：2005-12-13
申请人： Yasuhiro Sawada
发明人： Yasuhiro Sawada
IPC分类号： H01L23/48 , H05K1/18
CPC分类号： H05K1/181 , H01L23/49816 , H01L23/50 , H01L2224/16 , H01L2225/107 , H01L2924/00011 , H01L2924/00014 , H01L2924/3511 , H05K2201/10545 , H05K2201/10734 , Y02P70/611 , H01L2224/0401
摘要： A semiconductor apparatus includes a printed circuit board, a peripheral type first semiconductor package which has a first group of ball electrodes arranged in a peripheral type first arrangement area and a first group of additional ball electrodes arranged inside the first arrangement area and which is arranged on a first surface of the printed circuit board, and a peripheral type second semiconductor package which has a second group of ball electrodes arranged in a second arrangement area and a second group of additional ball electrodes arranged inside the second arrangement area and which is arranged on a second surface of the printed circuit board. A ball electrode located at at least one corner of the first group of ball electrodes is arranged at a position to oppose a corner of the second arrangement area, and at least one ball electrode of the second group of ball electrodes is arranged at a position to oppose the second group of additional ball electrodes through the printed circuit board.
摘要翻译：半导体装置包括印刷电路板，周边型第一半导体封装，其具有布置在周边型第一布置区域中的第一组球形电极和布置在第一布置区域内的第一组额外的球形电极，并且布置在印刷电路板的第一表面和周边型第二半导体封装，其具有布置在第二布置区域中的第二组球形电极和布置在第二布置区域内的第二组额外的球形电极，并且布置在第二布置区域上印刷电路板的第二表面。位于第一组球电极组的至少一个拐角处的球形电极被布置在与第二配置区域的角部相对的位置，并且第二组球形电极组的至少一个球形电极被布置在反对通过印刷电路板的第二组额外的球形电极。

8. 发明授权

US07189984B2 Object data input apparatus and object reconstruction apparatus 有权
标题翻译：对象数据输入装置和对象重建装置
公开(公告)号：US07189984B2
公开(公告)日：2007-03-13
申请号：US11151883
申请日：2005-06-13
申请人： Yasuhiro Sawada
发明人： Yasuhiro Sawada
IPC分类号： G01N21/86 , G01B11/24
CPC分类号： G01B11/2518 , G01N21/31
摘要： An apparatus providing a light-emitting unit for emitting a first light beam to an object and an imaging unit for capturing a first image representing the profile of the first light beam on the surface of the object and a second image representing the spectrum of the reflected first light beam.
摘要翻译：一种提供用于向物体发射第一光束的发光单元的设备和用于捕获表示物体表面上的第一光束的轮廓的第一图像的成像单元和表示反射的光谱的第二图像的成像单元第一光束。

9. 发明申请

US20060125097A1 Semiconductor apparatus 有权
标题翻译：半导体装置
公开(公告)号：US20060125097A1
公开(公告)日：2006-06-15
申请号：US11300230
申请日：2005-12-13
申请人： Yasuhiro Sawada
发明人： Yasuhiro Sawada
IPC分类号： H01L23/48
CPC分类号： H05K1/181 , H01L23/49816 , H01L23/50 , H01L2224/16 , H01L2225/107 , H01L2924/00011 , H01L2924/00014 , H01L2924/3511 , H05K2201/10545 , H05K2201/10734 , Y02P70/611 , H01L2224/0401
摘要： A semiconductor apparatus includes a printed circuit board, a peripheral type first semiconductor package which has a first group of ball electrodes arranged in a peripheral type first arrangement area and a first group of additional ball electrodes arranged inside the first arrangement area and which is arranged on a first surface of the printed circuit board, and a peripheral type second semiconductor package which has a second group of ball electrodes arranged in a second arrangement area and a second group of additional ball electrodes arranged inside the second arrangement area and which is arranged on a second surface of the printed circuit board. A ball electrode located at at least one corner of the first group of ball electrodes is arranged at a position to oppose a corner of the second arrangement area, and at least one ball electrode of the second group of ball electrodes is arranged at a position to oppose the second group of additional ball electrodes through the printed circuit board.
摘要翻译：半导体装置包括印刷电路板，周边型第一半导体封装，其具有布置在周边型第一布置区域中的第一组球形电极和布置在第一布置区域内的第一组额外的球形电极，并且布置在印刷电路板的第一表面和周边型第二半导体封装，其具有布置在第二布置区域中的第二组球形电极和布置在第二布置区域内的第二组额外的球形电极，并且布置在第二布置区域上印刷电路板的第二表面。位于第一组球电极组的至少一个拐角处的球形电极被布置在与第二配置区域的角部相对的位置，并且第二组球形电极组的至少一个球形电极被布置在反对通过印刷电路板的第二组额外的球形电极。

10. 发明申请

US20050274913A1 Object data input apparatus and object reconstruction apparatus 有权
标题翻译：对象数据输入装置和对象重建装置
公开(公告)号：US20050274913A1
公开(公告)日：2005-12-15
申请号：US11151883
申请日：2005-06-13
申请人： Yasuhiro Sawada
发明人： Yasuhiro Sawada
IPC分类号： G01B11/24 , G01B11/25 , G01J3/36 , G01N21/31 , G01N21/86 , G01V8/00
CPC分类号： G01B11/2518 , G01N21/31
摘要： An apparatus providing a light-emitting unit for emitting a first light beam to an object and an imaging unit for capturing a first image representing the profile of the first light beam on the surface of the object and a second image representing the spectrum of the reflected first light beam.
摘要翻译：一种提供用于向物体发射第一光束的发光单元的设备和用于捕获表示物体表面上的第一光束的轮廓的第一图像的成像单元和表示反射的光谱的第二图像的成像单元第一光束。

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