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    • 3. 发明申请
    • PULSED LASER MICRO-DEPOSITION PATTERN FORMATION
    • 脉冲激光微沉积图形成
    • US20100227133A1
    • 2010-09-09
    • US12400438
    • 2009-03-09
    • Bing LiuZhendong HuMakoto MurakamiJingzhou XuYong Che
    • Bing LiuZhendong HuMakoto MurakamiJingzhou XuYong Che
    • B32B3/00C23C14/34C23C14/00
    • C23C20/04B41M5/262B41M5/267B44F1/10C23C14/28C23C14/3435G02B26/101Y10T428/24802Y10T428/24917
    • A method of forming patterns on transparent substrates using a pulsed laser is disclosed. Various embodiments include an ultrashort pulsed laser, a substrate that is transparent to the laser wavelength, and a target plate. The laser beam is guided through the transparent substrate and focused on the target surface. The target material is ablated by the laser and is deposited on the opposite substrate surface. A pattern, for example a gray scale image, is formed by scanning the laser beam relative to the target. Variations of the laser beam scan speed and scan line density control the material deposition and change the optical properties of the deposited patterns, creating a visual effect of gray scale. In some embodiments patterns may be formed on a portion of a microelectronic device during a fabrication process. In some embodiments high repetition rate picoseconds and nanosecond sources are configured to produce the patterns.
    • 公开了使用脉冲激光在透明基板上形成图案的方法。 各种实施例包括超短脉冲激光器,对激光波长透明的衬底和靶板。 激光束被引导通过透明基板并聚焦在目标表面上。 目标材料被激光烧蚀并沉积在相对的基板表面上。 通过相对于目标扫描激光束来形成例如灰度图像的图案。 激光束扫描速度和扫描线密度的变化控制材料沉积并改变沉积图案的光学性质,产生灰度的视觉效果。 在一些实施例中,可以在制造过程期间在微电子器件的一部分上形成图案。 在一些实施例中,高重复率皮秒和纳秒源被配置为产生图案。
    • 5. 发明授权
    • Production of metal and metal-alloy nanoparticles with high repetition rate ultrafast pulsed laser ablation in liquids
    • 在液体中生产金属和金属合金纳米粒子,具有高重复率超快脉冲激光烧蚀
    • US08246714B2
    • 2012-08-21
    • US12320617
    • 2009-01-30
    • Bing LiuZhendong HuMakoto MurakamiYong Che
    • Bing LiuZhendong HuMakoto MurakamiYong Che
    • B22F9/02B22F9/04
    • B02C19/18B01J13/0043B01J19/121B22F1/0022B22F9/04B22F2999/00B82Y30/00B22F2202/11
    • Various embodiments include a method of producing chemically pure and stably dispersed metal and metal-alloy nanoparticle colloids with ultrafast pulsed laser ablation. A method comprises irradiating a metal or metal alloy target submerged in a liquid with ultrashort laser pulses at a high repetition rate, cooling a portion of the liquid that includes an irradiated region, and collecting nanoparticles produced with the laser irradiation and liquid cooling. The method may be implemented with a high repetition rate ultrafast pulsed laser source, an optical system for focusing and moving the pulsed laser beams, a metal or metal alloy target submerged in a liquid, and a liquid circulating system to cool the laser focal volume and collect the nanoparticle products. By controlling various laser parameters, and with optional liquid flow movement, the method provides stable colloids of dispersed metal and metal-alloy nanoparticles. In various embodiments additional stabilizing chemical agents are not required.
    • 各种实施方案包括用超快速脉冲激光烧蚀制备化学纯的和稳定分散的金属和金属合金纳米颗粒胶体的方法。 一种方法包括以高重复率以超短激光脉冲辐射淹没在液体中的金属或金属合金靶,冷却包括辐射区域的液体的一部分,以及收集通过激光照射和液体冷却产生的纳米颗粒。 该方法可以用高重复率超快脉冲激光源,用于聚焦和移动脉冲激光束的光学系统,浸没在液体中的金属或金属合金靶和液体循环系统来实现,以冷却激光聚焦体积, 收集纳米颗粒产品。 通过控制各种激光参数,并具有可选的液流运动,该方法提供分散金属和金属合金纳米粒子的稳定胶体。 在各种实施方案中,不需要另外的稳定化学试剂。
    • 6. 发明申请
    • Production of metal and metal-alloy nanoparticles with high repetition rate ultrafast pulsed laser ablation in liquids
    • 在液体中生产金属和金属合金纳米粒子,具有高重复率超快脉冲激光烧蚀
    • US20100196192A1
    • 2010-08-05
    • US12320617
    • 2009-01-30
    • Bing LiuZhendong HuMakoto MurakamiYong Che
    • Bing LiuZhendong HuMakoto MurakamiYong Che
    • C22C5/04B22F9/04B23K26/08C22C5/02C22C5/06C22C9/00B01F3/12
    • B02C19/18B01J13/0043B01J19/121B22F1/0022B22F9/04B22F2999/00B82Y30/00B22F2202/11
    • Various embodiments include a method of producing chemically pure and stably dispersed metal and metal-alloy nanoparticle colloids with ultrafast pulsed laser ablation. A method comprises irradiating a metal or metal alloy target submerged in a liquid with ultrashort laser pulses at a high repetition rate, cooling a portion of the liquid that includes an irradiated region, and collecting nanoparticles produced with the laser irradiation and liquid cooling. The method may be implemented with a high repetition rate ultrafast pulsed laser source, an optical system for focusing and moving the pulsed laser beams, a metal or metal alloy target submerged in a liquid, and a liquid circulating system to cool the laser focal volume and collect the nanoparticle products. By controlling various laser parameters, and with optional liquid flow movement, the method provides stable colloids of dispersed metal and metal-alloy nanoparticles. In various embodiments additional stabilizing chemical agents are not required.
