专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US06708556B1 Atomic force microscope and driving method therefor 失效
标题翻译：原子力显微镜及其驱动方法
公开(公告)号：US06708556B1
公开(公告)日：2004-03-23
申请号：US10009063
申请日：2001-12-05
申请人： You Kwang Kim , Sang Gook Kim , Kyu Ho Hwang
发明人： You Kwang Kim , Sang Gook Kim , Kyu Ho Hwang
IPC分类号： G01B528
CPC分类号： G01Q10/065 , G01Q20/02 , G01Q70/06 , Y10S977/87
摘要： An atomic force microscope (AFM) capable of observing the topography of a sample surface at high speed with a high resolution under the atmospheric pressure and a driving method therefor is provided. The AFM comprises a light beam source unit, a light beam scanner, a scanning probe unit (or matrix), a light beam detection unit, a driving control unit and a display unit. The driving method comprises the steps of vibrating, responsive to a reference signal, a first actuator provided on each of scanning probes; detecting a deflection amount of a cantilever provided with a tip at its free end; and transmitting a servo signal to a second actuator based on the deflection amount of the cantilever.
摘要翻译：提供能够在大气压下以高分辨率高速观察样品表面的形貌的原子力显微镜（AFM）及其驱动方法。 AFM包括光束源单元，光束扫描器，扫描探针单元（或矩阵），光束检测单元，驱动控制单元和显示单元。驱动方法包括以下步骤：响应于参考信号振动，设置在每个扫描探针上的第一致动器; 检测在其自由端设置有尖端的悬臂的偏转量; 并且基于所述悬臂的偏转量将伺服信号发送到第二致动器。

IPRDB

热门服务

关于我们

友情链接

联系方式