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    • 4. 发明授权
    • Dry etching apparatus and method of forming a via hole in an interlayer
insulator using same
    • 干法蚀刻装置及使用该蚀刻装置的层间绝缘体中形成通孔的方法
    • US5362358A
    • 1994-11-08
    • US61440
    • 1993-05-14
    • Yasushi YamagataFumihide Sato
    • Yasushi YamagataFumihide Sato
    • C23F4/00H01J37/32H01L21/302H01L21/3065H01L21/311H01L21/3213H01L21/768B44C1/22
    • H01J37/32192H01J37/32587H01J37/32678H01J37/32706H01L21/31116H01L21/76804
    • In order to cyclically implement isotropical and anisotropical etching of an interlayer insulator provided in a semiconductor wafer, two variable capacitors are provided for applying RF bias (power) to a triode type dry etching apparatus. The two variable capacitors are controlled such that cyclically, as one of the two capacitors exhibits maximum capacitance thereof, the other capacitor exhibits minimum capacitance thereof. As an alternative to the above, a wafer supporting table provided in a reactive chamber of an electron cyclotron resonance type apparatus, is cyclically supplied with a radio frequency (RF) bias and the ground potential. This cyclic application of the RF bias and the ground potential is controlled by a combination of a pulse generator and an amplitude modulation circuit both coupled to an RF signal generator. The via hole is effectively formed using the cyclic operations of the isotropic and anisotropic etching.
    • 为了周期性地实施设置在半导体晶片中的层间绝缘体的等温和各向异性蚀刻,提供了两个可变电容器,用于将三极管型干法蚀刻装置的RF偏压(功率)施加。 两个可变电容器被控制为使得循环地,由于两个电容器中的一个表现出最大电容,所以另一个电容器表现出最小的电容。 作为上述的替代,设置在电子回旋共振型装置的反应室中的晶片支撑台被周期性地提供射频(RF)偏置和地电位。 RF偏置和接地电位的这种循环应用由两个耦合到RF信号发生器的脉冲发生器和幅度调制电路的组合来控制。 使用各向同性和各向异性蚀刻的循环操作有效地形成通孔。
    • 9. 发明授权
    • Fuel injection system for internal combustion engines
    • 内燃机燃油喷射系统
    • US4440134A
    • 1984-04-03
    • US378180
    • 1982-05-14
    • Kiyoharu NakaoFumihide Sato
    • Kiyoharu NakaoFumihide Sato
    • F02M59/10F02M47/02
    • F02M59/105A61M2206/22
    • A fuel injection system for an internal combustion engine employing a rotary valve for delivering fuel to fuel injectors in which fuel injection timing is precisely controlled to an optimum range by automatically controlling the rotary valve in response to the number of revolutions of the engine. The system includes a high pressure accumulator connected to a fuel pump and a low pressure accumulator connected to a tank through a variable restrictor valve. The rotary valve functions to selectively connect each injector to the high and low pressure accumulators as it rotates whereby metered amount of fuel can be fed into a plunger chamber of each injector when a piston chamber of the injector is connected to the low pressure accumulator and the fuel can be injected through nozzle orifices when the piston chamber is connected to the high pressure accumulator.
    • 一种用于内燃机的燃料喷射系统,其使用旋转阀将燃料输送到燃料喷射器,其中通过响应于发动机的转数自动控制旋转阀,将燃料喷射正时精确地控制到最佳范围。 该系统包括连接到燃料泵的高压蓄能器和通过可变节流阀连接到罐的低压蓄能器。 旋转阀用于在每个喷射器旋转时将每个喷射器选择性地连接到高压和低压蓄能器,从而当注射器的活塞室连接到低压蓄能器时,计量的燃料可以被供给到每个喷射器的柱塞室中,并且 当活塞室连接到高压蓄能器时,燃料可以通过喷嘴孔注入。