    • 各种实施方案包括用超快速脉冲激光烧蚀制备化学纯的和稳定分散的金属和金属合金纳米颗粒胶体的方法。 一种方法包括以高重复率以超短激光脉冲辐射淹没在液体中的金属或金属合金靶,冷却包括辐射区域的液体的一部分,以及收集通过激光照射和液体冷却产生的纳米颗粒。 该方法可以用高重复率超快脉冲激光源,用于聚焦和移动脉冲激光束的光学系统,浸没在液体中的金属或金属合金靶和液体循环系统来实现,以冷却激光聚焦体积, 收集纳米颗粒产品。 通过控制各种激光参数,并具有可选的液流运动,该方法提供分散金属和金属合金纳米粒子的稳定胶体。 在各种实施方案中,不需要另外的稳定化学试剂。
    • 7. 发明申请
    • Method For Fabricating Thin Films
    • 薄膜制造方法
    • US20090246530A1
    • 2009-10-01
    • US12401967
    • 2009-03-11
    • Makoto MurakamiZhendong HuYong CheBing LiuYuzuru UeharaZhenlin Liu
    • Makoto MurakamiZhendong HuYong CheBing LiuYuzuru UeharaZhenlin Liu
    • B32B9/04C23C14/28C23C14/30B05B5/025
    • C23C14/08C23C14/083C23C14/086C23C14/14C23C14/28C23C14/54Y10T428/31504
    • A method of pulsed laser deposition (PLD) capable of continuously tuning formed-film morphology from that of a nanoparticle aggregate to a smooth thin film free of particles and droplets. The materials that can be synthesized using various embodiments of the invention include, but are not limited to, metals, alloys, metal oxides, and semiconductors. In various embodiments a ‘burst’ mode of ultrashort pulsed laser ablation and deposition is provided. Tuning of the film morphology is achieved by controlling the burst-mode parameters such as the number of pulses and the time-spacing between the pulses within each burst, the burst repetition rate, and the laser fluence. The system includes an ultrashort pulsed laser, an optical system for delivering a focused onto the target surface with an appropriate energy density, and a vacuum chamber in which the target and the substrate are installed and background gases and their pressures are appropriately adjusted.
    • 脉冲激光沉积(PLD)的方法,其能够将形成膜的形态从纳米颗粒聚集体的形态连续调节到没有颗粒和液滴的平滑薄膜。 可以使用本发明的各种实施方案合成的材料包括但不限于金属,合金,金属氧化物和半导体。 在各种实施例中,提供了超短脉冲激光烧蚀和沉积的“突发”模式。 通过控制脉冲串模式参数,例如脉冲数和每个脉冲之间的脉冲之间的时间间隔,脉冲串重复频率和激光能量密度来实现电影形态的调整。 该系统包括超短脉冲激光器,用于以适当的能量密度传递聚焦到目标表面上的光学系统,以及真空室,其中靶和基底被安装在其中,背景气体及其压力被适当地调整。
    • 9. 发明申请
    • METHOD FOR FABRICATING THIN FILMS
    • 薄膜制作方法
    • US20090246413A1
    • 2009-10-01
    • US12254076
    • 2008-10-20
    • Makoto MurakamiZhendong HuYong CheBing Liu
    • Makoto MurakamiZhendong HuYong CheBing Liu
    • C23C14/30C23C16/54
    • C23C14/28C23C14/08C23C14/564H01S3/0057H01S3/0085H01S3/2308
    • A method of ultrashort pulsed laser deposition (PLD) capable of continuously tuning formed-film morphology from that of a nanoparticle aggregate to a smooth thin film completely free of particles and droplets. The materials that can be synthesized using various embodiments of the invention include, but are not limited to, metals, alloys, metal oxides, and semiconductors. A ‘burst’ mode of ultrashort pulsed laser ablation and deposition is provided, where each ‘burst’ contains a train of laser pulses. Tuning of the film morphology is achieved by controlling the burst-mode parameters such as the number of pulses and the time-spacing between the pulses within each burst, the burst repetition rate, and the laser fluence. The system includes an ultrashort pulsed laser, an optical setup for delivering the laser beam such that the beam is focused onto the target surface with an appropriate average energy density (fluence), and a vacuum chamber in which the target and the substrate are installed and background gases and their pressures are appropriately adjusted.
    • 一种超短脉冲激光沉积(PLD)的方法,其能够将形成膜的形态从纳米颗粒聚集体的形态连续调节到完全没有颗粒和液滴的光滑薄膜。 可以使用本发明的各种实施方案合成的材料包括但不限于金属,合金,金属氧化物和半导体。 提供了超短脉冲激光烧蚀和沉积的“突发”模式,其中每个“脉冲串”包含一系列激光脉冲。 通过控制脉冲串模式参数,例如脉冲数和每个脉冲之间的脉冲之间的时间间隔,脉冲串重复频率和激光能量密度来实现电影形态的调整。 该系统包括超短脉冲激光器,用于传送激光束的光学装置,使得光束以适当的平均能量密度(能量密度)聚焦到目标表面上;以及真空室,其中安装有靶和基底; 背景气体及其压力得到适当调整。