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    • 1. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20090273031A1
    • 2009-11-05
    • US12408415
    • 2009-03-20
    • Wataru SAITOSyotaro ONONana HATANOMasakatsu TAKASHITAHiroshi OHTAMiho WATANABE
    • Wataru SAITOSyotaro ONONana HATANOMasakatsu TAKASHITAHiroshi OHTAMiho WATANABE
    • H01L29/78
    • H01L29/7802H01L29/0634H01L29/0878H01L29/1095
    • A semiconductor device includes: a first semiconductor layer of a first conductivity type; a second semiconductor layer of the first conductivity type provided on a major surface of the first semiconductor layer; a third semiconductor layer of a second conductivity type provided on the major surface of the first semiconductor layer, the third semiconductor layer forming a structure of periodical arrangement with the second semiconductor layer; a fourth semiconductor layer of the second conductivity type provided above the third semiconductor layer; a fifth semiconductor layer of the first conductivity type selectively provided on a surface of the fourth semiconductor layer; a first main electrode electrically connected to the first semiconductor layer; a second main electrode provided to contact a surface of the fifth semiconductor layer and a surface of the fourth semiconductor layer; and a control electrode provided above the fifth semiconductor layer, the fourth semiconductor layer, and the second semiconductor layer via an insulative film. A portion is provided locally in the third semiconductor layer, the portion depleting at a voltage not more than one third of a voltage at which the second semiconductor layer and the third semiconductor layer completely deplete.
    • 半导体器件包括:第一导电类型的第一半导体层; 设置在第一半导体层的主表面上的第一导电类型的第二半导体层; 设置在所述第一半导体层的主表面上的第二导电类型的第三半导体层,所述第三半导体层形成与所述第二半导体层的周期性布置的结构; 设置在第三半导体层上方的第二导电类型的第四半导体层; 选择性地设置在第四半导体层的表面上的第一导电类型的第五半导体层; 电连接到第一半导体层的第一主电极; 设置成与所述第五半导体层的表面和所述第四半导体层的表面接触的第二主电极; 以及通过绝缘膜设置在第五半导体层,第四半导体层和第二半导体层上方的控制电极。 局部地设置在第三半导体层中的部分,其耗尽不超过第二半导体层和第三半导体层完全耗尽的电压的三分之一的电压。