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1. 发明授权

US06337724B1 Image display system 失效
标题翻译：图像显示系统
公开(公告)号：US06337724B1
公开(公告)日：2002-01-08
申请号：US08759626
申请日：1996-12-05
申请人： Toshio Itoh , Haruhiko Nagai , Tsunehiro Imamura , Takayoshi Semasa , Kenji Tatsumi , Shuji Iwata , Hiroshi Mitsuda , Yasuhito Myoi , Toshimasa Tomoda , Fumio Suzuki , Yoshisuke Ohtsuru
发明人： Toshio Itoh , Haruhiko Nagai , Tsunehiro Imamura , Takayoshi Semasa , Kenji Tatsumi , Shuji Iwata , Hiroshi Mitsuda , Yasuhito Myoi , Toshimasa Tomoda , Fumio Suzuki , Yoshisuke Ohtsuru
IPC分类号： G02F11335
CPC分类号： H04N9/12 , G09G2300/026
摘要： A plurality of liquid crystal modules is vertically and horizontally arranged, each of which is supplied light by a light source via optical fibers. A screen can be wound up at a cabinet. An image from each of the plurality of liquid crystal modules does not interfere one another because a light shielding board is installed.
摘要翻译：垂直和水平布置多个液晶模块，每个液晶模块通过光纤由光源供给光。屏幕可以在柜子上卷起。由于安装了遮光板，来自多个液晶模块中的每一个的图像不会彼此干涉。

2. 发明授权

US5864374A Method and apparatus for image generation 失效
标题翻译：用于图像生成的方法和装置
公开(公告)号：US5864374A
公开(公告)日：1999-01-26
申请号：US625004
申请日：1996-03-29
申请人： Toshio Ito , Yoshisuke Ohtsuru , Hisao Koizumi , Takio Okuda , Yasuhito Myoi , Toshimasa Tomoda , Masaaki Tanaka , Teruo Miyamoto , Toyomi Ohshige , Toshiyuki Yoneda , Fumio Suzuki , Kou Nishino , Kazuaki Matoba , Masanori Kojima , Hiroshi Kawamura , Kenji Kimura , Kenji Samejima , Naoki Kawamoto , Miki Fukada , Haruhiko Nagai , Kenji Maeno
发明人： Toshio Ito , Yoshisuke Ohtsuru , Hisao Koizumi , Takio Okuda , Yasuhito Myoi , Toshimasa Tomoda , Masaaki Tanaka , Teruo Miyamoto , Toyomi Ohshige , Toshiyuki Yoneda , Fumio Suzuki , Kou Nishino , Kazuaki Matoba , Masanori Kojima , Hiroshi Kawamura , Kenji Kimura , Kenji Samejima , Naoki Kawamoto , Miki Fukada , Haruhiko Nagai , Kenji Maeno
IPC分类号： G03B33/12 , G02F1/13 , G02F1/1335 , G02F1/13357 , G03B21/00 , G03B21/14 , H04N9/31 , H04N5/74
CPC分类号： H04N9/3105
摘要： A dichroic mirror for reflecting red light for optical separating and a dichroic mirror for reflecting red light for optical synthesizing are installed on the same plane in an image generating apparatus of the present invention. In addition, a dichroic mirror for reflecting blue light for optical separating and a dichroic mirror for reflecting blue light for optical synthesizing are installed on the same plane. Accordingly, a compact configuration can be realized. Since a main reflecting mirror is a rotating elliptic mirror and a lamp is located on a focus or around the focus, a lighting equipment which irradiates conic luminous flux can be realized.
摘要翻译：用于反射用于光学分离的红光的分色镜和用于反射用于光学合成的红光的分色镜安装在本发明的图像生成装置的同一平面上。此外，用于反射用于光学分离的蓝色光的分色镜和用于反射用于光学合成的蓝色光的分色镜安装在同一平面上。因此，可以实现紧凑的结构。由于主反射镜是旋转的椭圆镜，并且灯位于焦点或焦点周围，所以可以实现照射圆锥光束的照明设备。

