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    • 2. 发明申请
    • SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING SAME
    • 半导体存储器件及其制造方法
    • US20110227025A1
    • 2011-09-22
    • US12872284
    • 2010-08-31
    • Jun HIROTAYoko IwakajiMoto Yabuki
    • Jun HIROTAYoko IwakajiMoto Yabuki
    • H01L45/00H01L29/868H01L21/77
    • H01L27/1021H01L27/101
    • According to one embodiment, a semiconductor memory device includes a word line interconnection layer, a bit line interconnection layer and a pillar. The word line interconnection layer includes a plurality of word lines which extend in a first direction. The bit line interconnection layer includes a plurality of bit lines which extend in a second direction crossing over the first direction. The pillar is arranged between each of the word lines and each of the bit lines. The pillar includes a silicon diode and a variable resistance film, and the silicon diode includes a p-type portion and an n-type portion. The word line interconnection layer and the bit line interconnection layer are alternately stacked, and a compressive force is applied to the silicon diode in a direction in which the p-type portion and the n-type portion become closer to each other.
    • 根据一个实施例,半导体存储器件包括字线互连层,位线互连层和柱。 字线互连层包括沿第一方向延伸的多个字线。 位线互连层包括沿与第一方向交叉的第二方向延伸的多个位线。 支柱布置在每个字线和每个位线之间。 支柱包括硅二极管和可变电阻膜,并且硅二极管包括p型部分和n型部分。 字线互连层和位线互连层交替堆叠,并且在p型部分和n型部分变得更接近的方向上对硅二极管施加压缩力。