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    • 6. 发明授权
    • Advanced cell-to-cell inspection
    • 先进的细胞间细胞检查
    • US07869643B2
    • 2011-01-11
    • US11700408
    • 2007-01-31
    • Zeev LiticheverErez SaliOren Cohen
    • Zeev LiticheverErez SaliOren Cohen
    • G06K9/00G06K9/68
    • G06T7/001G06T2207/10056G06T2207/30148
    • Inspection of objects such as semiconductor wafers may proceed on a cell-to-cell or die-to-die basis. An image of a wafer may be obtained and the cells or dies shown therein can be inspected using any combination of appropriate die-to-die or cell-to-cell inspection methods. For example, one or more areas may be designated for cell-to-cell inspection. For each cell type, a reference image can be generated by obtaining an image of the area and displacing the image by an amount equal to the repetition vector for that cell type in opposite directions. The displaced images and the original image can be combined into a single reference image. The original image can then be compared to the reference image. In some embodiments, the displaced images are also compared to the reference image to statistically determine the presence or absence of defects.
    • 诸如半导体晶片的物体的检查可以在细胞间或细胞死亡的基础上进行。 可以获得晶片的图像,并且可以使用适当的芯片到芯片或细胞间细胞检查方法的任何组合来检查其中所示的细胞或裸片。 例如,可以将一个或多个区域指定用于细胞到细胞检查。 对于每个单元格类型,可以通过获得该区域的图像并且将图像移位相当于相反方向上该单元格类型的重复向量的量来产生参考图像。 移位图像和原始图像可以组合成单个参考图像。 然后将原始图像与参考图像进行比较。 在一些实施例中,也将移位的图像与参考图像进行比较,以统计确定缺陷的存在或不存在。
    • 7. 发明授权
    • Defect detection through image comparison using relative measures
    • 通过图像比较使用相对措施进行缺陷检测
    • US07369236B1
    • 2008-05-06
    • US11590650
    • 2006-10-31
    • Erez SaliOren Cohen
    • Erez SaliOren Cohen
    • G01B11/00G01N21/00G06K9/00
    • G01N21/95607G06T7/001G06T2207/30148
    • Inspection of objects such as semiconductor wafers can include comparisons of shapes between inspection and reference images. As part of the inspection process, relative values may be assigned to pixels within each image based on comparison of such pixels to neighboring pixels. For instance, the pixels may be ranked by relative brightness in each image. Alternatively, directional vectors may be defined based on slopes between pixels and their neighbors. Various comparison metrics may be utilized to determine the degree of correlation between the relative values for pixels in the inspection image and corresponding pixels in the reference image. Relative values may be combined with conventional techniques as part of an inspection process. The inspection may be performed using an optical inspection tool that uses conventional techniques to identify defect candidates, with relative value analysis performed on areas containing defect candidates to confirm or deny the existence of a defect.
    • 检查诸如半导体晶片的物体可以包括检查和参考图像之间的形状的比较。 作为检查过程的一部分,可以基于这些像素与相邻像素的比较将相对值分配给每个图像内的像素。 例如,像素可以通过每个图像中的相对亮度进行排序。 或者,可以基于像素与其邻居之间的斜率来定义方向向量。 可以使用各种比较度量来确定检查图像中的像素和参考图像中的对应像素的相对值之间的相关度。 作为检查过程的一部分,相对值可以与常规技术相结合。 可以使用使用常规技术来识别缺陷候选的光学检查工具进行检查,对包含缺陷候选的区域进行相对值分析以确认或拒绝存在缺陷。