3. 发明授权

US5008558A System for detecting minute particles on or above a substrate 失效
标题翻译：用于检测基板上或上方的微小颗粒的系统
公开(公告)号：US5008558A
公开(公告)日：1991-04-16
申请号：US373801
申请日：1989-06-29
申请人： Masao Koshinaka , Minoru Akiyama , Hitoshi Tanaka , Toshimasa Tomoda
发明人： Masao Koshinaka , Minoru Akiyama , Hitoshi Tanaka , Toshimasa Tomoda
IPC分类号： G01N21/88 , G01N15/02 , G01N15/14 , G01N21/89 , G01N21/94 , G01N21/95 , G01N21/956 , H01L21/66
CPC分类号： G01N21/94 , G01N2015/0238 , G01N2021/8909 , G01N2021/945 , G01N21/9501
摘要： A fine-particle measuring apparatus designed to measure fine particles attached to the surface of a substrate for a semiconductor device set in a processing unit for formation of films, etching, cleaning, etc. and fine particles suspended in the space above the substrate surface by the use of scattering of a laser beam caused by these fine particles. The measuring apparatus comprises a laser beam scanning mechanism for irradiating a measuring space with a laser beam the angular position of which is minutely modulated at a predetermined frequency, a photodetector which receives light scattered by a fine particle and converts the received light into an electrical signal, and a signal processor which extracts from the electrical signal output by the photodetector a signal component whose frequency is the same as or double that of a modulating signal for the minute scanning with the laser beam and which has a constant phase difference in terms of time with respect to the modulating signal. Thus, it is possible to measure fine particles with high sensitivity without substantially disturbing the environment inside the process unit or the process itself.
摘要翻译：一种微粒测量装置，被设计用于测量附着在用于形成膜，蚀刻，清洁等的处理单元中的用于半导体器件的基板的表面的细颗粒，以及悬浮在基板表面上方的空间中的细颗粒使用由这些细颗粒引起的激光束的散射。该测量装置包括：激光束扫描机构，用于以预定频率微调其角度位置的激光束照射测量空间;光电检测器，其接收由微粒散射的光并将接收的光转换成电信号以及信号处理器，其从由光电检测器输出的电信号中提取频率与用于用激光束进行微小扫描的调制信号的频率相同或者是两倍的信号分量，并且其在时间上具有恒定的相位差相对于调制信号。因此，可以以高灵敏度测量细颗粒，而基本上不会干扰处理单元内的环境或过程本身。

4. 发明授权

US5379150A Method of manufacturing a spatial frequency filter for use in a pattern defect detection device 失效
标题翻译：制造用于图案缺陷检测装置的空间频率滤波器的方法
公开(公告)号：US5379150A
公开(公告)日：1995-01-03
申请号：US176571
申请日：1993-12-30
申请人： Yoko Miyazaki , Toshimasa Tomoda , Hitoshi Tanaka , Nobuyuki Kosaka , Toyomi Ohshige
发明人： Yoko Miyazaki , Toshimasa Tomoda , Hitoshi Tanaka , Nobuyuki Kosaka , Toyomi Ohshige
IPC分类号： G01B11/24 , G01N21/88 , G01N21/94 , G01N21/956 , G06K9/74 , H01L21/66 , G02B27/46 , G01B9/00
CPC分类号： G06K9/74 , G01N21/95623
摘要： A spatial frequency filter used in a pattern defect detection device, including a pattern which includes a black spot having a diameter expanded by a controlled amount in comparison with the diameter of a black spot on a photosensitive plate obtained by exposure by diffracted light from a pattern on a model specimen.
摘要翻译：一种在图案缺陷检测装置中使用的空间频率滤波器，包括图案，该图形包括直径扩大了受控量的黑点，与通过衍射光从图案曝光获得的感光片上的黑点的直径相比较在模型标本上。

