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    • 3. 发明授权
    • Discharge excitation gas laser apparatus
    • 放电激发气体激光装置
    • US5313487A
    • 1994-05-17
    • US887770
    • 1992-05-22
    • Shuichi FujikawaMitsuo InoueYukio SatoHaruhiko Nagai
    • Shuichi FujikawaMitsuo InoueYukio SatoHaruhiko Nagai
    • H01S3/0977H01S3/097
    • H01S3/0977H01S3/09775
    • At least two types of preionization systems are provided at a backside of one of a pair of primary electrodes which are disposed in a spaced opposed relation with respect to each other for causing a large area, spatially uniform main discharge in a laser gas therebetween. This improves efficiency and stability in laser oscillations under repeated operations at a high rate of tens to hundreds of shots per second. In addition, without using the laser output power, the preionization timing is controlled such that an optimal preionization timing is realized. The optimal preionization timing is determined on the basis of a minimum discharge starting voltage between the primary electrodes or a minimum required time from the time of applying a high voltage between said first and second primary electrodes until the time the main discharge commences.
    • 在一对主电极之一的背面设置至少两种类型的预电离系统,这些主电极相对于彼此以间隔开的相对关系设置,以在它们之间的激光气体中引起大面积的空间均匀的主放电。 这样可以在每秒数十到数百次的高速率重复操作下提高激光振荡的效率和稳定性。 此外,在不使用激光输出功率的情况下,控制预定时定时,从而实现最佳的初步化定时。 基于初级电极之间的最小放电起始电压或从在所述第一和第二主电极之间施加高电压直到主放电开始时的最小所需时间来确定最佳预电离定时。
    • 8. 发明授权
    • Laser oscillator circuit
    • 激光振荡器电路
    • US5181217A
    • 1993-01-19
    • US727432
    • 1991-07-09
    • Yukio SatoAkihiro SuzukiMitsuo InoueKenyu HarutaHaruhiko Nagai
    • Yukio SatoAkihiro SuzukiMitsuo InoueKenyu HarutaHaruhiko Nagai
    • H01S3/0971
    • H01S3/0971
    • A discharge pumping circuit of spiker/sustainer type for the Excimer laser oscillator, wherein spiker unit is isolated from the sustainer unit by a switching device such as a magnetic isolator is disclosed. In the pumping circuit, the switching device shifts from its OFF state to its ON state, during the process of charging a spiker capacitor, before its terminal voltage reaches a voltage which initiates the discharge, and a sharp-rise pulse voltage is applied by a transfer of electric charge from said sustainer capacitor to said spiker capacitor, to initiate the discharge for the pumping. In another discharge-pumping circuit which also has a means for preionizing the laser gas, the timing for the preionization is set to start after the initiation of charging the sustainer capacitor and before the initiation of charging the spiker capacitor in a polarity opposite to that of the sustainer capacitor, and is controlled for maintaining the discharge initiating voltage constant for the repetition frequency. In another discharge-pumping circuit, a power source for charging the sustainer capacitor is structured to include a magnetic pulse compression circuit to reduce the stress on a high voltage switch such as a thyratron in the circuit to realize an excellent performance, a long service life and a high reliability.
    • 公开了一种用于准分子激光振荡器的尖头/持续器类型的放电泵浦电路,其中尖头单元通过诸如磁隔离器的开关装置与维持器单元隔离。 在泵浦电路中,在尖端电容器的充电过程中,在其端电压达到开始放电的电压之前,开关器件从其OFF状态转换到ON状态,并且尖锐的脉冲电压由 将电荷从所述持续电容器转移到所述尖头电容器,以启动用于泵送的放电。 在还具有用于预激化激光气体的装置的另一个放电 - 泵浦电路中,预先去离子化的定时被设置为在对维持电容器充电开始之后并且在尖晶石电容器开始充电之前开始,其极性与 并且被控制为使重放频率的放电起始电压保持恒定。 在另一个放电泵浦电路中,用于对持续电容器充电的电源被构造成包括磁脉冲压缩电路,以减小电路中诸如闸流管之类的高压开关上的应力,以实现优异的性能,长的使用寿命 并具有高可靠性。