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    • 4. 发明授权
    • Saw filter including multistrip coupler with varied widths
    • 锯片过滤器包括宽度不同的多段联轴器
    • US5565825A
    • 1996-10-15
    • US470700
    • 1995-06-06
    • Yoshiko TeraKouji MorishimaAtsushi Sakai
    • Yoshiko TeraKouji MorishimaAtsushi Sakai
    • H03H9/02H03H9/145H03H9/25H03H9/64
    • H03H9/643H03H9/02771H03H9/14547H03H9/14567H03H9/1457H03H9/6426
    • A surface acoustic wave device for propagating a surface acoustic wave having input and output transducers and a multistrip coupler formed on the surface of a substrate. The input and output transducers each have two opposite electrodes having a plurality of electrode fingers extending toward their opposites and meshing with the electrode fingers of their opposites. The multistrip coupler has strip lines of a configuration wherein portions of at least some of the coupler strip lines are more widely spaced from adjacent patterns than other portions of the coupler strip lines. The width of these more widely spaced portions of at least one of the coupler strip lines which are more widely spaced from adjacent patterns is made larger than the width of the other portions of the at least one coupler strip line to compensate for the thinning effect of the lithography process. In one preferred embodiment, the portion of the at least one coupler strip line whose width is made larger is positioned so that it is not adjacent to the pattern of the input or output transducers.
    • 一种用于传播具有输入和输出换能器的声表面波的表面声波装置和形成在基板表面上的多带耦合器。 输入和输出换能器各自具有两个相对的电极,其具有朝向它们的对立面延伸并与其对立面的电极指相啮合的多个电极指。 所述多段耦合器具有这样的配置的带状线,其中至少一些耦合器带状线的部分相对于相邻的图案与耦合器带状线的其它部分间隔更宽。 与相邻图案间隔更宽的耦合器带状线中至少一个的这些更宽间隔的部分的宽度被制成大于至少一个耦合器带状线的其它部分的宽度,以补偿 光刻工艺。 在一个优选实施例中,使得其宽度变大的至少一个耦合器带状线的部分被定位成使其不与输入或输出换能器的图案相邻。