5. 发明授权

US5030842A Fine-particle measuring apparatus 失效
标题翻译：细颗粒测量仪
公开(公告)号：US5030842A
公开(公告)日：1991-07-09
申请号：US540893
申请日：1990-06-20
申请人： Masao Koshinaka , Minoru Akiyama , Toshimasa Tomoda
发明人： Masao Koshinaka , Minoru Akiyama , Toshimasa Tomoda
IPC分类号： G01N21/88 , G01N15/02 , G01N15/14 , G01N21/21 , G01N21/47 , G01N21/94 , G01N21/95 , G01N21/956 , H01L21/66
CPC分类号： G01N15/0205 , G01N21/94 , G01N2015/145 , G01N21/21 , G01N21/47 , G01N21/9501
摘要： A fine-particle measuring apparatus designed to measure fine particles attached to the surface of a substrate of a semiconductor device set in a processing unit for formation of films, etching, cleaning, etc. and fine particles suspended in the space above the substrate surface by the use of scattering of a laser beam caused by these fine particles. The measuring apparatus comprises a laser light phase modulator for generating two laser beams which have the same wavelength and the phase difference between which is modulated at a predetermined frequency, an optical system which causes the two laser beams to intersect each other within a space containing the fine particles being the objects of measurement, a photodetector which receives light scattered by any of the fine particles in the region which the two laser beams intersect, and converts the received light into an electrical signal, and a signal processor which extracts from the electrical signal based on the scattered light of a signal component whose frequency is the same as or double that of a phase modulating signal for the modulation effected in the laser beam phase modulator and which has a constant phase difference with respect to the phase modulating signal. Thus, it is possible to measure fine particles with high spatial resolving power without substantially disturbing the environment inside the process unit or the process itself.
摘要翻译：一种微粒测量装置，设计用于测量附着在半导体器件的基板的表面上的细颗粒，该半导体器件的基板的表面设置在用于形成膜，蚀刻，清洁等的处理单元中，以及悬浮在基板表面上方的空间中的细颗粒使用由这些细颗粒引起的激光束的散射。测量装置包括激光相位调制器，用于产生具有相同波长的两个激光束，并且其相位差以预定频率被调制;使得两个激光束在包含该两个激光束的空间内彼此相交的光学系统作为测量对象的微粒子，接收由两个激光束相交的区域中的任何细颗粒散射的光并将接收的光转换为电信号的光检测器，以及从电信号中提取的信号处理器基于在激光束相位调制器中进行的调制的相位调制信号的频率相同或相反的信号分量的散射光，并且相对于相位调制信号具有恒定的相位差。因此，可以测量具有高空间分辨能力的细颗粒，而基本上不会干扰处理单元内的环境或过程本身。

6. 发明授权

US4410483A Neutron detector for use within nuclear reactor 失效
标题翻译：用于核反应堆的中子检测器
公开(公告)号：US4410483A
公开(公告)日：1983-10-18
申请号：US271880
申请日：1981-06-09
申请人： Toshimasa Tomoda
发明人： Toshimasa Tomoda
IPC分类号： G01T3/00 , H01J47/12
CPC分类号： H01J47/1238 , H01J47/12
摘要： An improved long operating lifetime ionization chamber type neutron detector for use within a nuclear reactor. The chamber contains uranium U-235 as the neutron sensitive material and helium or argon fill gas. The atom rate of U-235 to fill gas is from 0.45 to 1.8 for helium, and 2.3 to 9 for argon.
摘要翻译：在核反应堆内使用改进的长寿命电离室型中子探测器。该腔室包含铀U-235作为中子敏感材料和氦气或氩气填充气体。 U-235填充气体的原子率为氦的0.45〜1.8，氩的原子比为2.3〜9。

7. 发明授权

US5170063A Inspection device for detecting defects in a periodic pattern on a semiconductor wafer 失效
标题翻译：用于检测半导体晶片周期性图案中的缺陷的检查装置
公开(公告)号：US5170063A
公开(公告)日：1992-12-08
申请号：US661140
申请日：1991-02-27
申请人： Yoko Miyazaki , Hitoshi Tanaka , Nobuyuki Kosaka , Toshimasa Tomoda
发明人： Yoko Miyazaki , Hitoshi Tanaka , Nobuyuki Kosaka , Toshimasa Tomoda
IPC分类号： G01N21/88 , G01N21/956 , G03H1/00 , G06T1/00
CPC分类号： G01N21/95623 , G03H1/00
摘要： An inspection device for detecting defects in a periodic pattern on a semiconductor wafer includes a laser oscillator. In the exposure process, light emitted from the laser oscillator is divided into a subject beam and a reference beam. The subject beam is guided to a semiconductor wafer having a periodic pattern thereon by mirrors and a beam expander. The light scattered from the specimen is collected by a lens on a photographic plate. The reference beam is guided to the photographic plate via a second beam expander and another mirror. The intensity of the reference beam is adjusted to a level at which the reference beams interferes on the photographic plate with the light scattered from defects in the periodic pattern and collected by the lens. Thus, a hologram of the defects in the pattern is recorded on the photographic plate. After development, the photographic plate is returned to its original position and used to form a holographic image of the defects with a transmitted regeneration light beam.
摘要翻译：用于检测半导体晶片周期性图案中的缺陷的检查装置包括激光振荡器。在曝光过程中，从激光振荡器发射的光被分成目标光束和参考光束。目标光束通过反射镜和光束扩展器被引导到其上具有周期性图案的半导体晶片。从样本散射的光由照相板上的透镜收集。参考光束通过第二光束扩展器和另一个反射镜被引导到照相板。参考光束的强度被调整到参考光束干涉照相板的水平，其中光从周期性图案中的缺陷散射并由透镜收集。因此，图案上的缺陷的全息图被记录在照相板上。在显影之后，照相板返回其原始位置，并用于通过发射的再生光束形成缺陷的全息图像。

8. 发明授权

US4379248A Ionization chamber having coaxially arranged cylindrical electrodes 失效
标题翻译：电离室具有同轴排列的圆柱形电极
公开(公告)号：US4379248A
公开(公告)日：1983-04-05
申请号：US36236
申请日：1979-05-04
申请人： Naoki Wakayama , Hideshi Yamagishi , Toshimasa Tomoda , Hiroji Tanaka
发明人： Naoki Wakayama , Hideshi Yamagishi , Toshimasa Tomoda , Hiroji Tanaka
IPC分类号： G01T1/185 , H01J47/02 , H01J1/92 , H01J17/04
CPC分类号： H01J47/02
摘要： An ionization chamber comprises a plurality of cylindrical electrodes which are coaxially arranged, and a casing which holds the cylindrical electrodes in it under the condition allowing the axial shifting of the edges of the cylindrical electrodes but preventing the radial shifting of the cylindrical electrodes whereby the slight relative deviation of parts for the ionization chamber can be minimized during use at high temperature or during a severe thermal cycle.
摘要翻译：电离室包括同轴布置的多个圆柱形电极和在允许圆柱形电极的边缘轴向移动但防止圆柱形电极的径向移动的条件下将圆柱形电极保持在其中的壳体，由此轻微在高温使用期间或在严重的热循环期间，电离室的部件的相对偏差可以最小化。

9. 发明授权

US4302696A Gamma-ray compensated ionization chamber 失效
标题翻译：伽马射线补偿电离室
公开(公告)号：US4302696A
公开(公告)日：1981-11-24
申请号：US56265
申请日：1979-07-10
申请人： Naoaki Wakayama , Toshimasa Tomoda , Shinji Fukakusa
发明人： Naoaki Wakayama , Toshimasa Tomoda , Shinji Fukakusa
IPC分类号： H01J47/02 , G01T1/185 , G01T3/00 , H01J47/12 , H01J47/08
CPC分类号： H01J47/1216
摘要： A gamma-ray compensated ionization chamber having cylindrical multiplex electrodes comprises first cylindrical multiplex electrodes and second cylindrical multiplex electrodes being arranged in reverse orders to that of the first cylindrical multiplex electrodes in the longitudinal direction of the cylindrical electrodes to prevent the deterioration of compensating characteristics caused by the variation of an external temperature and variation of gamma-ray spectrum.
摘要翻译：具有圆柱形多路复用电极的伽马射线补偿电离室包括第一圆柱形多路复用电极和第二圆柱形多路复用电极，其与圆柱形电极的纵向方向上的第一圆柱形多路复用电极的顺序相反排列，以防止引起的补偿特性的劣化通过外部温度的变化和伽马射线谱的变化。

10. 发明授权

US4885759A Measurement apparatus employing radiation 失效
标题翻译：使用辐射的测量装置
公开(公告)号：US4885759A
公开(公告)日：1989-12-05
申请号：US124558
申请日：1987-11-24
申请人： Toshimasa Tomoda , Shinji Badono , Masaki Komaru
发明人： Toshimasa Tomoda , Shinji Badono , Masaki Komaru
IPC分类号： G01N23/08 , G01N23/12
CPC分类号： G01N23/12 , G01N23/08
摘要： A measuring apparatus for measuring a physical property of a substance using radiation has a source of radiation for irradiating the substance, a radiation detector which is disposed on the opposite side of the substance from the radiation source, a mask for allowing radiaton to enter the radiation detector only along n prescribed pathways, and a signal processing and calculating device for calculating the physical property of the substance based on the radiation which is incident upon the radiation detector. The mask has n different mask patterns each comprising a plurality of pattern elements which allow the passage of radiation and which can be positioned between the substance and the radiation detector in alignment with the radiation pathways.
摘要翻译：用于使用辐射测量物质的物理性质的测量装置具有用于照射物质的辐射源，设置在与辐射源相反的物质的相反侧的辐射检测器，用于允许辐射进入辐射的掩模检测器仅沿着n个规定的路径，以及信号处理和计算装置，用于基于入射在辐射检测器上的辐射来计算物质的物理性质。掩模具有n个不同的掩模图案，每个掩模图案包括允许辐射通过的多个图案元件，并且其可以位于物质和辐射检测器之间，与辐射路径对准。

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